GB1226946A - - Google Patents

Info

Publication number
GB1226946A
GB1226946A GB1226946DA GB1226946A GB 1226946 A GB1226946 A GB 1226946A GB 1226946D A GB1226946D A GB 1226946DA GB 1226946 A GB1226946 A GB 1226946A
Authority
GB
United Kingdom
Prior art keywords
radio frequency
june
substrate
sputtering
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1226946A publication Critical patent/GB1226946A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/14—Organic dielectrics
    • H01G4/145—Organic dielectrics vapour deposited

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,226,946. R. F. sputtering of polymers. PLESSEY CO. Ltd. June 24, 1968 [June 23, 1967], No. 29059/67. Heading C7F. [Also in Division H1] Organic polymers such as P.T. F.E., polyethylene, polystyrene, polyethylene terephthalate, polymethyl methacrylate, polypropylene oxide are deposited as thin films by radio frequency sputtering. As shown in the Fig. a disc 9 of polymeric material is held in electrode holder 5 which also contains water cooled aluminium electrodes 6 which are connected to a radio frequency source. The substrate 10 is supported on plinth 11 enclosed in vacuum chamber 3. A radio frequency potential of 2,000 volts at 1 megacycle per second is applied at a vacuum of 5 microns Hg. The substrate may be glass or glass coated with Al by vapour deposition. A further vapour deposited coating of Al may be formed on the sputtered polymer to produce capacitors.
GB1226946D 1967-06-23 1967-06-23 Expired GB1226946A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2905967 1967-06-23

Publications (1)

Publication Number Publication Date
GB1226946A true GB1226946A (en) 1971-03-31

Family

ID=10285549

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1226946D Expired GB1226946A (en) 1967-06-23 1967-06-23

Country Status (1)

Country Link
GB (1) GB1226946A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4388164A (en) * 1979-12-06 1983-06-14 Balzers Aktiengesellschaft Method of coating the surface of an elastic body with a continuous layer
EP0140125A2 (en) * 1983-09-30 1985-05-08 Siemens Aktiengesellschaft Method of producing a carbon-containing layer, carbon-containing layer, use of carbon-containing layer and process for the production of a carbon-containing layer
DE3911812A1 (en) * 1989-04-11 1990-10-18 Siemens Ag Fast moisture sensor on a polymer base - having sensitive polymer layer, sputtered cathode dust, cover electrode, resistance cells and electrical current
EP1642653A2 (en) * 2004-09-30 2006-04-05 DePuy Products, Inc. Coated biomedical device and associated method
CN108364787A (en) * 2017-12-29 2018-08-03 安徽铜峰电子股份有限公司 A kind of High-temperature-rescapacitor capacitor film and its capacitor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4388164A (en) * 1979-12-06 1983-06-14 Balzers Aktiengesellschaft Method of coating the surface of an elastic body with a continuous layer
EP0140125A2 (en) * 1983-09-30 1985-05-08 Siemens Aktiengesellschaft Method of producing a carbon-containing layer, carbon-containing layer, use of carbon-containing layer and process for the production of a carbon-containing layer
EP0140125A3 (en) * 1983-09-30 1985-06-19 Siemens Aktiengesellschaft Method of producing a carbon-containing layer, carbon-containing layer, use of carbon-containing layer and process for the production of a carbon-containing layer
DE3911812A1 (en) * 1989-04-11 1990-10-18 Siemens Ag Fast moisture sensor on a polymer base - having sensitive polymer layer, sputtered cathode dust, cover electrode, resistance cells and electrical current
EP1642653A2 (en) * 2004-09-30 2006-04-05 DePuy Products, Inc. Coated biomedical device and associated method
EP1642653A3 (en) * 2004-09-30 2007-04-04 DePuy Products, Inc. Coated biomedical device and associated method
CN108364787A (en) * 2017-12-29 2018-08-03 安徽铜峰电子股份有限公司 A kind of High-temperature-rescapacitor capacitor film and its capacitor

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee