NL6811808A - - Google Patents

Info

Publication number
NL6811808A
NL6811808A NL6811808A NL6811808A NL6811808A NL 6811808 A NL6811808 A NL 6811808A NL 6811808 A NL6811808 A NL 6811808A NL 6811808 A NL6811808 A NL 6811808A NL 6811808 A NL6811808 A NL 6811808A
Authority
NL
Netherlands
Application number
NL6811808A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6811808A publication Critical patent/NL6811808A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
NL6811808A 1967-10-27 1968-08-19 NL6811808A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0112621 1967-10-27

Publications (1)

Publication Number Publication Date
NL6811808A true NL6811808A (enrdf_load_stackoverflow) 1969-04-29

Family

ID=7531908

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6811808A NL6811808A (enrdf_load_stackoverflow) 1967-10-27 1968-08-19

Country Status (5)

Country Link
CH (1) CH485328A (enrdf_load_stackoverflow)
DE (1) DE1614644A1 (enrdf_load_stackoverflow)
FR (1) FR1587048A (enrdf_load_stackoverflow)
GB (1) GB1250464A (enrdf_load_stackoverflow)
NL (1) NL6811808A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113843636A (zh) * 2021-10-22 2021-12-28 王德胜 工件加工精微快速调整角度装置及其调整方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580892A (en) * 1983-06-29 1986-04-08 Dainippon Screen Mfg. Co., Ltd. Contact printing apparatus
DE3374598D1 (en) * 1983-08-09 1987-12-23 Siemens Ag Positioning and adjusting table and method of manufacture
US5459546A (en) * 1992-08-28 1995-10-17 Penn; Randy J. Method and apparatus for accurate alignment of semiconductor wafers in photo printers
JP2002170765A (ja) * 2000-12-04 2002-06-14 Nikon Corp ステージ装置及び露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113843636A (zh) * 2021-10-22 2021-12-28 王德胜 工件加工精微快速调整角度装置及其调整方法

Also Published As

Publication number Publication date
DE1614644A1 (de) 1970-02-26
FR1587048A (enrdf_load_stackoverflow) 1970-03-06
GB1250464A (enrdf_load_stackoverflow) 1971-10-20
CH485328A (de) 1970-01-31

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