GB1194021A - Improvements in or relating to Corpuscular Beam Apparatus - Google Patents
Improvements in or relating to Corpuscular Beam ApparatusInfo
- Publication number
- GB1194021A GB1194021A GB21907/67A GB2190767A GB1194021A GB 1194021 A GB1194021 A GB 1194021A GB 21907/67 A GB21907/67 A GB 21907/67A GB 2190767 A GB2190767 A GB 2190767A GB 1194021 A GB1194021 A GB 1194021A
- Authority
- GB
- United Kingdom
- Prior art keywords
- contrast
- image
- excitation
- lens
- reproduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/263—Contrast, resolution or power of penetration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
Abstract
1,194,021. Electron microscopes. K. J. HANSSEN. 11 May, 1967 [13 May, 1966], No. 21907/67. Heading H1D. An electron microscope which includes an aberration-producing objective lens is used to produce high-contrast reproductions of phasecharacter or amplitude-character objects by first making a photographic recording of a first image obtained at a first value of excitation of the lens and with a first zone plate introduced into the beam path which allows, at that excitation value, only those spatial frequencies reproduced with positive (or negative) contrast to reach the image plane, and subsequently removing the first zone plate and making a second photographic recording at a second lens excitation value and using a second zone plate which similarly allows, at the second excitation value, only those spatial frequencies reproduced with positive (or negative) contrast to reach the image plane. The second excitation value is so selected that the associated lens aberration ensures that spatial frequencies are reproduced which were suppressed by the first zone plate, the final high-contrast image being obtained by the superposition of the two recordings e.g. by recording both images on the same film. By the use in succession of a sufficient number of different zone plates and corresponding lens excitation values, and the superimposition of the resulting images, all the positive (or negative) contrast spatial frequencies missing from the first image may be reproduced in the final image.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEH0059395 | 1966-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1194021A true GB1194021A (en) | 1970-06-10 |
Family
ID=7160529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB21907/67A Expired GB1194021A (en) | 1966-05-13 | 1967-05-11 | Improvements in or relating to Corpuscular Beam Apparatus |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3500043A (en) |
| DE (1) | DE1564075B1 (en) |
| GB (1) | GB1194021A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3996468A (en) * | 1972-01-28 | 1976-12-07 | Nasa | Electron microscope aperture system |
| JP2563134B2 (en) * | 1989-01-25 | 1996-12-11 | 日本電子株式会社 | Scanning transmission type phase contrast electron microscope |
| US5814815A (en) * | 1995-12-27 | 1998-09-29 | Hitachi, Ltd. | Phase-contrast electron microscope and phase plate therefor |
| JP3942363B2 (en) * | 2001-02-09 | 2007-07-11 | 日本電子株式会社 | Lens system for phase plate of transmission electron microscope and transmission electron microscope |
| EP1752992A1 (en) * | 2005-08-12 | 2007-02-14 | Siemens Aktiengesellschaft | Apparatus for the adaption of a particle beam parameter of a particle beam in a particle beam accelerator and particle beam accelerator with such an apparatus |
| DE102011011751B4 (en) * | 2011-02-18 | 2015-12-17 | Stiftung Caesar Center Of Advanced European Studies And Research | Holding arrangement for holding phase contrast units in a phase-contrast electron microscope and phase-contrast electron microscope |
| DE102017220398B3 (en) * | 2017-11-15 | 2019-02-28 | Carl Zeiss Microscopy Gmbh | Method for adjusting a particle beam microscope |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL280940A (en) * | 1961-07-15 |
-
1966
- 1966-05-13 DE DE19661564075 patent/DE1564075B1/en not_active Withdrawn
-
1967
- 1967-05-10 US US637425A patent/US3500043A/en not_active Expired - Lifetime
- 1967-05-11 GB GB21907/67A patent/GB1194021A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1564075B1 (en) | 1970-04-30 |
| US3500043A (en) | 1970-03-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLE | Entries relating assignments, transmissions, licences in the register of patents | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |