SE360539B - - Google Patents
Info
- Publication number
- SE360539B SE360539B SE818069A SE818069A SE360539B SE 360539 B SE360539 B SE 360539B SE 818069 A SE818069 A SE 818069A SE 818069 A SE818069 A SE 818069A SE 360539 B SE360539 B SE 360539B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1247754A SU469163A1 (ru) | 1968-06-10 | 1968-06-10 | Электронно-лучева термическа установка |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE360539B true SE360539B (fr) | 1973-09-24 |
Family
ID=20442679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE818069A SE360539B (fr) | 1968-06-10 | 1969-06-09 |
Country Status (7)
| Country | Link |
|---|---|
| AT (1) | AT304716B (fr) |
| BE (1) | BE734363A (fr) |
| CS (1) | CS162029B1 (fr) |
| FR (1) | FR2010604A1 (fr) |
| GB (1) | GB1263532A (fr) |
| SE (1) | SE360539B (fr) |
| SU (1) | SU469163A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100263590A1 (en) * | 2008-12-01 | 2010-10-21 | United Technologies Corporation | Vapor Deposition Electron Beam Current Control |
-
1968
- 1968-06-10 SU SU1247754A patent/SU469163A1/ru active
-
1969
- 1969-06-09 SE SE818069A patent/SE360539B/xx unknown
- 1969-06-10 CS CS408969A patent/CS162029B1/cs unknown
- 1969-06-10 GB GB2931769A patent/GB1263532A/en not_active Expired
- 1969-06-10 FR FR6919174A patent/FR2010604A1/fr not_active Withdrawn
- 1969-06-10 BE BE734363D patent/BE734363A/xx unknown
- 1969-06-10 AT AT550769A patent/AT304716B/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| FR2010604A1 (fr) | 1970-02-20 |
| DE1929446A1 (de) | 1970-01-02 |
| SU469163A1 (ru) | 1975-04-30 |
| CS162029B1 (fr) | 1975-07-15 |
| GB1263532A (en) | 1972-02-09 |
| AT304716B (de) | 1973-01-25 |
| DE1929446B2 (de) | 1972-07-27 |
| BE734363A (fr) | 1969-12-10 |