GB1263532A - Electron beam heating apparatus and method of control thereof - Google Patents

Electron beam heating apparatus and method of control thereof

Info

Publication number
GB1263532A
GB1263532A GB2931769A GB2931769A GB1263532A GB 1263532 A GB1263532 A GB 1263532A GB 2931769 A GB2931769 A GB 2931769A GB 2931769 A GB2931769 A GB 2931769A GB 1263532 A GB1263532 A GB 1263532A
Authority
GB
United Kingdom
Prior art keywords
control
gun
detectors
heating apparatus
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2931769A
Other languages
English (en)
Inventor
Igor Pavlovich Brukovsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moskovsky Energetichesky Institut
Original Assignee
Moskovsky Energetichesky Institut
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moskovsky Energetichesky Institut filed Critical Moskovsky Energetichesky Institut
Publication of GB1263532A publication Critical patent/GB1263532A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
GB2931769A 1968-06-10 1969-06-10 Electron beam heating apparatus and method of control thereof Expired GB1263532A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1247754A SU469163A1 (ru) 1968-06-10 1968-06-10 Электронно-лучева термическа установка

Publications (1)

Publication Number Publication Date
GB1263532A true GB1263532A (en) 1972-02-09

Family

ID=20442679

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2931769A Expired GB1263532A (en) 1968-06-10 1969-06-10 Electron beam heating apparatus and method of control thereof

Country Status (7)

Country Link
AT (1) AT304716B (fr)
BE (1) BE734363A (fr)
CS (1) CS162029B1 (fr)
FR (1) FR2010604A1 (fr)
GB (1) GB1263532A (fr)
SE (1) SE360539B (fr)
SU (1) SU469163A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2192607A3 (fr) * 2008-12-01 2013-09-04 United Technologies Corporation Contrôle de courant à faisceau d'électrons avec dépôt de vapeur

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2192607A3 (fr) * 2008-12-01 2013-09-04 United Technologies Corporation Contrôle de courant à faisceau d'électrons avec dépôt de vapeur

Also Published As

Publication number Publication date
BE734363A (fr) 1969-12-10
CS162029B1 (fr) 1975-07-15
DE1929446B2 (de) 1972-07-27
SU469163A1 (ru) 1975-04-30
AT304716B (de) 1973-01-25
DE1929446A1 (de) 1970-01-02
FR2010604A1 (fr) 1970-02-20
SE360539B (fr) 1973-09-24

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