GB1105206A - Device for changing pressure energy into electric energy - Google Patents
Device for changing pressure energy into electric energyInfo
- Publication number
- GB1105206A GB1105206A GB2349166A GB2349166A GB1105206A GB 1105206 A GB1105206 A GB 1105206A GB 2349166 A GB2349166 A GB 2349166A GB 2349166 A GB2349166 A GB 2349166A GB 1105206 A GB1105206 A GB 1105206A
- Authority
- GB
- United Kingdom
- Prior art keywords
- piezo
- layer
- pressure
- electric
- electric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005669 field effect Effects 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 abstract 1
- 229910002113 barium titanate Inorganic materials 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000036962 time dependent Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Pressure Sensors (AREA)
Abstract
1,105,206. Pressure sensitive devices. TELEFONAKTIEBOLAGET L. M. ERICSSON. 25 May, 1966 [25 May, 1965], No. 23491/66. Heading H1K. [Also in Divisions G1 and H4] A pressure-sensitive device comprises an insulated gate field effect transistor the insulated gate region comprising a piezo-electric layer and a normal dielectric layer so that stress on the piezo-electric layer can exert field effect conductivity control on the channel. Fig. 2 shows a high resistivity P-type silicon substrate containing source and drain N-type regions with electrodes S and D; an oxide layer 7 overlies the source-drain channel and a piezo-electric layer 9 of lead-zircon-titanate or barium titanate with electrode G extending over the oxide layer. A pin K is used to apply pressure to piezo-electric layer 8, the resulting electric field exercising field effect control over the source-drain current. The device may be encased in a sealed casing with pin K in contact with a diaphragm either directly or via a spring or " bouncing putty " (i.e. material with time dependent elasticity properties), and may be used as a microphone or pressure transducer. In a further embodiment a resilient arm co-operates with pin K to provide a pressure controlled switch. The piezo-electric layer may be vaporized on to the dielectric layer or a thin tablet of the material may be glued thereto.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE683065 | 1965-05-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1105206A true GB1105206A (en) | 1968-03-06 |
Family
ID=20269707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2349166A Expired GB1105206A (en) | 1965-05-25 | 1966-05-25 | Device for changing pressure energy into electric energy |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE681584A (en) |
DE (1) | DE1259599B (en) |
GB (1) | GB1105206A (en) |
NL (1) | NL6607212A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7892859B2 (en) | 2008-02-13 | 2011-02-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Device and method for switching electric signals and powers |
CN111024296A (en) * | 2019-12-30 | 2020-04-17 | 浙江清华柔性电子技术研究院 | Pressure sensor and preparation method thereof |
-
1966
- 1966-05-24 DE DE1966T0031205 patent/DE1259599B/en active Pending
- 1966-05-25 BE BE681584D patent/BE681584A/xx unknown
- 1966-05-25 NL NL6607212A patent/NL6607212A/xx unknown
- 1966-05-25 GB GB2349166A patent/GB1105206A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7892859B2 (en) | 2008-02-13 | 2011-02-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Device and method for switching electric signals and powers |
CN111024296A (en) * | 2019-12-30 | 2020-04-17 | 浙江清华柔性电子技术研究院 | Pressure sensor and preparation method thereof |
CN111024296B (en) * | 2019-12-30 | 2023-11-28 | 浙江清华柔性电子技术研究院 | Pressure sensor and method for producing the same |
Also Published As
Publication number | Publication date |
---|---|
BE681584A (en) | 1966-10-31 |
DE1259599B (en) | 1968-01-25 |
NL6607212A (en) | 1966-11-28 |
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