GB1058024A - Cathodic volatilisation coating process and apparatus - Google Patents
Cathodic volatilisation coating process and apparatusInfo
- Publication number
- GB1058024A GB1058024A GB7319/65A GB731965A GB1058024A GB 1058024 A GB1058024 A GB 1058024A GB 7319/65 A GB7319/65 A GB 7319/65A GB 731965 A GB731965 A GB 731965A GB 1058024 A GB1058024 A GB 1058024A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrodes
- moved
- sheets
- chamber
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000576 coating method Methods 0.000 title abstract 3
- 239000011521 glass Substances 0.000 abstract 3
- 239000000969 carrier Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910000416 bismuth oxide Inorganic materials 0.000 abstract 1
- 239000003638 chemical reducing agent Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 230000002441 reversible effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Surface Treatment Of Glass (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| LU45647A LU45647A1 (enrdf_load_html_response) | 1964-03-12 | 1964-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1058024A true GB1058024A (en) | 1967-02-08 |
Family
ID=19723710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB7319/65A Expired GB1058024A (en) | 1964-03-12 | 1965-02-19 | Cathodic volatilisation coating process and apparatus |
Country Status (13)
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2098563A5 (enrdf_load_html_response) * | 1970-07-10 | 1972-03-10 | Progil | |
| US3907660A (en) * | 1970-07-31 | 1975-09-23 | Ppg Industries Inc | Apparatus for coating glass |
| US4094763A (en) * | 1970-07-31 | 1978-06-13 | Ppg Industries, Inc. | Sputter coating of glass with an oxide of a metal having an atomic number between 48 and 51 and mixtures thereof |
| US4132624A (en) * | 1971-02-05 | 1979-01-02 | Triplex Safety Glass Company Limited | Apparatus for producing metal oxide films |
| GB1365492A (en) * | 1971-02-05 | 1974-09-04 | Triplex Safety Glass Co | Metal oxide films |
| FR2202169B2 (enrdf_load_html_response) * | 1972-10-07 | 1977-05-27 | Delog Detag Flachglas Ag | |
| US3904506A (en) * | 1972-11-13 | 1975-09-09 | Shatterproof Glass Corp | Apparatus for continuous production of sputter-coated glass products |
| DE2844491C2 (de) * | 1978-10-12 | 1983-04-14 | Leybold-Heraeus GmbH, 5000 Köln | Vakuum-Beschichtungsanlage mit einer Einrichtung zum kontinuierlichen Substrattransport |
| US4194962A (en) * | 1978-12-20 | 1980-03-25 | Advanced Coating Technology, Inc. | Cathode for sputtering |
| US4285800A (en) * | 1979-04-18 | 1981-08-25 | Branson International Plasma Corp. | Gas plasma reactor for circuit boards and the like |
| US4289598A (en) * | 1980-05-03 | 1981-09-15 | Technics, Inc. | Plasma reactor and method therefor |
| US4399014A (en) * | 1980-05-03 | 1983-08-16 | Engle Frank W | Plasma reactor and method therefor |
| DE3041551A1 (de) * | 1980-11-04 | 1982-06-09 | Siemens AG, 1000 Berlin und 8000 München | Elektroden fuer plasma-aetzanlage |
| US4797317A (en) * | 1984-09-27 | 1989-01-10 | Gila River Products, Inc. | Solar control window film |
| US4634637A (en) * | 1985-11-22 | 1987-01-06 | Gila River Products, Inc. | Solar control film |
| US6309516B1 (en) | 1999-05-07 | 2001-10-30 | Seagate Technology Llc | Method and apparatus for metal allot sputtering |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2043966A (en) * | 1934-04-21 | 1936-06-09 | Kathon Ltd | Apparatus for depositing metal by electrode dispersion |
| US2435997A (en) * | 1943-11-06 | 1948-02-17 | American Optical Corp | Apparatus for vapor coating of large surfaces |
| GB706003A (en) * | 1949-05-18 | 1954-03-24 | British American Res Ltd | Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers |
| US2754227A (en) * | 1951-11-30 | 1956-07-10 | Ransburg Electro Coating Corp | Method and apparatus for spray coating of articles |
| US2736671A (en) * | 1952-03-19 | 1956-02-28 | Ransburg Electro Coating Corp | Method and apparatus for repositioning coating atomizer means |
| US2703549A (en) * | 1952-03-27 | 1955-03-08 | Ransburg Electro Coating Corp | Apparatus for the electrostatic spray coating of articles |
| US2801607A (en) * | 1952-08-06 | 1957-08-06 | Centre Nat Rech Scient | Apparatus for applying material by thermal vaporization in the manufacture of electrical resistors |
| US2716622A (en) * | 1952-10-06 | 1955-08-30 | Bell Telephone Labor Inc | Method and apparatus for spray coating articles |
| BE547667A (enrdf_load_html_response) * | 1955-05-10 | 1900-01-01 | ||
| GB830391A (en) * | 1955-10-28 | 1960-03-16 | Edwards High Vacuum Ltd | Improvements in or relating to cathodic sputtering of metal and dielectric films |
| US3294670A (en) * | 1963-10-07 | 1966-12-27 | Western Electric Co | Apparatus for processing materials in a controlled atmosphere |
| US3293168A (en) * | 1964-05-22 | 1966-12-20 | Werner P Schulz | Apparatus for coating substrates by cathode sputtering |
-
1964
- 1964-03-12 LU LU45647A patent/LU45647A1/xx unknown
- 1964-12-11 CH CH1605164A patent/CH429363A/fr unknown
- 1964-12-22 ES ES0307466A patent/ES307466A1/es not_active Expired
-
1965
- 1965-01-08 AT AT12565A patent/AT255225B/de active
- 1965-01-13 SE SE434/65A patent/SE314268B/xx unknown
- 1965-01-19 BE BE658485D patent/BE658485A/xx unknown
- 1965-02-03 FR FR4319A patent/FR1425640A/fr not_active Expired
- 1965-02-19 DE DE1640604A patent/DE1640604C3/de not_active Expired
- 1965-02-19 GB GB7319/65A patent/GB1058024A/en not_active Expired
- 1965-03-08 US US437889A patent/US3414503A/en not_active Expired - Lifetime
- 1965-03-11 NL NL6503137A patent/NL132566C/xx active
- 1965-03-11 FI FI650600A patent/FI45111C/fi active
- 1965-03-12 DK DK126965AA patent/DK130797B/da unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FI45111B (enrdf_load_html_response) | 1971-11-30 |
| DK130797C (enrdf_load_html_response) | 1975-09-15 |
| DE1640604C3 (de) | 1974-01-31 |
| LU45647A1 (enrdf_load_html_response) | 1965-09-13 |
| DK130797B (da) | 1975-04-14 |
| SE314268B (enrdf_load_html_response) | 1969-09-01 |
| BE658485A (enrdf_load_html_response) | 1965-05-17 |
| DE1640604B2 (de) | 1973-07-05 |
| NL132566C (enrdf_load_html_response) | 1971-05-17 |
| CH429363A (fr) | 1967-01-31 |
| ES307466A1 (es) | 1965-07-01 |
| US3414503A (en) | 1968-12-03 |
| FR1425640A (fr) | 1966-01-24 |
| FI45111C (fi) | 1972-03-10 |
| AT255225B (de) | 1967-06-26 |
| DE1640604A1 (de) | 1971-02-04 |
| NL6503137A (enrdf_load_html_response) | 1965-09-13 |
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