GB1225579A - - Google Patents

Info

Publication number
GB1225579A
GB1225579A GB1225579DA GB1225579A GB 1225579 A GB1225579 A GB 1225579A GB 1225579D A GB1225579D A GB 1225579DA GB 1225579 A GB1225579 A GB 1225579A
Authority
GB
United Kingdom
Prior art keywords
lens
specimen
coil
july
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1225579A publication Critical patent/GB1225579A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
GB1225579D 1968-07-17 1969-07-17 Expired GB1225579A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74542768A 1968-07-17 1968-07-17

Publications (1)

Publication Number Publication Date
GB1225579A true GB1225579A (https=) 1971-03-17

Family

ID=24996636

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1225579D Expired GB1225579A (https=) 1968-07-17 1969-07-17

Country Status (4)

Country Link
US (1) US3558878A (https=)
DE (1) DE1935975A1 (https=)
FR (1) FR2013091A1 (https=)
GB (1) GB1225579A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4599869A (en) * 1984-03-12 1986-07-15 Ozin Geoffrey A Cryogenic deposition of catalysts
US6046457A (en) * 1998-01-09 2000-04-04 International Business Machines Corporation Charged particle beam apparatus having anticontamination means
US6188071B1 (en) * 1998-08-11 2001-02-13 Nikon Corporation Feedback method for increasing stability of electron beams
US7408728B2 (en) * 2006-12-04 2008-08-05 Quality Vision International, Inc. System and method for focal length stabilization using active temperature control

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
US3107297A (en) * 1960-08-29 1963-10-15 Applied Res Lab Inc Electron probe X-ray analyzer wherein the emitted X-radiation passes through the objective lens
DE1202915B (de) * 1963-09-09 1965-10-14 Siemens Ag An der Pumpe arbeitender Korpuskularstrahl-apparat, insbesondere Elektronenmikroskop, mit einer den Objekttraeger aufnehmenden und mit einer Tiefkuehlvorrichtung in Verbindung stehenden Objektpatrone

Also Published As

Publication number Publication date
US3558878A (en) 1971-01-26
DE1935975A1 (de) 1970-01-22
FR2013091A1 (https=) 1970-03-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees
PLNP Patent lapsed through nonpayment of renewal fees