GB1146754A - Electron beam evaporated quartz insulating material - Google Patents
Electron beam evaporated quartz insulating materialInfo
- Publication number
- GB1146754A GB1146754A GB43640/66A GB4364066A GB1146754A GB 1146754 A GB1146754 A GB 1146754A GB 43640/66 A GB43640/66 A GB 43640/66A GB 4364066 A GB4364066 A GB 4364066A GB 1146754 A GB1146754 A GB 1146754A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron beam
- beam evaporated
- insulating material
- evaporated quartz
- quartz insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
- 239000010453 quartz Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 3
- 239000011810 insulating material Substances 0.000 title 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Ceramic Engineering (AREA)
- Hall/Mr Elements (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US49233965A | 1965-10-01 | 1965-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1146754A true GB1146754A (en) | 1969-03-26 |
Family
ID=23955878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB43640/66A Expired GB1146754A (en) | 1965-10-01 | 1966-09-29 | Electron beam evaporated quartz insulating material |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | USB492339I5 (enrdf_load_html_response) |
| CH (1) | CH464303A (enrdf_load_html_response) |
| DE (1) | DE1590750B1 (enrdf_load_html_response) |
| GB (1) | GB1146754A (enrdf_load_html_response) |
| NL (1) | NL6613837A (enrdf_load_html_response) |
| SE (1) | SE332665B (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2196476A (en) * | 1986-10-14 | 1988-04-27 | Emi Plc Thorn | A method for manufacturing a component and a component produced by the method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB315354A (en) * | 1928-07-12 | 1930-09-18 | Telefunken Gmbh | Improvements in or relating to electric insulating material |
| DE596124C (de) * | 1930-01-16 | 1934-04-27 | Telefunken Gmbh | Elektrischer Apparat, bei welchem die sich erhitzenden Teile in ein hauptsaechlich aus Quarz bestehendes Isoliermaterial eingebettet sind |
| GB393562A (en) * | 1930-09-01 | 1933-06-08 | Gen Electric | Improvements in and relating to methods of fusing high dielectrics |
| NL273920A (enrdf_load_html_response) * | 1961-01-25 |
-
0
- US US492339D patent/USB492339I5/en active Pending
-
1966
- 1966-09-28 DE DE19661590750 patent/DE1590750B1/de active Pending
- 1966-09-29 GB GB43640/66A patent/GB1146754A/en not_active Expired
- 1966-09-30 CH CH1414066A patent/CH464303A/de unknown
- 1966-09-30 SE SE13237/66A patent/SE332665B/xx unknown
- 1966-09-30 NL NL6613837A patent/NL6613837A/xx unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2196476A (en) * | 1986-10-14 | 1988-04-27 | Emi Plc Thorn | A method for manufacturing a component and a component produced by the method |
| GB2196476B (en) * | 1986-10-14 | 1990-02-14 | Emi Plc Thorn | A method for manufacturing a component and a component produced by the method |
Also Published As
| Publication number | Publication date |
|---|---|
| CH464303A (de) | 1968-10-31 |
| USB492339I5 (enrdf_load_html_response) | |
| DE1590750B1 (de) | 1971-04-22 |
| NL6613837A (enrdf_load_html_response) | 1967-04-03 |
| SE332665B (enrdf_load_html_response) | 1971-02-15 |
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