GB1139497A - A process for separating chlorosilanes from gaseous reaction products - Google Patents
A process for separating chlorosilanes from gaseous reaction productsInfo
- Publication number
- GB1139497A GB1139497A GB54898/67A GB5489867A GB1139497A GB 1139497 A GB1139497 A GB 1139497A GB 54898/67 A GB54898/67 A GB 54898/67A GB 5489867 A GB5489867 A GB 5489867A GB 1139497 A GB1139497 A GB 1139497A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chlorosilanes
- chlorosilane
- solvent
- dec
- boiling point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000005046 Chlorosilane Substances 0.000 title abstract 11
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title abstract 11
- 238000000034 method Methods 0.000 title abstract 2
- 239000007795 chemical reaction product Substances 0.000 title 1
- 239000002904 solvent Substances 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 2
- 238000009835 boiling Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 abstract 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 239000005662 Paraffin oil Substances 0.000 abstract 1
- 229910003902 SiCl 4 Inorganic materials 0.000 abstract 1
- YSMRWXYRXBRSND-UHFFFAOYSA-N TOTP Chemical compound CC1=CC=CC=C1OP(=O)(OC=1C(=CC=CC=1)C)OC1=CC=CC=C1C YSMRWXYRXBRSND-UHFFFAOYSA-N 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000001569 carbon dioxide Substances 0.000 abstract 1
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 1
- 229910002091 carbon monoxide Inorganic materials 0.000 abstract 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000011541 reaction mixture Substances 0.000 abstract 1
- 239000005049 silicon tetrachloride Substances 0.000 abstract 1
- OZLXDDRBXFHZNO-UHFFFAOYSA-N tetraoctyl silicate Chemical compound CCCCCCCCO[Si](OCCCCCCCC)(OCCCCCCCC)OCCCCCCCC OZLXDDRBXFHZNO-UHFFFAOYSA-N 0.000 abstract 1
- PPDADIYYMSXQJK-UHFFFAOYSA-N trichlorosilicon Chemical compound Cl[Si](Cl)Cl PPDADIYYMSXQJK-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DED0051691 | 1966-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1139497A true GB1139497A (en) | 1969-01-08 |
Family
ID=7053578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB54898/67A Expired GB1139497A (en) | 1966-12-02 | 1967-12-01 | A process for separating chlorosilanes from gaseous reaction products |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3500613A (cg-RX-API-DMAC7.html) |
| DE (1) | DE1567468C3 (cg-RX-API-DMAC7.html) |
| GB (1) | GB1139497A (cg-RX-API-DMAC7.html) |
| NO (1) | NO121268B (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3139705C2 (de) * | 1981-10-06 | 1983-11-10 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur Aufarbeitung der bei der Siliciumabscheidung und der Siliciumtetrachlorid-Konvertierung anfallenden Restgase |
-
1966
- 1966-12-02 DE DE1567468A patent/DE1567468C3/de not_active Expired
-
1967
- 1967-12-01 US US687095A patent/US3500613A/en not_active Expired - Lifetime
- 1967-12-01 NO NO170787A patent/NO121268B/no unknown
- 1967-12-01 GB GB54898/67A patent/GB1139497A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3500613A (en) | 1970-03-17 |
| DE1567468C3 (de) | 1973-11-22 |
| DE1567468B2 (de) | 1973-04-26 |
| NO121268B (cg-RX-API-DMAC7.html) | 1971-02-08 |
| DE1567468A1 (de) | 1970-08-06 |
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