FR1508542A - Cryogenic pumps for very high vacuum - Google Patents

Cryogenic pumps for very high vacuum

Info

Publication number
FR1508542A
FR1508542A FR91493A FR91493A FR1508542A FR 1508542 A FR1508542 A FR 1508542A FR 91493 A FR91493 A FR 91493A FR 91493 A FR91493 A FR 91493A FR 1508542 A FR1508542 A FR 1508542A
Authority
FR
France
Prior art keywords
high vacuum
cryogenic pumps
cryogenic
pumps
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR91493A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arthur D Little Inc
Original Assignee
Arthur D Little Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arthur D Little Inc filed Critical Arthur D Little Inc
Application granted granted Critical
Publication of FR1508542A publication Critical patent/FR1508542A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
FR91493A 1966-01-17 1967-01-17 Cryogenic pumps for very high vacuum Expired FR1508542A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US521082A US3338063A (en) 1966-01-17 1966-01-17 Cryopanels for cryopumps and cryopumps incorporating them

Publications (1)

Publication Number Publication Date
FR1508542A true FR1508542A (en) 1968-01-05

Family

ID=24075268

Family Applications (1)

Application Number Title Priority Date Filing Date
FR91493A Expired FR1508542A (en) 1966-01-17 1967-01-17 Cryogenic pumps for very high vacuum

Country Status (3)

Country Link
US (1) US3338063A (en)
FR (1) FR1508542A (en)
GB (1) GB1128123A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880A1 (en) * 1976-05-11 1977-11-24 Leybold Heraeus Gmbh & Co Kg CRYO PUMP
EP0079960A1 (en) * 1981-05-22 1983-06-01 Helix Tech Corp Improved cryopump.
EP0338113A1 (en) * 1988-04-22 1989-10-25 Leybold Aktiengesellschaft Method for the adaptation of a 2-stage cryogenic pump to a specific gas
EP0445503A1 (en) * 1990-03-03 1991-09-11 Leybold Aktiengesellschaft Two stage cryopump

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
JPS54153315A (en) * 1978-05-24 1979-12-03 Aisin Seiki Co Ltd Cryopump
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
US4207746A (en) * 1979-02-13 1980-06-17 United Technologies Corporation Cryopump
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
DE3330146A1 (en) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden DEVICE AND METHOD FOR THE QUICK REGENERATION OF AUTONOMOUS CRYOPUMPS
JPS6065287A (en) * 1983-09-20 1985-04-15 Toshiba Corp Cryosorption pump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
DE19632123A1 (en) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Cryopump
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
DE10317837A1 (en) * 2003-04-16 2004-11-04 Leybold Vakuum Gmbh vacuum chamber
WO2005075826A1 (en) * 2004-02-03 2005-08-18 Universität Regensburg Vacuum pump and method for operating the same
KR101045488B1 (en) * 2007-05-17 2011-06-30 캐논 아네르바 가부시키가이샤 Cryotrap and vacuum processing apparatus having cryotrap
JP5907965B2 (en) 2010-07-30 2016-04-26 ブルックス オートメーション インコーポレイテッド Multi-cooler high-speed cryopump
US9546647B2 (en) 2011-07-06 2017-01-17 Sumitomo (Shi) Cryogenics Of America Inc. Gas balanced brayton cycle cold water vapor cryopump
US10677498B2 (en) 2012-07-26 2020-06-09 Sumitomo (Shi) Cryogenics Of America, Inc. Brayton cycle engine with high displacement rate and low vibration
CN106605009A (en) * 2014-09-05 2017-04-26 应用材料公司 Multiple use cryo cooler in vacuum processing systems
GB2553946B (en) 2015-06-03 2020-09-30 Sumitomo Shi Cryogenics Of America Inc Gas balanced engine with buffer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
NL110751C (en) * 1960-05-07
US3130562A (en) * 1960-11-02 1964-04-28 Gen Electric Cryogenic pumping apparatus
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2620880A1 (en) * 1976-05-11 1977-11-24 Leybold Heraeus Gmbh & Co Kg CRYO PUMP
EP0079960A1 (en) * 1981-05-22 1983-06-01 Helix Tech Corp Improved cryopump.
EP0079960A4 (en) * 1981-05-22 1983-09-20 Helix Tech Corp Improved cryopump.
EP0338113A1 (en) * 1988-04-22 1989-10-25 Leybold Aktiengesellschaft Method for the adaptation of a 2-stage cryogenic pump to a specific gas
US4953359A (en) * 1988-04-22 1990-09-04 Leybold Aktiengesellschaft Method of adapting a two-stage refrigerator cryopump to a specific gas
EP0445503A1 (en) * 1990-03-03 1991-09-11 Leybold Aktiengesellschaft Two stage cryopump

Also Published As

Publication number Publication date
GB1128123A (en) 1968-09-25
US3338063A (en) 1967-08-29

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