GB1257408A - - Google Patents

Info

Publication number
GB1257408A
GB1257408A GB1257408DA GB1257408A GB 1257408 A GB1257408 A GB 1257408A GB 1257408D A GB1257408D A GB 1257408DA GB 1257408 A GB1257408 A GB 1257408A
Authority
GB
United Kingdom
Prior art keywords
platinum
gold
titanium
sputtering
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691942455 external-priority patent/DE1942455C3/de
Application filed filed Critical
Publication of GB1257408A publication Critical patent/GB1257408A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/945—Special, e.g. metal

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
GB1257408D 1969-08-20 1970-08-19 Expired GB1257408A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691942455 DE1942455C3 (de) 1969-08-20 Verfahren zum Herstellen mehrschichtiger Leiterbahnen

Publications (1)

Publication Number Publication Date
GB1257408A true GB1257408A (https=) 1971-12-15

Family

ID=5743336

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1257408D Expired GB1257408A (https=) 1969-08-20 1970-08-19

Country Status (8)

Country Link
US (1) US3642548A (https=)
JP (1) JPS4910191B1 (https=)
AT (1) AT305417B (https=)
CH (1) CH508281A (https=)
FR (1) FR2060107B1 (https=)
GB (1) GB1257408A (https=)
NL (1) NL7011089A (https=)
SE (1) SE351321B (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3839108A (en) * 1970-07-22 1974-10-01 Us Navy Method of forming a precision pattern of apertures in a plate
US3740523A (en) * 1971-12-30 1973-06-19 Bell Telephone Labor Inc Encoding of read only memory by laser vaporization
US3879746A (en) * 1972-05-30 1975-04-22 Bell Telephone Labor Inc Gate metallization structure
US4057831A (en) * 1972-09-05 1977-11-08 U.S. Philips Corporation Video record disc manufactured by a process involving chemical or sputter etching
JPS5061124A (https=) * 1973-09-28 1975-05-26
US4035208A (en) * 1974-09-03 1977-07-12 Texas Instruments Incorporated Method of patterning Cr-Pt-Au metallization for silicon devices
FR2285716A1 (fr) * 1974-09-18 1976-04-16 Radiotechnique Compelec Procede pour la fabrication d'un dispositif semi-conducteur comportant une configuration de conducteurs et dispositif fabrique par ce procede
US4135998A (en) * 1978-04-26 1979-01-23 International Business Machines Corp. Method for forming pt-si schottky barrier contact
US4226932A (en) * 1979-07-05 1980-10-07 Gte Automatic Electric Laboratories Incorporated Titanium nitride as one layer of a multi-layered coating intended to be etched
US4248688A (en) * 1979-09-04 1981-02-03 International Business Machines Corporation Ion milling of thin metal films
CH648692A5 (en) * 1979-09-05 1985-03-29 Bbc Brown Boveri & Cie Contact arrangement on a semiconductor component
US6025205A (en) * 1997-01-07 2000-02-15 Tong Yang Cement Corporation Apparatus and methods of forming preferred orientation-controlled platinum films using nitrogen
JP4605554B2 (ja) * 2000-07-25 2011-01-05 独立行政法人物質・材料研究機構 ドライエッチング用マスク材
JP2005025910A (ja) * 2003-06-13 2005-01-27 Nec Corp 光学的情報記録媒体及びその製造方法
ES2685343B1 (es) 2017-03-31 2019-10-11 Dominguez Francisco Picon Dispositivo y método para el control y gestión de recursos laborales

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3271286A (en) * 1964-02-25 1966-09-06 Bell Telephone Labor Inc Selective removal of material using cathodic sputtering
GB1023532A (https=) * 1964-01-07
US3442701A (en) * 1965-05-19 1969-05-06 Bell Telephone Labor Inc Method of fabricating semiconductor contacts
US3474021A (en) * 1966-01-12 1969-10-21 Ibm Method of forming openings using sequential sputtering and chemical etching
US3546010A (en) * 1968-03-06 1970-12-08 Bosch Gmbh Robert Method of producing multilayer bodies of predetermined electric conductivity

Also Published As

Publication number Publication date
CH508281A (de) 1971-05-31
JPS4910191B1 (https=) 1974-03-08
DE1942455A1 (de) 1971-02-25
US3642548A (en) 1972-02-15
NL7011089A (https=) 1971-02-23
SE351321B (https=) 1972-11-20
AT305417B (de) 1973-02-26
FR2060107B1 (https=) 1974-10-31
DE1942455B2 (de) 1977-05-26
FR2060107A1 (https=) 1971-06-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee