GB1245153A - Improvements in or relating to mass spectrometer leak detectors - Google Patents

Improvements in or relating to mass spectrometer leak detectors

Info

Publication number
GB1245153A
GB1245153A GB55987/68A GB5598768A GB1245153A GB 1245153 A GB1245153 A GB 1245153A GB 55987/68 A GB55987/68 A GB 55987/68A GB 5598768 A GB5598768 A GB 5598768A GB 1245153 A GB1245153 A GB 1245153A
Authority
GB
United Kingdom
Prior art keywords
getter
cathodes
mass spectrometer
noble gases
getter material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB55987/68A
Other languages
English (en)
Inventor
Lewis Dana Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1245153A publication Critical patent/GB1245153A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB55987/68A 1967-11-29 1968-11-26 Improvements in or relating to mass spectrometer leak detectors Expired GB1245153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68660967A 1967-11-29 1967-11-29

Publications (1)

Publication Number Publication Date
GB1245153A true GB1245153A (en) 1971-09-08

Family

ID=24757020

Family Applications (1)

Application Number Title Priority Date Filing Date
GB55987/68A Expired GB1245153A (en) 1967-11-29 1968-11-26 Improvements in or relating to mass spectrometer leak detectors

Country Status (5)

Country Link
US (1) US3591827A (cg-RX-API-DMAC7.html)
DE (1) DE1808385A1 (cg-RX-API-DMAC7.html)
FR (1) FR1595764A (cg-RX-API-DMAC7.html)
GB (1) GB1245153A (cg-RX-API-DMAC7.html)
NL (1) NL6815469A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
GB2190204A (en) * 1986-05-09 1987-11-11 Boc Group Plc Search gas leak detector

