GB1221107A - Improvements in titanium vaporizers for use in vacuum getter pumps - Google Patents

Improvements in titanium vaporizers for use in vacuum getter pumps

Info

Publication number
GB1221107A
GB1221107A GB08244/68A GB1824468A GB1221107A GB 1221107 A GB1221107 A GB 1221107A GB 08244/68 A GB08244/68 A GB 08244/68A GB 1824468 A GB1824468 A GB 1824468A GB 1221107 A GB1221107 A GB 1221107A
Authority
GB
United Kingdom
Prior art keywords
chemically pure
pumps
vaporizer
april
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08244/68A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1221107A publication Critical patent/GB1221107A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
    • C23C16/14—Deposition of only one other metal element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12333—Helical or with helical component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12806—Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12812—Diverse refractory group metal-base components: alternative to or next to each other

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

1,221,107. Gettering; ion pumps. THOMSON-CSF. 17 April, 1968 [21 April, 1967], No. 18244/68. Heading HID. A vaporizer for getter pumps is made by providing a layer of chemically pure Ti 13 on a support 11 of a metal having a melting point higher than Ti, e.g. W, Mo or Ta. A wire 12 of Mo or W is wound on a W heating wire 11 and a layer 13 of chemically pure Ti is deposited thereon by pyrolisis of titanium iodide. Since the Ti is chemically pure it will not evolve gas in operation as compared with lower grade Ti which may contain argon or hydrocarbons introduced during furnacing or wire drawing operations. The vaporizer is mounted axially in a tubular envelope cooled by circulation of liquid nitrogen in a cooling spiral to form a getter pump incorporated in a system (Fig. 2, not shown) which also includes a primary suction pump and an ion pump.
GB08244/68A 1967-04-21 1968-04-17 Improvements in titanium vaporizers for use in vacuum getter pumps Expired GB1221107A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR103754A FR1527220A (en) 1967-04-21 1967-04-21 Improvements to titanium sublimation filaments for application in vacuum techniques

Publications (1)

Publication Number Publication Date
GB1221107A true GB1221107A (en) 1971-02-03

Family

ID=8629423

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08244/68A Expired GB1221107A (en) 1967-04-21 1968-04-17 Improvements in titanium vaporizers for use in vacuum getter pumps

Country Status (5)

Country Link
US (1) US3724049A (en)
DE (1) DE1764197A1 (en)
FR (1) FR1527220A (en)
GB (1) GB1221107A (en)
NL (1) NL6805607A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2125615A (en) * 1982-08-05 1984-03-07 Emi Plc Thorn H.P. discharge lamps
EP0436477A2 (en) * 1990-01-05 1991-07-10 SAES GETTERS S.p.A. Gettering device and system for a cathode ray tube

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4925741A (en) * 1989-06-08 1990-05-15 Composite Materials Technology, Inc. Getter wire

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2491284A (en) * 1946-12-13 1949-12-13 Bell Telephone Labor Inc Electrode for electron discharge devices and method of making the same
US2847331A (en) * 1954-12-24 1958-08-12 Robert W Ashley Hydrogen isotope targets
US2975075A (en) * 1956-02-17 1961-03-14 Norman C Beese Method of evaporating metals
US3071491A (en) * 1960-10-05 1963-01-01 Charles W Horn Titanium coating process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2125615A (en) * 1982-08-05 1984-03-07 Emi Plc Thorn H.P. discharge lamps
EP0436477A2 (en) * 1990-01-05 1991-07-10 SAES GETTERS S.p.A. Gettering device and system for a cathode ray tube
EP0436477A3 (en) * 1990-01-05 1991-12-18 Saes Getters S.P.A. Gettering device and system for a cathode ray tube

Also Published As

Publication number Publication date
NL6805607A (en) 1968-10-22
US3724049A (en) 1973-04-03
FR1527220A (en) 1968-05-31
DE1764197A1 (en) 1971-06-03

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