GB1141840A - Apparatus for coating filaments - Google Patents

Apparatus for coating filaments

Info

Publication number
GB1141840A
GB1141840A GB4653166A GB4653166A GB1141840A GB 1141840 A GB1141840 A GB 1141840A GB 4653166 A GB4653166 A GB 4653166A GB 4653166 A GB4653166 A GB 4653166A GB 1141840 A GB1141840 A GB 1141840A
Authority
GB
United Kingdom
Prior art keywords
filament
chamber
gas
coating
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4653166A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of GB1141840A publication Critical patent/GB1141840A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)

Abstract

1,141,840. Filament coating apparatus. DOW CORNING CORP. 18 Oct., 1966 [24 Jan., 1966], No. 46531/66. Heading D1L. [Also in Division C7] Apparatus for coating a moving filament comprises a reaction chamber 14, means for feeding a filament 11 into and out of the chamber, a tubular electrode 19 within the chamber 14 and surrounding the filament, means applying an electrical potential difference between the filament and the electrode, an inlet 28 into the chamber 14 for a reactant feed gas, and means maintaining a pressure differential between the interior of the chamber and the ambient atmosphere. The tubular electrode 19 may be solid or of open mesh material, and is preferably copper. The reaction chamber 14 may be formed in two parts 15, 16 with a seal 17 between them. The passage of the filament into and out of the chamber 14 is by way of conduits, each of which is provided with a pair of spaced-sealing rings 23, 24 and 25, 26 respectively. A flush gas is introduced into the space between the inlet seals 23, 24 and drawn out of chamber 14 with the reactant gas, an inert gas such as argon being used as the flush gas. A reduced pressure is also maintained between the outlet seals 25, 26. The electrical connection to the filament is preferebly by way of a slip ring and brush combination at the take-up reel 13. The apparatus uses the principle of glow discharge and may be used to coat an aluminium, tungsten or carbon filament with silicon carbide or boron, the reactant feed gases being dimethyl-dichloro-silane and diborane or boron trichloride respectively.
GB4653166A 1966-01-24 1966-10-18 Apparatus for coating filaments Expired GB1141840A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52256866A 1966-01-24 1966-01-24

Publications (1)

Publication Number Publication Date
GB1141840A true GB1141840A (en) 1969-02-05

Family

ID=24081388

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4653166A Expired GB1141840A (en) 1966-01-24 1966-10-18 Apparatus for coating filaments

Country Status (4)

Country Link
BE (1) BE693025A (en)
FR (1) FR1508796A (en)
GB (1) GB1141840A (en)
NL (1) NL6701011A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2122224A (en) * 1982-06-23 1984-01-11 Atomic Energy Authority Uk Ion beam carbon layers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2122224A (en) * 1982-06-23 1984-01-11 Atomic Energy Authority Uk Ion beam carbon layers

Also Published As

Publication number Publication date
NL6701011A (en) 1967-07-25
BE693025A (en) 1967-07-24
FR1508796A (en) 1968-01-05

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