GB1231103A - - Google Patents

Info

Publication number
GB1231103A
GB1231103A GB1231103DA GB1231103A GB 1231103 A GB1231103 A GB 1231103A GB 1231103D A GB1231103D A GB 1231103DA GB 1231103 A GB1231103 A GB 1231103A
Authority
GB
United Kingdom
Prior art keywords
aluminium
gaseous phase
semi
aluminium silicate
dopant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1231103A publication Critical patent/GB1231103A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • H10P14/6328
    • H10P32/14
    • H10P32/174

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
GB1231103D 1967-04-28 1968-04-25 Expired GB1231103A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6706005A NL6706005A (enExample) 1967-04-28 1967-04-28

Publications (1)

Publication Number Publication Date
GB1231103A true GB1231103A (enExample) 1971-05-12

Family

ID=19799991

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1231103D Expired GB1231103A (enExample) 1967-04-28 1968-04-25

Country Status (6)

Country Link
BE (1) BE714327A (enExample)
CH (1) CH519787A (enExample)
FR (1) FR1561762A (enExample)
GB (1) GB1231103A (enExample)
NL (1) NL6706005A (enExample)
SE (1) SE350148B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130793A (en) * 1982-11-22 1984-06-06 Gen Electric Co Plc Forming a doped region in a semiconductor body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130793A (en) * 1982-11-22 1984-06-06 Gen Electric Co Plc Forming a doped region in a semiconductor body

Also Published As

Publication number Publication date
FR1561762A (enExample) 1969-03-28
CH519787A (de) 1972-02-29
NL6706005A (enExample) 1968-10-29
BE714327A (enExample) 1968-10-28
DE1769177B2 (de) 1977-06-23
DE1769177A1 (de) 1971-10-21
SE350148B (enExample) 1972-10-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee