GB1250464A - - Google Patents

Info

Publication number
GB1250464A
GB1250464A GB1250464DA GB1250464A GB 1250464 A GB1250464 A GB 1250464A GB 1250464D A GB1250464D A GB 1250464DA GB 1250464 A GB1250464 A GB 1250464A
Authority
GB
United Kingdom
Prior art keywords
slide
adjustment
springs
pairs
relative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1250464A publication Critical patent/GB1250464A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB1250464D 1967-10-27 1968-10-28 Expired GB1250464A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0112621 1967-10-27

Publications (1)

Publication Number Publication Date
GB1250464A true GB1250464A (enrdf_load_stackoverflow) 1971-10-20

Family

ID=7531908

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1250464D Expired GB1250464A (enrdf_load_stackoverflow) 1967-10-27 1968-10-28

Country Status (5)

Country Link
CH (1) CH485328A (enrdf_load_stackoverflow)
DE (1) DE1614644A1 (enrdf_load_stackoverflow)
FR (1) FR1587048A (enrdf_load_stackoverflow)
GB (1) GB1250464A (enrdf_load_stackoverflow)
NL (1) NL6811808A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2143049A (en) * 1983-06-29 1985-01-30 Dainippon Screen Mfg Original transport in printing apparatus
GB2271191A (en) * 1992-08-28 1994-04-06 Randy John Penn Alignment of wafers in printing
EP1211560A1 (en) * 2000-12-04 2002-06-05 Nikon Corporation Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3374598D1 (en) * 1983-08-09 1987-12-23 Siemens Ag Positioning and adjusting table and method of manufacture
CN113843636A (zh) * 2021-10-22 2021-12-28 王德胜 工件加工精微快速调整角度装置及其调整方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2143049A (en) * 1983-06-29 1985-01-30 Dainippon Screen Mfg Original transport in printing apparatus
US4580892A (en) * 1983-06-29 1986-04-08 Dainippon Screen Mfg. Co., Ltd. Contact printing apparatus
GB2271191A (en) * 1992-08-28 1994-04-06 Randy John Penn Alignment of wafers in printing
GB2271191B (en) * 1992-08-28 1995-08-02 Randy John Penn Method and apparatus for accurate alignment of semiconductor wafers in photo printers
US5459546A (en) * 1992-08-28 1995-10-17 Penn; Randy J. Method and apparatus for accurate alignment of semiconductor wafers in photo printers
EP1211560A1 (en) * 2000-12-04 2002-06-05 Nikon Corporation Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems

Also Published As

Publication number Publication date
DE1614644A1 (de) 1970-02-26
FR1587048A (enrdf_load_stackoverflow) 1970-03-06
NL6811808A (enrdf_load_stackoverflow) 1969-04-29
CH485328A (de) 1970-01-31

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee