GB1087136A - Improvements in or relating to the manufacture of capacitors - Google Patents
Improvements in or relating to the manufacture of capacitorsInfo
- Publication number
- GB1087136A GB1087136A GB3109863A GB3109863A GB1087136A GB 1087136 A GB1087136 A GB 1087136A GB 3109863 A GB3109863 A GB 3109863A GB 3109863 A GB3109863 A GB 3109863A GB 1087136 A GB1087136 A GB 1087136A
- Authority
- GB
- United Kingdom
- Prior art keywords
- depositing
- capacitors
- tantalum
- layer
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003990 capacitor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000151 deposition Methods 0.000 abstract 3
- 229910052715 tantalum Inorganic materials 0.000 abstract 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- -1 lanthanium Chemical compound 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 229910052726 zirconium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/10—Metal-oxide dielectrics
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
1,087,136. Capacitors. MARCONI CO. Ltd. April 29, 1964 [Aug. 7, 1963], No. 31098/63. Heading H1M. A capacitor is constructed by vacuum chamber depositing a thin film electrode of gold on an insulating substrate, depositing thereon a layer of tantalum to the thickness of the required dielectric, heat oxidizing in the presence of a small quantity of oxygen to convert the tantalum layer to oxide, and depositing thereon a further gold film electrode without removal from the chamber. The electrode layers may be copper, and the tantalum layer may be replaced by niobium, zirconium, lanthanium, titanium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3109863A GB1087136A (en) | 1963-08-07 | 1963-08-07 | Improvements in or relating to the manufacture of capacitors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3109863A GB1087136A (en) | 1963-08-07 | 1963-08-07 | Improvements in or relating to the manufacture of capacitors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1087136A true GB1087136A (en) | 1967-10-11 |
Family
ID=10317947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3109863A Expired GB1087136A (en) | 1963-08-07 | 1963-08-07 | Improvements in or relating to the manufacture of capacitors |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1087136A (en) |
-
1963
- 1963-08-07 GB GB3109863A patent/GB1087136A/en not_active Expired
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