GB1276364A - A stereo scanning electron microscope and scanning apparatus therefor - Google Patents

A stereo scanning electron microscope and scanning apparatus therefor

Info

Publication number
GB1276364A
GB1276364A GB27101/69A GB2710169A GB1276364A GB 1276364 A GB1276364 A GB 1276364A GB 27101/69 A GB27101/69 A GB 27101/69A GB 2710169 A GB2710169 A GB 2710169A GB 1276364 A GB1276364 A GB 1276364A
Authority
GB
United Kingdom
Prior art keywords
switch
scanning
stereo
electron microscope
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB27101/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1276364A publication Critical patent/GB1276364A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB27101/69A 1968-05-28 1969-05-28 A stereo scanning electron microscope and scanning apparatus therefor Expired GB1276364A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3626468 1968-05-28

Publications (1)

Publication Number Publication Date
GB1276364A true GB1276364A (en) 1972-06-01

Family

ID=12464895

Family Applications (1)

Application Number Title Priority Date Filing Date
GB27101/69A Expired GB1276364A (en) 1968-05-28 1969-05-28 A stereo scanning electron microscope and scanning apparatus therefor

Country Status (4)

Country Link
US (1) US3585382A (enrdf_load_stackoverflow)
DE (1) DE1927038C3 (enrdf_load_stackoverflow)
FR (1) FR2010485A1 (enrdf_load_stackoverflow)
GB (1) GB1276364A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561723A (en) * 1982-04-28 1985-12-31 Tomy Kogyo Co., Inc. Electronic stereoscopic viewing device
GB2236015A (en) * 1986-09-24 1991-03-20 Nixon William C Charged particle beam scanning apparatus

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284061A (en) * 1970-01-21 1972-08-02 Cambridge Scientific Instr Ltd Electron beam apparatus
US3714422A (en) * 1970-04-06 1973-01-30 Hitachi Ltd Scanning stereoscopic electron microscope
US3748467A (en) * 1971-09-07 1973-07-24 Nibon Denshi K K Scanning electron microscope
US3912856A (en) * 1972-03-27 1975-10-14 William S Liddel Three-dimensional image transmitting apparatus
US3986027A (en) * 1975-04-07 1976-10-12 American Optical Corporation Stereo scanning microprobe
JPS51134558A (en) * 1975-05-19 1976-11-22 Hitachi Ltd Measuring unit
FR2498402A1 (fr) * 1981-01-16 1982-07-23 Centre Nat Rech Scient Procede et dispositif de visualisation tri-dimensionnelle a partir de video-signaux, notamment pour microscopie electronique
JPS607292A (ja) * 1983-06-27 1985-01-16 Toshiba Corp 立体ｘ線テレビ装置
US4654699A (en) * 1985-07-31 1987-03-31 Antonio Medina Three dimensional video image display system
US5155750A (en) * 1987-12-24 1992-10-13 Lockheed Missiles & Space Company, Inc. Stereoscopic radiographic inspection system
US6852974B2 (en) * 2001-03-06 2005-02-08 Topcon Corporation Electron beam device and method for stereoscopic measurements
JP2007218711A (ja) * 2006-02-16 2007-08-30 Hitachi High-Technologies Corp 電子顕微鏡装置を用いた計測対象パターンの計測方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2436676A (en) * 1945-01-27 1948-02-24 Rca Corp Apparatus for stereoscopic work
US2617041A (en) * 1949-11-15 1952-11-04 Farrand Optical Co Inc Stereoscopic electron microscope
US2730566A (en) * 1949-12-27 1956-01-10 Bartow Beacons Inc Method and apparatus for x-ray fluoroscopy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4561723A (en) * 1982-04-28 1985-12-31 Tomy Kogyo Co., Inc. Electronic stereoscopic viewing device
GB2236015A (en) * 1986-09-24 1991-03-20 Nixon William C Charged particle beam scanning apparatus
GB2236015B (en) * 1986-09-24 1991-06-19 Breton Bernard C Improvements in and relating to charged particle beam scanning apparatus

Also Published As

Publication number Publication date
DE1927038B2 (de) 1978-02-09
DE1927038A1 (de) 1969-12-04
DE1927038C3 (de) 1978-09-21
US3585382A (en) 1971-06-15
FR2010485A1 (enrdf_load_stackoverflow) 1970-02-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years