GB1226872A - - Google Patents

Info

Publication number
GB1226872A
GB1226872A GB1226872DA GB1226872A GB 1226872 A GB1226872 A GB 1226872A GB 1226872D A GB1226872D A GB 1226872DA GB 1226872 A GB1226872 A GB 1226872A
Authority
GB
United Kingdom
Prior art keywords
lens
electron
maximum
march
analysing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1226872A publication Critical patent/GB1226872A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
GB1226872D 1967-03-30 1968-03-25 Expired GB1226872A (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1953467 1967-03-30

Publications (1)

Publication Number Publication Date
GB1226872A true GB1226872A (OSRAM) 1971-03-31

Family

ID=12001980

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1226872D Expired GB1226872A (OSRAM) 1967-03-30 1968-03-25

Country Status (5)

Country Link
US (1) US3619607A (OSRAM)
DE (1) DE1639280C3 (OSRAM)
FR (1) FR1558166A (OSRAM)
GB (1) GB1226872A (OSRAM)
NL (1) NL153718B (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (OSRAM) * 1973-01-31 1976-12-02
FR2220871B1 (OSRAM) * 1973-07-27 1978-01-20 Jeol Ltd
US4929838A (en) * 1988-02-16 1990-05-29 Fujitsu Limited Magnetic object lens for an electron beam exposure apparatus which processes a wafer carried on a continuously moving stage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB962086A (en) * 1962-03-27 1964-06-24 Hitachi Ltd Energy-selecting electron microscopes
US3374346A (en) * 1964-07-15 1968-03-19 Hitachi Ltd Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed

Also Published As

Publication number Publication date
NL6804435A (OSRAM) 1968-10-01
NL153718B (nl) 1977-06-15
DE1639280B2 (de) 1973-07-12
US3619607A (en) 1971-11-09
DE1639280A1 (de) 1972-03-16
FR1558166A (OSRAM) 1969-02-21
DE1639280C3 (de) 1974-01-31

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee