GB1157903A - Thin Film Capacitors - Google Patents
Thin Film CapacitorsInfo
- Publication number
- GB1157903A GB1157903A GB3658066A GB3658066A GB1157903A GB 1157903 A GB1157903 A GB 1157903A GB 3658066 A GB3658066 A GB 3658066A GB 3658066 A GB3658066 A GB 3658066A GB 1157903 A GB1157903 A GB 1157903A
- Authority
- GB
- United Kingdom
- Prior art keywords
- tantalum
- electrode
- beta
- thin film
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 title abstract 3
- 239000010409 thin film Substances 0.000 title abstract 3
- 229910052715 tantalum Inorganic materials 0.000 abstract 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 6
- 230000001590 oxidative effect Effects 0.000 abstract 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 2
- 229910001936 tantalum oxide Inorganic materials 0.000 abstract 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical class O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000009835 boiling Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/10—Metal-oxide dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Inorganic Insulating Materials (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48038365A | 1965-08-17 | 1965-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1157903A true GB1157903A (en) | 1969-07-09 |
Family
ID=23907747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3658066A Expired GB1157903A (en) | 1965-08-17 | 1966-08-16 | Thin Film Capacitors |
Country Status (10)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE791139A (fr) * | 1972-01-14 | 1973-03-01 | Western Electric Co | Procede pour le depot de beta-tantale dope par l'azote |
| DE2513858C3 (de) * | 1975-03-27 | 1981-08-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Herstellung eines Tantal-Dünnschichtkondensators |
-
1966
- 1966-07-04 IL IL2608666A patent/IL26086A/xx unknown
- 1966-08-02 DE DE19661589060 patent/DE1589060A1/de active Pending
- 1966-08-03 ES ES0330267A patent/ES330267A1/es not_active Expired
- 1966-08-04 SE SE1061066A patent/SE327011B/xx unknown
- 1966-08-09 JP JP5195766A patent/JPS497434B1/ja active Pending
- 1966-08-10 AT AT766666A patent/AT266276B/de active
- 1966-08-11 BE BE685408D patent/BE685408A/xx unknown
- 1966-08-12 CH CH1164366A patent/CH455942A/de unknown
- 1966-08-16 GB GB3658066A patent/GB1157903A/en not_active Expired
- 1966-08-17 NL NL6611578A patent/NL153012B/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| ES330267A1 (es) | 1967-06-16 |
| BE685408A (US06826419-20041130-M00005.png) | 1967-01-16 |
| NL6611578A (US06826419-20041130-M00005.png) | 1967-02-20 |
| DE1589060A1 (de) | 1970-01-02 |
| NL153012B (nl) | 1977-04-15 |
| AT266276B (de) | 1968-11-11 |
| SE327011B (US06826419-20041130-M00005.png) | 1970-08-10 |
| CH455942A (de) | 1968-05-15 |
| IL26086A (en) | 1970-07-19 |
| JPS497434B1 (US06826419-20041130-M00005.png) | 1974-02-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 49R | Reference inserted (sect. 9/1949) | ||
| PS | Patent sealed | ||
| PE | Patent expired |