GB1221852A - Graphite susceptor - Google Patents

Graphite susceptor

Info

Publication number
GB1221852A
GB1221852A GB06846/68A GB1684668A GB1221852A GB 1221852 A GB1221852 A GB 1221852A GB 06846/68 A GB06846/68 A GB 06846/68A GB 1684668 A GB1684668 A GB 1684668A GB 1221852 A GB1221852 A GB 1221852A
Authority
GB
United Kingdom
Prior art keywords
pressure
hours
surface layer
methane
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB06846/68A
Other languages
English (en)
Inventor
Thomas Joseph Clark
Howard William Brown
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1221852A publication Critical patent/GB1221852A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/521—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained by impregnation of carbon products with a carbonisable material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
GB06846/68A 1967-04-18 1968-04-08 Graphite susceptor Expired GB1221852A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63182067A 1967-04-18 1967-04-18

Publications (1)

Publication Number Publication Date
GB1221852A true GB1221852A (en) 1971-02-10

Family

ID=24532889

Family Applications (1)

Application Number Title Priority Date Filing Date
GB06846/68A Expired GB1221852A (en) 1967-04-18 1968-04-08 Graphite susceptor

Country Status (7)

Country Link
US (1) US3549847A (cs)
BE (1) BE713067A (cs)
DE (1) DE1771169A1 (cs)
FR (1) FR1562474A (cs)
GB (1) GB1221852A (cs)
NL (1) NL6805349A (cs)
SE (1) SE353005B (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2158606A (en) * 1984-05-05 1985-11-13 Philips Nv Sample holder for flameless atomic-absorption and emission spectroscopy
US6177146B1 (en) 1996-06-20 2001-01-23 Dunlop Limited Densification of a porous structure (III)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1932567C3 (de) * 1969-06-27 1975-06-26 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Verfahren zur Herstellung von Brenn- und/oder Brutelementen für Kernreaktoren
US3636923A (en) * 1970-03-04 1972-01-25 Atomic Energy Commission Apparatus for coating microspheres with pyrolytic carbon
US3845738A (en) * 1973-09-12 1974-11-05 Rca Corp Vapor deposition apparatus with pyrolytic graphite heat shield
GB1490347A (en) * 1974-02-08 1977-11-02 Dunlop Ltd Friction members
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4089176A (en) * 1976-01-20 1978-05-16 The Garrett Corporation Heat storage method and apparatus
CA1101164A (en) * 1977-04-30 1981-05-19 Sumitomo Electric Industries, Ltd. Method and apparatus for producing fibers for optical transmission
US4241104A (en) * 1978-10-16 1980-12-23 The Fluorocarbon Company Process for bonding carbon substrates using particles of a thermally stable solid
US4168998A (en) * 1978-12-06 1979-09-25 Mitsubishi Monsanto Chemical Co. Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder
US4251206A (en) * 1979-05-14 1981-02-17 Rca Corporation Apparatus for and method of supporting a crucible for EFG growth of sapphire
DE2949476A1 (de) * 1979-12-08 1981-06-11 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur herstellung von kuevetten fuer die flammenlose atom-absorptions-spektroskopie
US4339645A (en) * 1980-07-03 1982-07-13 Rca Corporation RF Heating coil construction for stack of susceptors
US4442165A (en) * 1981-03-26 1984-04-10 General Electric Co. Low-density thermally insulating carbon-carbon syntactic foam composite
FR2516914B1 (fr) * 1981-11-26 1986-03-14 Commissariat Energie Atomique Procede de densification d'une structure poreuse
US4640223A (en) * 1984-07-24 1987-02-03 Dozier Alfred R Chemical vapor deposition reactor
EP0201696B1 (en) * 1985-03-20 1991-03-13 Sharp Kabushiki Kaisha Production of carbon films
US5273778A (en) * 1985-03-20 1993-12-28 Sharp Kabushiki Kaisha Method for producing graphite intercalation compound
US5238705A (en) * 1987-02-24 1993-08-24 Semiconductor Energy Laboratory Co., Ltd. Carbonaceous protective films and method of depositing the same
US4761308A (en) * 1987-06-22 1988-08-02 General Electric Company Process for the preparation of reflective pyrolytic graphite
