CH485328A - Vorrichtung zum Herstellen einer Photolackmaschine - Google Patents

Vorrichtung zum Herstellen einer Photolackmaschine

Info

Publication number
CH485328A
CH485328A CH1595468A CH1595468A CH485328A CH 485328 A CH485328 A CH 485328A CH 1595468 A CH1595468 A CH 1595468A CH 1595468 A CH1595468 A CH 1595468A CH 485328 A CH485328 A CH 485328A
Authority
CH
Switzerland
Prior art keywords
manufacturing
photoresist
machine
photoresist machine
Prior art date
Application number
CH1595468A
Other languages
German (de)
English (en)
Inventor
Heinz Dr Henker
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH485328A publication Critical patent/CH485328A/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CH1595468A 1967-10-27 1968-10-25 Vorrichtung zum Herstellen einer Photolackmaschine CH485328A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0112621 1967-10-27

Publications (1)

Publication Number Publication Date
CH485328A true CH485328A (de) 1970-01-31

Family

ID=7531908

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1595468A CH485328A (de) 1967-10-27 1968-10-25 Vorrichtung zum Herstellen einer Photolackmaschine

Country Status (5)

Country Link
CH (1) CH485328A (enrdf_load_stackoverflow)
DE (1) DE1614644A1 (enrdf_load_stackoverflow)
FR (1) FR1587048A (enrdf_load_stackoverflow)
GB (1) GB1250464A (enrdf_load_stackoverflow)
NL (1) NL6811808A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134268A1 (de) * 1983-08-09 1985-03-20 Siemens Aktiengesellschaft Justier- oder Positioniertisch und Verfahren zu dessen Herstellung

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580892A (en) * 1983-06-29 1986-04-08 Dainippon Screen Mfg. Co., Ltd. Contact printing apparatus
US5459546A (en) * 1992-08-28 1995-10-17 Penn; Randy J. Method and apparatus for accurate alignment of semiconductor wafers in photo printers
JP2002170765A (ja) * 2000-12-04 2002-06-14 Nikon Corp ステージ装置及び露光装置
CN113843636A (zh) * 2021-10-22 2021-12-28 王德胜 工件加工精微快速调整角度装置及其调整方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0134268A1 (de) * 1983-08-09 1985-03-20 Siemens Aktiengesellschaft Justier- oder Positioniertisch und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
DE1614644A1 (de) 1970-02-26
FR1587048A (enrdf_load_stackoverflow) 1970-03-06
GB1250464A (enrdf_load_stackoverflow) 1971-10-20
NL6811808A (enrdf_load_stackoverflow) 1969-04-29

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Legal Events

Date Code Title Description
PL Patent ceased