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US3866041A (en) * 1973-10-23 1975-02-11 Allis Chalmers Method and apparatus for evaluating the gas content of materials
JPS56126733A (en) * 1980-03-10 1981-10-05 Nippon Sanso Kk Detecting method for leakage of helium
FR2666410B1 (fr) * 1990-09-05 1993-10-08 Alcatel Cit Detecteur de fuite haut flux a trois filtres moleculaires.
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
TW460943B (en) * 1997-06-11 2001-10-21 Applied Materials Inc Reduction of mobile ion and metal contamination in HDP-CVD chambers using chamber seasoning film depositions
US6082414A (en) * 1998-12-03 2000-07-04 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for replacing an attachment on a vacuum chamber
US6498344B1 (en) * 1999-10-01 2002-12-24 Siemens Energy & Automation, Inc. Triode ion pump
JP4511543B2 (ja) * 2003-06-11 2010-07-28 バリアン・インコーポレイテッド 蓄積法による漏れ検出装置および方法
ATE506609T1 (de) * 2003-06-11 2011-05-15 Agilent Technologies Inc Vorrichtung und verfahren zur detektion von grossen leckagen in abgedichteten gegenständen
EP1860419B1 (en) * 2003-06-11 2014-02-26 Agilent Technologies, Inc. Apparatus for leak detection
DE602004010257T2 (de) * 2003-06-11 2008-10-02 Varian, Inc., Palo Alto Verfahren und vorrichtung zum erfassen von grossen leckagen
AU2003300743A1 (en) * 2003-12-19 2005-07-05 Tpa Brianza Picc.Soc.Coop.A.R.L. System and device for leak detection
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
DE102004034381A1 (de) * 2004-07-16 2006-02-16 Inficon Gmbh Gassensor und Verfahren zum Betreiben einer Getterpumpe
KR100773391B1 (ko) * 2005-09-01 2007-11-05 한국전기연구원 박판 접합 장치 및 이를 이용한 박판 접합 방법
US7459677B2 (en) * 2006-02-15 2008-12-02 Varian, Inc. Mass spectrometer for trace gas leak detection with suppression of undesired ions
US7427751B2 (en) 2006-02-15 2008-09-23 Varian, Inc. High sensitivity slitless ion source mass spectrometer for trace gas leak detection
US7429863B2 (en) * 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
US7497110B2 (en) * 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
US20080202210A1 (en) * 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
DE102008011686A1 (de) * 2008-02-28 2009-09-03 Inficon Gmbh Heliumsensor
US9243186B2 (en) 2012-08-17 2016-01-26 Suncoke Technology And Development Llc. Coke plant including exhaust gas sharing
US9359554B2 (en) 2012-08-17 2016-06-07 Suncoke Technology And Development Llc Automatic draft control system for coke plants
PL2938701T3 (pl) 2012-12-28 2020-05-18 Suncoke Technology And Development Llc Pokrywy kominów upustowych i powiązane sposoby
US9476547B2 (en) 2012-12-28 2016-10-25 Suncoke Technology And Development Llc Exhaust flow modifier, duct intersection incorporating the same, and methods therefor
US10883051B2 (en) 2012-12-28 2021-01-05 Suncoke Technology And Development Llc Methods and systems for improved coke quenching
US10760002B2 (en) 2012-12-28 2020-09-01 Suncoke Technology And Development Llc Systems and methods for maintaining a hot car in a coke plant
CN104902984B (zh) 2012-12-28 2019-05-31 太阳焦炭科技和发展有限责任公司 用于去除排放物中的汞的系统和方法
US9273250B2 (en) 2013-03-15 2016-03-01 Suncoke Technology And Development Llc. Methods and systems for improved quench tower design
US8829425B1 (en) 2013-05-24 2014-09-09 Bayspec, Inc. Apparatus and methods for creating a vacuum in a portable mass spectrometer
CA2935325C (en) 2013-12-31 2022-11-22 Suncoke Technology And Development Llc Methods for decarbonizing coking ovens, and associated systems and devices
EP3194531A4 (en) 2014-09-15 2018-06-20 Suncoke Technology and Development LLC Coke ovens having monolith component construction
WO2016109699A1 (en) 2014-12-31 2016-07-07 Suncoke Technology And Development Llc Multi-modal beds of coking material
CA2973243C (en) 2015-01-02 2022-07-19 Suncoke Technology And Development Llc Integrated coke plant automation and optimization using advanced control and optimization techniques
KR102253567B1 (ko) 2015-12-28 2021-05-17 선코크 테크놀러지 앤드 디벨로프먼트 엘엘씨 동적으로 코크스 오븐을 충전하기 위한 방법 및 시스템
KR102445523B1 (ko) 2016-06-03 2022-09-20 선코크 테크놀러지 앤드 디벨로프먼트 엘엘씨 산업 설비에서 교정 액션을 자동적으로 생성하기 위한 방법 및 시스템
AU2018273894A1 (en) 2017-05-23 2019-12-19 Suncoke Technology And Development Llc System and method for repairing a coke oven
US11760937B2 (en) 2018-12-28 2023-09-19 Suncoke Technology And Development Llc Oven uptakes
BR112021012455B1 (pt) 2018-12-28 2023-10-24 Suncoke Technology And Development Llc Forno de coque
US11021655B2 (en) 2018-12-28 2021-06-01 Suncoke Technology And Development Llc Decarbonization of coke ovens and associated systems and methods
CA3125340C (en) 2018-12-28 2022-04-26 Suncoke Technology And Development Llc Spring-loaded heat recovery oven system and method
BR112021012598B1 (pt) 2018-12-28 2024-01-23 Suncoke Technology And Development Llc Método para detectar um vazamento em um sistema para coqueificar carvão, método para detectar um vazamento de ar em um sistema para coqueificar carvão, método para detectar um vazamento de ar em um sistema para coqueificar carvão sob uma pressão negativa e método para detectar um vazamento de ar entre um sistema de alta pressão e um sistema de baixa pressão
CA3125589A1 (en) 2018-12-31 2020-07-09 Suncoke Technology And Development Llc Methods and systems for providing corrosion resistant surfaces in contaminant treatment systems
US11486572B2 (en) 2018-12-31 2022-11-01 Suncoke Technology And Development Llc Systems and methods for Utilizing flue gas
US12227699B2 (en) 2019-12-26 2025-02-18 Suncoke Technology And Development Llc Oven health optimization systems and methods
WO2021225988A1 (en) 2020-05-03 2021-11-11 Suncoke Technology And Development Llc High-quality coke products
JP7595191B2 (ja) 2021-11-04 2024-12-05 サンコーク テクノロジー アンド ディベロップメント リミテッド ライアビリティ カンパニー 鋳物用コークス生産物、及び関連システム、装置並びに方法
US11946108B2 (en) 2021-11-04 2024-04-02 Suncoke Technology And Development Llc Foundry coke products and associated processing methods via cupolas
DE102022111596A1 (de) * 2022-05-10 2023-11-16 Inficon Gmbh Lecksuchvorrichtung und Lecksuchverfahren zur Detektion eines Gaslecks in einem Prüfling
EP4612257A1 (en) 2022-11-04 2025-09-10 Suncoke Technology and Development LLC Coal blends, foundry coke products, and associated systems, devices, and methods
WO2025111437A1 (en) 2023-11-21 2025-05-30 Suncoke Technology And Development Llc Flat push hot car for foundry coke and associated systems and methods

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2486199A (en) * 1945-09-10 1949-10-25 Univ Minnesota Method and apparatus for determining leaks
DE1302826B (cg-RX-API-DMAC7.html) * 1962-07-16 Ges Fuer Kernforschung Mbh
US3391303A (en) * 1965-01-25 1968-07-02 Lewis D. Hall Electronic vacuum pump including a sputter electrode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123153A (en) * 1982-06-30 1984-01-25 Boc Group Plc Leak detector
GB2190204A (en) * 1986-05-09 1987-11-11 Boc Group Plc Search gas leak detector
GB2190204B (en) * 1986-05-09 1990-10-17 Boc Group Plc Improvement in leak detectors

Also Published As

Publication number Publication date
NL6815469A (cg-RX-API-DMAC7.html) 1969-06-02
US3591827A (en) 1971-07-06
FR1595764A (cg-RX-API-DMAC7.html) 1970-06-15
DE1808385A1 (de) 1969-07-17

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