GB1251692A - - Google Patents
Info
- Publication number
- GB1251692A GB1251692A GB1251692DA GB1251692A GB 1251692 A GB1251692 A GB 1251692A GB 1251692D A GB1251692D A GB 1251692DA GB 1251692 A GB1251692 A GB 1251692A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wafer
- semi
- wax
- ceramic
- slide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 3
- 238000005530 etching Methods 0.000 abstract 2
- 230000000873 masking effect Effects 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1517368 | 1968-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1251692A true GB1251692A (fr) | 1971-10-27 |
Family
ID=10054314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1251692D Expired GB1251692A (fr) | 1968-03-29 | 1968-03-29 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1915550A1 (fr) |
| FR (1) | FR2005044A1 (fr) |
| GB (1) | GB1251692A (fr) |
| NL (1) | NL6904332A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020376A (en) * | 1987-01-30 | 1991-06-04 | University College Cardiff Consultants Limited | Microenvironmental sensors |
-
1968
- 1968-03-29 GB GB1251692D patent/GB1251692A/en not_active Expired
-
1969
- 1969-03-20 NL NL6904332A patent/NL6904332A/xx unknown
- 1969-03-27 FR FR6909082A patent/FR2005044A1/fr active Granted
- 1969-03-27 DE DE19691915550 patent/DE1915550A1/de active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5020376A (en) * | 1987-01-30 | 1991-06-04 | University College Cardiff Consultants Limited | Microenvironmental sensors |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2005044B1 (fr) | 1973-07-13 |
| DE1915550A1 (de) | 1969-10-30 |
| FR2005044A1 (fr) | 1969-12-05 |
| NL6904332A (fr) | 1969-10-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |