GB1248825A - Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments - Google Patents

Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments

Info

Publication number
GB1248825A
GB1248825A GB40162/69A GB4016269A GB1248825A GB 1248825 A GB1248825 A GB 1248825A GB 40162/69 A GB40162/69 A GB 40162/69A GB 4016269 A GB4016269 A GB 4016269A GB 1248825 A GB1248825 A GB 1248825A
Authority
GB
United Kingdom
Prior art keywords
plates
slit
optical
support
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB40162/69A
Inventor
Hermann Wollnik
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681797091 external-priority patent/DE1797091C/en
Application filed by Individual filed Critical Individual
Publication of GB1248825A publication Critical patent/GB1248825A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Micromachines (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1,248,825. Electron/ion beam tubes. H. WOLLNIK. 12 Aug., 1969 [14 Aug., 1968], No. 40162/69. Heading H1D. [Also in Division G2] A temperature-controlled orifice or slit for optical, ion-optical or electron-optical instruments comprises a plurality of plates having edges defining the orifice or slit mounted on a support having a temperature coefficient of expansion different from that of the plates. In a simple example the plates may be merely screwed to a supporting block having a hole for passage of a beam immediately beneath the centre of the slit. The block may be made of molybdenum and the plates of nickel, copper or aluminium. Both elements are heated from a common source and the combination of materials is chosen to give a required adjustment characteristic. The edges of the plates may overlap and be shaped so as to define a square or rectangular orifice. A number of plates may extend radially inwardly from a circular support and together define a square orifice at the centre after the manner of an adjustable iris. Fig. 6 shows plates 62, 63 defining a slit 65 above hole 69 in support 68. The plates are attached to the support by bimetallic flexural members 66, 67 which determine the width d of the slit. The movement of members 66, 67 may be limited by a pair of stops (118, 119, Fig. 11, not shown) which extend outwardly from the support 68. The slit plates themselves may be formed from a pair of flexural bimetallic laminae (Figs. 9, 10, not shown). In the arrangement of Fig. 3, a pair of plates 32, 33 defining a slit d are attached at A to a further pair 38, 39 of plates which are in turn attached at B to a third pair 36, 37 of plates, these being attached to an apertured support member 31 at C. The pairs of plates and the support are made of two materials which alternate throughout the structure, and which have relatively high and low expansion coefficients. The effect is to multiply the movement of the slit.
GB40162/69A 1968-08-14 1969-08-12 Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments Expired GB1248825A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681797091 DE1797091C (en) 1968-08-14 Panel with a control element that can be regulated by heat for optical, special ion-optical devices

Publications (1)

Publication Number Publication Date
GB1248825A true GB1248825A (en) 1971-10-06

Family

ID=5708510

Family Applications (1)

Application Number Title Priority Date Filing Date
GB40162/69A Expired GB1248825A (en) 1968-08-14 1969-08-12 Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments

Country Status (3)

Country Link
US (1) US3610734A (en)
FR (1) FR2022123A1 (en)
GB (1) GB1248825A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4212077A1 (en) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelectric valve and process for its manufacture
DE10244850A1 (en) * 2002-09-24 2004-04-01 Carl Zeiss Jena Gmbh Adjustable pinhole

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8700496A (en) * 1987-02-27 1988-09-16 Stichting Tech Wetenschapp CONTINUOUSLY VARIABLE MICRO Diaphragm.
US4845371A (en) * 1988-03-29 1989-07-04 Siemens Medical Laboratories, Inc. Apparatus for generating and transporting a charged particle beam
DE10211492B4 (en) * 2002-03-15 2008-05-15 Siemens Ag Lamella, lamellar collimator, device for beam limitation and irradiation device
EP2498271B1 (en) * 2003-10-20 2021-03-31 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with aperture
EP1916694A1 (en) * 2006-10-25 2008-04-30 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Adjustable aperture element for particle beam device, method of operating and manufacturing thereof
DE102009028013B9 (en) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Particle beam device with a diaphragm unit and method for adjusting a jet stream in a particle beam device
CN104409131B (en) * 2014-11-24 2017-05-03 西北核技术研究所 Adjustable-area freeform beam generation method and adjustable-area freeform gamma collimator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1951018A (en) * 1930-11-01 1934-03-13 Wired Radio Inc Magnetostrictive light valve
US2059504A (en) * 1932-12-06 1936-11-03 Stewart C Whitman Apparatus and method for recording sound on film
US2852684A (en) * 1955-12-22 1958-09-16 Gen Electric Adjustable slit mechanism
US3242796A (en) * 1962-04-09 1966-03-29 Beckman Instruments Inc Slit control apparatus
US3447875A (en) * 1965-06-21 1969-06-03 American Optical Corp Temperature compensating refractometers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4212077A1 (en) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelectric valve and process for its manufacture
DE10244850A1 (en) * 2002-09-24 2004-04-01 Carl Zeiss Jena Gmbh Adjustable pinhole
US7324253B2 (en) 2002-09-24 2008-01-29 Carl Zeiss Jena Gmbh Installable pinhole
US7400433B2 (en) 2002-09-24 2008-07-15 Carl Zeiss Microimaging Gmbh Installable pinhole

Also Published As

Publication number Publication date
US3610734A (en) 1971-10-05
DE1797091B2 (en) 1972-09-28
DE1797091A1 (en) 1970-12-10
FR2022123A1 (en) 1970-07-31

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