GB1263088A - Boron nitride-containing vessels coated with ti-si alloy - Google Patents

Boron nitride-containing vessels coated with ti-si alloy

Info

Publication number
GB1263088A
GB1263088A GB802869A GB802869A GB1263088A GB 1263088 A GB1263088 A GB 1263088A GB 802869 A GB802869 A GB 802869A GB 802869 A GB802869 A GB 802869A GB 1263088 A GB1263088 A GB 1263088A
Authority
GB
United Kingdom
Prior art keywords
alloy
boron nitride
coated
containing vessels
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB802869A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of GB1263088A publication Critical patent/GB1263088A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5133Metallising, e.g. infiltration of sintered ceramic preforms with molten metal with a composition mainly composed of one or more of the refractory metals
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/88Metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Alloys Or Alloy Compounds (AREA)
  • Ceramic Products (AREA)

Abstract

1,263,088. Coated refractory evaporation vessels. UNION CARBIDE CORP. Feb.14, 1969 [July 3, 1968], No.8028/69. Addition to 1,174,738. Headings C7D and C7F. A vacuum evaporation vessel e.g. for evaporating Al, comprising at least 20% BN and the balance a refractory such as TiB 2 , ZrB 2 , AlN, TiN, CaF 2 has at least apart of its evaporation surface coated with a Ti-Si alloy. The coating alloy which preferably contains 40-80% Si is applied either by flame spraying or as a slurry in xylene which is then fired at 1400-1500‹C. The vessel preferably contains 20-80% BN and the preferred coating alloy contains 56% Si-44% Ti.
GB802869A 1968-07-03 1969-02-14 Boron nitride-containing vessels coated with ti-si alloy Expired GB1263088A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74244668A 1968-07-03 1968-07-03

Publications (1)

Publication Number Publication Date
GB1263088A true GB1263088A (en) 1972-02-09

Family

ID=24984877

Family Applications (1)

Application Number Title Priority Date Filing Date
GB802869A Expired GB1263088A (en) 1968-07-03 1969-02-14 Boron nitride-containing vessels coated with ti-si alloy

Country Status (5)

Country Link
BE (1) BE728468A (en)
DE (1) DE1907099C3 (en)
FR (1) FR2012198A6 (en)
GB (1) GB1263088A (en)
NL (1) NL6902413A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006029615A2 (en) * 2004-09-17 2006-03-23 Sintec Keramik Gmbh Preparing and operating a vaporizer body for a pvd metallization installation
WO2007003167A1 (en) * 2005-07-01 2007-01-11 Sintec Keramik Gmbh Initial wetting auxiliary material for a vaporiser body

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118941A (en) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk KINZOKUJOHATSUYOYOKI
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
DE19821772A1 (en) * 1998-05-14 1999-11-18 Kempten Elektroschmelz Gmbh Ceramic evaporator boats with improved initial wetting behavior
DE102006001855A1 (en) * 2006-01-13 2007-07-19 Sintec Keramik Gmbh Evaporator body and method for providing an evaporator body
DE102007004635A1 (en) * 2007-01-30 2008-07-31 Sintec Keramik Gmbh Production of an electrically conducting vaporizer body for vaporizing metals in a physical vapor deposition process comprises sintering two different powder mixtures in a common hot pressing method forming an upper layer and a lower layer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006029615A2 (en) * 2004-09-17 2006-03-23 Sintec Keramik Gmbh Preparing and operating a vaporizer body for a pvd metallization installation
WO2006029615A3 (en) * 2004-09-17 2006-06-22 Sintec Keramik Gmbh & Co Kg Preparing and operating a vaporizer body for a pvd metallization installation
WO2007003167A1 (en) * 2005-07-01 2007-01-11 Sintec Keramik Gmbh Initial wetting auxiliary material for a vaporiser body

Also Published As

Publication number Publication date
FR2012198A6 (en) 1970-03-13
NL6902413A (en) 1970-01-06
DE1907099C3 (en) 1974-08-15
DE1907099B2 (en) 1974-01-03
BE728468A (en) 1969-08-14
DE1907099A1 (en) 1970-03-05

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