CS160802B1 - - Google Patents

Info

Publication number
CS160802B1
CS160802B1 CS4999A CS499969A CS160802B1 CS 160802 B1 CS160802 B1 CS 160802B1 CS 4999 A CS4999 A CS 4999A CS 499969 A CS499969 A CS 499969A CS 160802 B1 CS160802 B1 CS 160802B1
Authority
CS
Czechoslovakia
Application number
CS4999A
Other languages
Czech (cs)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of CS160802B1 publication Critical patent/CS160802B1/cs

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/12—Regulating voltage or current wherein the variable actually regulated by the final control device is ac
    • G05F1/40—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices
    • G05F1/44—Regulating voltage or current wherein the variable actually regulated by the final control device is ac using discharge tubes or semiconductor devices as final control devices semiconductor devices only

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)
CS4999A 1968-07-17 1969-07-15 CS160802B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1257961A SU490099A1 (ru) 1968-07-17 1968-07-17 Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой

Publications (1)

Publication Number Publication Date
CS160802B1 true CS160802B1 (fr) 1975-05-04

Family

ID=20443009

Family Applications (1)

Application Number Title Priority Date Filing Date
CS4999A CS160802B1 (fr) 1968-07-17 1969-07-15

Country Status (9)

Country Link
US (1) US3689798A (fr)
AT (1) AT293564B (fr)
BE (1) BE736167A (fr)
CH (1) CH497106A (fr)
CS (1) CS160802B1 (fr)
DE (1) DE1935710A1 (fr)
FR (1) FR2013155A1 (fr)
GB (1) GB1270339A (fr)
SU (1) SU490099A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (fr) * 1971-04-30
NL7107749A (fr) * 1971-06-05 1972-12-07
DE2325808C2 (de) * 1973-05-22 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2325786C2 (de) * 1973-05-22 1983-10-06 Leybold-Heraeus Gmbh, 5000 Koeln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2514805C3 (de) * 1975-04-04 1978-05-18 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Anordnung zur Leistungssteuerung von Hochspannungs-EIektronenstrahlerzeugern
DE2918426A1 (de) * 1979-05-08 1980-11-20 Leybold Heraeus Gmbh & Co Kg Hochspannungsversorgungseinrichtung fuer leistungs-elektronenstrahlkanonen
DE2928301C2 (de) * 1979-07-13 1983-12-29 Leybold-Heraeus GmbH, 5000 Köln Anordnung zur Leistungssteuerung eines Hochspannungs-Elektronenstrahlerzeugers
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
DE102005020815B4 (de) 2005-05-04 2007-05-10 Applied Materials Gmbh & Co. Kg Anordnung für die Regelung der Elektronenstrahlleistung einer Elektronenstrahlkanone
EP2192607A3 (fr) * 2008-12-01 2013-09-04 United Technologies Corporation Contrôle de courant à faisceau d'électrons avec dépôt de vapeur

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2953701A (en) * 1957-09-05 1960-09-20 High Voltage Engineering Corp Sealed-off diode with electron emitting anode
US3072822A (en) * 1961-05-19 1963-01-08 Julian C Holmes Emission current regulator
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3250893A (en) * 1963-10-01 1966-05-10 Union Carbide Corp Method for providing a source of heat

Also Published As

Publication number Publication date
DE1935710A1 (de) 1970-02-26
AT293564B (de) 1971-10-11
BE736167A (fr) 1970-01-16
FR2013155A1 (fr) 1970-03-27
GB1270339A (en) 1972-04-12
US3689798A (en) 1972-09-05
SU490099A1 (ru) 1975-10-30
CH497106A (de) 1970-09-30

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