GB1181698A - Method and Apparatus for Feeding Particulate Material to a Rotating Vacuum Vaporization Crucible - Google Patents
Method and Apparatus for Feeding Particulate Material to a Rotating Vacuum Vaporization CrucibleInfo
- Publication number
- GB1181698A GB1181698A GB47166/67A GB4716667A GB1181698A GB 1181698 A GB1181698 A GB 1181698A GB 47166/67 A GB47166/67 A GB 47166/67A GB 4716667 A GB4716667 A GB 4716667A GB 1181698 A GB1181698 A GB 1181698A
- Authority
- GB
- United Kingdom
- Prior art keywords
- opening
- crucible
- shield
- particulate material
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000011236 particulate material Substances 0.000 title abstract 2
- 230000008016 vaporization Effects 0.000 title 1
- 238000009834 vaporization Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 7
- 239000000463 material Substances 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59065666A | 1966-10-31 | 1966-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1181698A true GB1181698A (en) | 1970-02-18 |
Family
ID=24363121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB47166/67A Expired GB1181698A (en) | 1966-10-31 | 1967-10-17 | Method and Apparatus for Feeding Particulate Material to a Rotating Vacuum Vaporization Crucible |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3504094A (https=) |
| AT (1) | AT280727B (https=) |
| BE (1) | BE705665A (https=) |
| CH (1) | CH516004A (https=) |
| DE (1) | DE1621205A1 (https=) |
| ES (1) | ES346591A1 (https=) |
| FR (1) | FR1541498A (https=) |
| GB (1) | GB1181698A (https=) |
| LU (1) | LU54738A1 (https=) |
| NL (1) | NL6714814A (https=) |
| NO (1) | NO119340B (https=) |
| SE (1) | SE334519B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722696B2 (ja) * | 1989-07-29 | 1995-03-15 | 新日本製鐵株式會社 | 微粉末の製造方法と装置ならびにその利用方法 |
| CN109594046B (zh) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | 一种镀膜用蒸发装置 |
| CN117885181B (zh) * | 2024-03-14 | 2024-05-31 | 施密特钢轨技术（昆山）有限公司 | 一种坩埚射砂导流组件 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1193783A (en) * | 1916-08-08 | Iiousk | ||
| DE1175224B (de) * | 1959-04-17 | 1964-08-06 | Knapsack Ag | Vorrichtung zur Erzeugung von Acetylen und AEthylen durch thermische Spaltung von Kohlen-wasserstoffen mittels eines im elektrischen Licht-bogen erhitzten gasfoermigen Waermetraegers |
-
1966
- 1966-10-31 US US590656A patent/US3504094A/en not_active Expired - Lifetime
-
1967
- 1967-10-17 DE DE19671621205 patent/DE1621205A1/de active Pending
- 1967-10-17 GB GB47166/67A patent/GB1181698A/en not_active Expired
- 1967-10-20 FR FR125206A patent/FR1541498A/fr not_active Expired
- 1967-10-25 LU LU54738D patent/LU54738A1/xx unknown
- 1967-10-26 BE BE705665D patent/BE705665A/xx unknown
- 1967-10-30 ES ES346591A patent/ES346591A1/es not_active Expired
- 1967-10-30 NO NO170317A patent/NO119340B/no unknown
- 1967-10-30 SE SE14822/67A patent/SE334519B/xx unknown
- 1967-10-31 NL NL6714814A patent/NL6714814A/xx unknown
- 1967-10-31 CH CH1522667A patent/CH516004A/de not_active IP Right Cessation
- 1967-10-31 AT AT985767A patent/AT280727B/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| FR1541498A (fr) | 1968-10-04 |
| NL6714814A (https=) | 1968-05-01 |
| NO119340B (https=) | 1970-05-04 |
| BE705665A (https=) | 1968-03-01 |
| LU54738A1 (https=) | 1968-01-26 |
| ES346591A1 (es) | 1969-01-01 |
| US3504094A (en) | 1970-03-31 |
| DE1621205A1 (de) | 1971-06-03 |
| AT280727B (de) | 1970-04-27 |
| SE334519B (https=) | 1971-04-26 |
| CH516004A (de) | 1971-11-30 |
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