DE4020723C2 (de) * 1990-06-29 1999-10-21 Finckh Maschf Schüttelwalze für das Langsieb von Langsieb-Papiermaschinen
US5198263A (en) * 1991-03-15 1993-03-30 The United States Of America As Represented By The United States Department Of Energy High rate chemical vapor deposition of carbon films using fluorinated gases
US5808281A (en) * 1991-04-05 1998-09-15 The Boeing Company Multilayer susceptors for achieving thermal uniformity in induction processing of organic matrix composites or metals
US5728309A (en) * 1991-04-05 1998-03-17 The Boeing Company Method for achieving thermal uniformity in induction processing of organic matrix composites or metals
US5645744A (en) * 1991-04-05 1997-07-08 The Boeing Company Retort for achieving thermal uniformity in induction processing of organic matrix composites or metals
JPH07176482A (ja) * 1991-05-31 1995-07-14 At & T Corp エピタキシャル成長方法および装置
NZ282347A (en) * 1994-03-16 1999-01-28 Larkden Pty Ltd Converting rotational energy of shaft into heat, inducing eddy currents in graphite block
US6086680A (en) * 1995-08-22 2000-07-11 Asm America, Inc. Low-mass susceptor
EP1036406B1 (en) * 1997-11-03 2003-04-02 ASM America, Inc. Improved low mass wafer support system
US6623563B2 (en) 2001-01-02 2003-09-23 Applied Materials, Inc. Susceptor with bi-metal effect
US6554907B2 (en) * 2001-01-02 2003-04-29 Applied Materials, Inc. Susceptor with internal support
US20050170314A1 (en) * 2002-11-27 2005-08-04 Richard Golden Dental pliers design with offsetting jaw and pad elements for assisting in removing upper and lower teeth and method for removing teeth utilizing the dental plier design
US7285483B2 (en) * 2003-06-26 2007-10-23 Silitronic Ag Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer
DE102004060625A1 (de) * 2004-12-16 2006-06-29 Siltronic Ag Beschichtete Halbleiterscheibe und Verfahren und Vorrichtung zur Herstellung der Halbleiterscheibe
US7235139B2 (en) * 2003-10-28 2007-06-26 Veeco Instruments Inc. Wafer carrier for growing GaN wafers
JP4350695B2 (ja) * 2004-12-01 2009-10-21 株式会社フューチャービジョン 処理装置
JP5051875B2 (ja) * 2006-12-25 2012-10-17 東京エレクトロン株式会社 成膜装置および成膜方法
US7921803B2 (en) * 2007-09-21 2011-04-12 Applied Materials, Inc. Chamber components with increased pyrometry visibility
US8801857B2 (en) 2008-10-31 2014-08-12 Asm America, Inc. Self-centering susceptor ring assembly
RU2398738C1 (ru) * 2009-02-26 2010-09-10 Институт новых углеродных материалов и технологий (Закрытое акционерное общество) (ИНУМиТ (ЗАО)) Высокотемпературный углеграфитовый теплоизоляционный материал и способ его получения
CA2880824C (en) * 2012-07-02 2019-08-13 Zimmer, Inc. Thin film tantalum coating for medical implants
TWI664918B (zh) * 2014-05-21 2019-07-11 瑞士商菲利浦莫里斯製品股份有限公司 可感應加熱的菸草產品
US10407769B2 (en) 2016-03-18 2019-09-10 Goodrich Corporation Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces
USD920936S1 (en) 2019-01-17 2021-06-01 Asm Ip Holding B.V. Higher temperature vented susceptor
TWI839443B (zh) 2019-01-17 2024-04-21 荷蘭商 Ａｓｍ Ｉｐ 私人控股有限公司 通風基座
USD914620S1 (en) 2019-01-17 2021-03-30 Asm Ip Holding B.V. Vented susceptor
TWI845682B (zh) 2019-05-22 2024-06-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 工件基座主體
US11764101B2 (en) 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing
TW202534849A (zh) 2020-06-23 2025-09-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 基座及反應腔室
USD1031676S1 (en) 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2158606A (en) * 1984-05-05 1985-11-13 Philips Nv Sample holder for flameless atomic-absorption and emission spectroscopy
US6177146B1 (en) 1996-06-20 2001-01-23 Dunlop Limited Densification of a porous structure (III)
US6180223B1 (en) 1996-06-20 2001-01-30 Dunlop Limited Densification of a porous structure
US6346304B1 (en) 1996-06-20 2002-02-12 Dunlop Limited Densification of a porous structure (II)

Also Published As

Publication number Publication date
DE1771169A1 (de) 1972-02-17
SE353005B (cs) 1973-01-15
FR1562474A (cs) 1969-04-04
NL6805349A (cs) 1968-10-21
BE713067A (cs) 1968-08-16
US3549847A (en) 1970-12-22

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