GB1195271A - Electron Beam Apparatus - Google Patents

Electron Beam Apparatus

Info

Publication number
GB1195271A
GB1195271A GB7463/67A GB746367A GB1195271A GB 1195271 A GB1195271 A GB 1195271A GB 7463/67 A GB7463/67 A GB 7463/67A GB 746367 A GB746367 A GB 746367A GB 1195271 A GB1195271 A GB 1195271A
Authority
GB
United Kingdom
Prior art keywords
specimen
dependent
electron beam
detectors
cos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7463/67A
Other languages
English (en)
Inventor
Alistar John Campbell
Andrew David Garry Stewart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Instruments Ltd
Original Assignee
Cambridge Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Instruments Ltd filed Critical Cambridge Instruments Ltd
Priority to GB7463/67A priority Critical patent/GB1195271A/en
Priority to DE1968C0044644 priority patent/DE1673847B2/de
Priority to US706001A priority patent/US3597607A/en
Priority to FR1568135D priority patent/FR1568135A/fr
Publication of GB1195271A publication Critical patent/GB1195271A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB7463/67A 1967-02-16 1967-02-16 Electron Beam Apparatus Expired GB1195271A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB7463/67A GB1195271A (en) 1967-02-16 1967-02-16 Electron Beam Apparatus
DE1968C0044644 DE1673847B2 (de) 1967-02-16 1968-02-16 Elektronenstrahlmikrosonde
US706001A US3597607A (en) 1967-02-16 1968-02-16 Electron probe employing three secondary emission detectors whose outputs are combined to minimize error
FR1568135D FR1568135A (enrdf_load_stackoverflow) 1967-02-16 1968-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB7463/67A GB1195271A (en) 1967-02-16 1967-02-16 Electron Beam Apparatus

Publications (1)

Publication Number Publication Date
GB1195271A true GB1195271A (en) 1970-06-17

Family

ID=9833576

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7463/67A Expired GB1195271A (en) 1967-02-16 1967-02-16 Electron Beam Apparatus

Country Status (4)

Country Link
US (1) US3597607A (enrdf_load_stackoverflow)
DE (1) DE1673847B2 (enrdf_load_stackoverflow)
FR (1) FR1568135A (enrdf_load_stackoverflow)
GB (1) GB1195271A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285169A (en) * 1993-12-21 1995-06-28 Secretary Trade Ind Brit Scanning electron microscope grain imaging

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876879A (en) * 1973-11-09 1975-04-08 Calspan Corp Method and apparatus for determining surface characteristics incorporating a scanning electron microscope
JPS5481075A (en) * 1977-11-24 1979-06-28 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting article image using electron beam
JPS56114269A (en) 1980-02-15 1981-09-08 Internatl Precision Inc Scanning type electronic microscope
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4733074A (en) * 1985-04-17 1988-03-22 Hitachi, Ltd. Sample surface structure measuring method
JPS62190405A (ja) * 1986-02-17 1987-08-20 Hitachi Ltd 電子ビ−ム測長装置
US4912313A (en) * 1987-11-27 1990-03-27 Hitachi Ltd. Method of measuring surface topography by using scanning electron microscope, and apparatus therefor
RU2206080C1 (ru) * 2001-11-08 2003-06-10 Открытое акционерное общество "Научно-технический центр "РАТЭК" Способ обнаружения взрывчатого вещества в контролируемом предмете
JP4597207B2 (ja) * 2008-03-31 2010-12-15 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
DE102009050521B4 (de) * 2009-10-23 2023-02-16 Pro-Beam Ag & Co. Kgaa Thermisches Materialbearbeitungsverfahren
JP5530959B2 (ja) * 2011-02-28 2014-06-25 株式会社アドバンテスト パターン高さ測定装置及びパターン高さ測定方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3204095A (en) * 1960-12-21 1965-08-31 Hitachi Ltd Electron probe microanalyzer with means to eliminate the effect of surface irregularities
GB1046443A (en) * 1962-04-24 1966-10-26 Ti Group Services Ltd A method of and apparatus for assessing the quantity of inclusions of foreign material in solid specimens
US3329813A (en) * 1964-08-25 1967-07-04 Jeol Ltd Backscatter electron analysis apparatus to determine elemental content or surface topography of a specimen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285169A (en) * 1993-12-21 1995-06-28 Secretary Trade Ind Brit Scanning electron microscope grain imaging

Also Published As

Publication number Publication date
US3597607A (en) 1971-08-03
DE1673847A1 (de) 1971-12-30
DE1673847B2 (de) 1976-08-12
FR1568135A (enrdf_load_stackoverflow) 1969-05-23

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLE Entries relating assignments, transmissions, licences in the register of patents
PCNP Patent ceased through non-payment of renewal fee