GB1153787A - Method and apparatus for Glow Cleaning - Google Patents
Method and apparatus for Glow CleaningInfo
- Publication number
- GB1153787A GB1153787A GB3860066A GB3860066A GB1153787A GB 1153787 A GB1153787 A GB 1153787A GB 3860066 A GB3860066 A GB 3860066A GB 3860066 A GB3860066 A GB 3860066A GB 1153787 A GB1153787 A GB 1153787A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- enclosure
- gas
- conductive
- reactive gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000007789 gas Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 239000003638 chemical reducing agent Substances 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 230000005686 electrostatic field Effects 0.000 abstract 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 abstract 1
- 150000004820 halides Chemical class 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48441765A | 1965-09-01 | 1965-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1153787A true GB1153787A (en) | 1969-05-29 |
Family
ID=23924090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3860066A Expired GB1153787A (en) | 1965-09-01 | 1966-08-30 | Method and apparatus for Glow Cleaning |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE686205A (enrdf_load_stackoverflow) |
| DE (1) | DE1542589A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1153787A (enrdf_load_stackoverflow) |
| SE (1) | SE320250B (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2144669A (en) * | 1982-12-07 | 1985-03-13 | Standard Telephones Cables Ltd | Cleaning electrical contacts |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| EP0341835A1 (en) * | 1988-04-13 | 1989-11-15 | Electro-Plasma, Inc. | Method of oxide removal from metallic powder |
| FR2774400A1 (fr) * | 1998-02-04 | 1999-08-06 | Physiques Et Chimiques | Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux |
| CN118116786A (zh) * | 2024-01-17 | 2024-05-31 | 成都诺为光科科技有限公司 | 一种用于高线性光电倍增管降低暗电流的处理设备及方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19907911C2 (de) * | 1999-02-24 | 2003-02-27 | Mag Maschinen Und Appbau Ag Gr | Vorrichtung und Verfahren zur Behandlung von elektrisch leitfähigem Endlosmaterial |
| DE102005025101B3 (de) * | 2005-05-27 | 2006-07-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Reinigung von Innenräumen in Vakuumkammern |
-
1966
- 1966-08-30 SE SE1164166A patent/SE320250B/xx unknown
- 1966-08-30 GB GB3860066A patent/GB1153787A/en not_active Expired
- 1966-08-31 BE BE686205D patent/BE686205A/xx unknown
- 1966-08-31 DE DE19661542589 patent/DE1542589A1/de active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2144669A (en) * | 1982-12-07 | 1985-03-13 | Standard Telephones Cables Ltd | Cleaning electrical contacts |
| US4749589A (en) * | 1984-12-13 | 1988-06-07 | Stc Plc | Method of surface treatment |
| EP0341835A1 (en) * | 1988-04-13 | 1989-11-15 | Electro-Plasma, Inc. | Method of oxide removal from metallic powder |
| FR2774400A1 (fr) * | 1998-02-04 | 1999-08-06 | Physiques Et Chimiques | Dispositif electrique pour degraissage, decapage ou passivation plasmachimique de metaux |
| CN118116786A (zh) * | 2024-01-17 | 2024-05-31 | 成都诺为光科科技有限公司 | 一种用于高线性光电倍增管降低暗电流的处理设备及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| SE320250B (enrdf_load_stackoverflow) | 1970-02-02 |
| DE1542589A1 (de) | 1970-06-18 |
| BE686205A (enrdf_load_stackoverflow) | 1967-02-28 |
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