GB1256887A - - Google Patents
Info
- Publication number
- GB1256887A GB1256887A GB1256887DA GB1256887A GB 1256887 A GB1256887 A GB 1256887A GB 1256887D A GB1256887D A GB 1256887DA GB 1256887 A GB1256887 A GB 1256887A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- torr
- electron
- mesh
- toroid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 239000003570 air Substances 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000011343 solid material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
1,256,887. Electron-beam tubes. UNITED KINGDOM ATOMIC ENERGY AUTHORITY. 12 May, 1969 [15 May, 1968], No. 23092/68. Heading H1D. A hollow mesh cathode 4 for an electron-beam treatment device has a portion 8 of greater porosity than the rest of the cathode. Preferably portion 8 is concave outwards. The coarse mesh may form an annulus or border between the main body and an insert of meshed or solid material, Figs. 2, 3 (not shown). The cathode may be shaped as a cylinder, sphere or toroid. The filling may be helium and the pressure can be adjusted between, say, 4À5 Î 10<SP>-2</SP> torr and 15 Î 10<SP>-2</SP> torr to alter the focusing; argon, hydrogen or air may also be used. As shown, the cathode supported from a water-cooled terminal 6, earthed shield 12 acting also as anode. The crucible 14 is movable.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2309268 | 1968-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1256887A true GB1256887A (en) | 1971-12-15 |
Family
ID=10189988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1256887D Expired GB1256887A (en) | 1968-05-15 | 1968-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1256887A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140199A (en) * | 1983-04-19 | 1984-11-21 | Balzers Hochvakuum | A method of heating products |
-
1968
- 1968-05-15 GB GB1256887D patent/GB1256887A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2140199A (en) * | 1983-04-19 | 1984-11-21 | Balzers Hochvakuum | A method of heating products |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |