GB1238889A - - Google Patents

Info

Publication number
GB1238889A
GB1238889A GB5606768A GB1238889DA GB1238889A GB 1238889 A GB1238889 A GB 1238889A GB 5606768 A GB5606768 A GB 5606768A GB 1238889D A GB1238889D A GB 1238889DA GB 1238889 A GB1238889 A GB 1238889A
Authority
GB
United Kingdom
Prior art keywords
specimen
axis
lens
ray
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5606768A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1238889A publication Critical patent/GB1238889A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1,238,889. Electron microscopes. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. 6 Jan., 1970 [26 Nov., 1968], No. 56067/68. Heading H1D. The polepieces of the objective lens of an electron microscope are spaced apart axially by an amount sufficient to allow manipulation of the specimen in the gap, and means are provided for exciting the lens to provide a plurality of successive foci. Fig. 8a illustrates a lens excited so as to produce three foci F 1 , F 2 and F 3 located at the points where the ray X, X<SP>1</SP> crosses the axis O-O<SP>1</SP>, the ray X, X<SP>1</SP> being one that emerges parallel to the axis. The ray Y, Y<SP>1</SP> is a trajectory passing through an off-axis point on the specimen, and the points where it crosses the axis are suitable locations for an aperturelimiting diaphragm. For ultimate performance the specimen may be located at F 1 and the diaphragm at A 1 . When more space is required for manipulating the specimen it may be moved to location F 2 with the same lens excitation, or the lens excitation may be reduced to provide a single focus near the centre of the gap. The specimen is inserted from the side and when it is located in the centre of the gap it may be supported on a goniometer holder which permits rotation of the specimen up to 60 degrees about an axis normal to the plane of Fig. 8a (Fig. 9, not shown). Alternative facilities may be provided for the specimen such as heating, cooling or tensioning, in the increased space made available.
GB5606768A 1968-11-26 1968-11-26 Expired GB1238889A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5606768 1968-11-26

Publications (1)

Publication Number Publication Date
GB1238889A true GB1238889A (en) 1971-07-14

Family

ID=10475637

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5606768A Expired GB1238889A (en) 1968-11-26 1968-11-26

Country Status (2)

Country Link
US (1) US3660657A (en)
GB (1) GB1238889A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138578B2 (en) * 1972-10-23 1976-10-22
DE2541245A1 (en) * 1975-09-12 1977-03-24 Siemens Ag CORPUSCULAR BEAM SCANNING MICROSCOPE
DE2541915A1 (en) * 1975-09-19 1977-03-31 Max Planck Gesellschaft BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE
TW200639901A (en) * 2005-05-09 2006-11-16 Li Bing Huan Device for operating gas in vacuum or low-pressure environment and for observation of the operation
GB201302624D0 (en) * 2013-02-14 2013-04-03 Univ Antwerpen High-resolution amplitude contrast imaging
JP6718782B2 (en) * 2016-09-21 2020-07-08 日本電子株式会社 Objective lens and transmission electron microscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2499019A (en) * 1949-01-29 1950-02-28 Rca Corp Adjustable specimen support for electron-optical instruments
NL261531A (en) * 1960-02-22
NL282644A (en) * 1962-08-29 1964-12-28
NL145716B (en) * 1964-06-06 1975-04-15 Philips Nv ELECTRON BEAM DEVICE.
US3535514A (en) * 1966-05-24 1970-10-20 Rca Corp Positionable aperture for electron microscope
DE1614126B1 (en) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Corpuscular beam microscope, in particular electron microscope, with a condenser lens formed by the front of an objective lens and a range diaphragm

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus
GB2173945A (en) * 1982-03-19 1986-10-22 Int Precision Inc Scanning electron beam apparatus

Also Published As

Publication number Publication date
US3660657A (en) 1972-05-02

Similar Documents

Publication Publication Date Title
Wåhlin The colutron, a zero deflection isotope separator
JPS57126056A (en) Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it
GB1238889A (en)
JPS55121259A (en) Elelctron microscope
GB1354177A (en) X-ray source
GB1246152A (en) Magnetic deflection apparatus
US3122631A (en) Apparatus for focusing a line type ion beam on a mass spectrometer analyzer
GB1194268A (en) Improvements in or relating to Corpuscular Beam Apparatus Magnetic Lens Pole Piece Arrangements.
US3978338A (en) Illumination system in a scanning electron microscope
GB850527A (en) Improvements in and relating to magnetic means for deflecting electron beams
Archard et al. Magnetic deflexion of electron beams without astigmatism
GB832500A (en) Improvements relating to electron optical apparatus
GB848982A (en) Improvements in x-ray microscopes
GB1191191A (en) Improvements in Electron Microscopes
US2849634A (en) Linear electron accelerators
GB962086A (en) Energy-selecting electron microscopes
US3596090A (en) Particle beam apparatus having an imaging lens which is provided with an associated phase-displacing foil
GB918297A (en) Improvements in electron microscopes
GB860557A (en) Improvements in or relating to electron beam discharge apparatus
Rose et al. High Current Positive Hydrogen Ion Source with Mass Analysis
US3312858A (en) Deflecting system for charge carrier beams
GB1159905A (en) X-Ray Generating Apparatus.
GB994451A (en) Corpuscular radiation microscope
GB792020A (en) Improvements in or relating to the magnetic focusing of electron beams
US3188465A (en) Two stage electron beam magnification device comprising plural adjustable magnetic lens system

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee