GB1128123A - Improvements in or relating to cryopumps, and cryopanels therefor - Google Patents

Improvements in or relating to cryopumps, and cryopanels therefor

Info

Publication number
GB1128123A
GB1128123A GB792/67A GB79267A GB1128123A GB 1128123 A GB1128123 A GB 1128123A GB 792/67 A GB792/67 A GB 792/67A GB 79267 A GB79267 A GB 79267A GB 1128123 A GB1128123 A GB 1128123A
Authority
GB
United Kingdom
Prior art keywords
cooled
primary
pressure
jan
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB792/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur D Little Inc
Original Assignee
Arthur D Little Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur D Little Inc filed Critical Arthur D Little Inc
Publication of GB1128123A publication Critical patent/GB1128123A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Abstract

1,128,123. High vacuum pumps. ARTHUR D. LITTLE Inc. Jan.5, 1967 [Jan. 17, 1966], No. 792/67. Heading F1N. Gases to be evacuated from a chamber 13, 14 are condensed, when the pressure in the chamber is high, only on a primary surface surface 22 cooled by a refrigerator 20, but when the pressure drops to a predetermined level, temperature discontinuity means 28 separating the primary surface 22 from at least one secondary surface 23 becomes ineffective so that the secondary surface(s) are sufficiently cooled to enable the gases to condense on both the primary and the secondary surfaces. The temperature discontinuity means 28 may be a thermal resistance which exhibits an increasing thermal conductivity with decreasing temperature examples being straight, coiled or serrated wires of high-purity silver or copper, or single crystal aluminium. When there are two or more secondary surfaces they may be linked in series or parallel with the primary surface. Alternatively the surfaces may be separated by a gas space which is bridged, when the pressure drops to the predetermined value, by a thermal conductor in the form of a bi-metallic strip or a beam moved by a pressure responsive bellows. The condensation surfaces are shielded from radiation by a screen 30 and baffles 31 cooled by liquid nitrogen circulated through coils 32, 33.
GB792/67A 1966-01-17 1967-01-05 Improvements in or relating to cryopumps, and cryopanels therefor Expired GB1128123A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US521082A US3338063A (en) 1966-01-17 1966-01-17 Cryopanels for cryopumps and cryopumps incorporating them

Publications (1)

Publication Number Publication Date
GB1128123A true GB1128123A (en) 1968-09-25

Family

ID=24075268

Family Applications (1)

Application Number Title Priority Date Filing Date
GB792/67A Expired GB1128123A (en) 1966-01-17 1967-01-05 Improvements in or relating to cryopumps, and cryopanels therefor

Country Status (3)

Country Link
US (1) US3338063A (en)
FR (1) FR1508542A (en)
GB (1) GB1128123A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998006943A1 (en) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Cryopump
DE10317837A1 (en) * 2003-04-16 2004-11-04 Leybold Vakuum Gmbh vacuum chamber

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880C2 (en) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Cryopump
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
JPS54153315A (en) * 1978-05-24 1979-12-03 Aisin Seiki Co Ltd Cryopump
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
US4207746A (en) * 1979-02-13 1980-06-17 United Technologies Corporation Cryopump
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
DE3330146A1 (en) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden DEVICE AND METHOD FOR THE QUICK REGENERATION OF AUTONOMOUS CRYOPUMPS
JPS6065287A (en) * 1983-09-20 1985-04-15 Toshiba Corp Cryosorption pump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
EP0338113B1 (en) * 1988-04-22 1992-01-29 Leybold Aktiengesellschaft Method for the adaptation of a 2-stage cryogenic pump to a specific gas
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE4006755A1 (en) * 1990-03-03 1991-09-05 Leybold Ag Two-stage cryopump
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
WO2005075826A1 (en) * 2004-02-03 2005-08-18 Universität Regensburg Vacuum pump and method for operating the same
KR101045488B1 (en) * 2007-05-17 2011-06-30 캐논 아네르바 가부시키가이샤 Cryotrap and vacuum processing apparatus having cryotrap
WO2012016192A2 (en) 2010-07-30 2012-02-02 Brooks Automation, Inc. Multi-refrigerator high speed cryopump
US9546647B2 (en) 2011-07-06 2017-01-17 Sumitomo (Shi) Cryogenics Of America Inc. Gas balanced brayton cycle cold water vapor cryopump
KR102131471B1 (en) 2012-07-26 2020-07-07 스미토모 크라이어제닉스 오브 아메리카 인코포레이티드 Brayton cycle engine
WO2016034250A1 (en) * 2014-09-05 2016-03-10 Applied Materials, Inc. Multiple use cryo cooler in vacuum processing systems
DE112016002485B4 (en) 2015-06-03 2024-03-14 Sumitomo (Shi) Cryogenics Of America, Inc. EXPANSION MACHINE AND METHOD FOR PRODUCING COOLING

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
BE603458A (en) * 1960-05-07
US3130562A (en) * 1960-11-02 1964-04-28 Gen Electric Cryogenic pumping apparatus
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998006943A1 (en) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Cryopump
US6092373A (en) * 1996-08-09 2000-07-25 Leybold Vakuum Gmbh Cryopump
DE10317837A1 (en) * 2003-04-16 2004-11-04 Leybold Vakuum Gmbh vacuum chamber

Also Published As

Publication number Publication date
US3338063A (en) 1967-08-29
FR1508542A (en) 1968-01-05

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