GB1058024A - Cathodic volatilisation coating process and apparatus - Google Patents

Cathodic volatilisation coating process and apparatus

Info

Publication number
GB1058024A
GB1058024A GB7319/65A GB731965A GB1058024A GB 1058024 A GB1058024 A GB 1058024A GB 7319/65 A GB7319/65 A GB 7319/65A GB 731965 A GB731965 A GB 731965A GB 1058024 A GB1058024 A GB 1058024A
Authority
GB
United Kingdom
Prior art keywords
electrodes
moved
sheets
chamber
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7319/65A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of GB1058024A publication Critical patent/GB1058024A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Laminated Bodies (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

In cathode sputtering apparatus for coating one or both sides of glass plates with Cu, alumina and bismuth oxide in any sequence to be volatilized the plates are arranged in vertical parallel planes and electrodes are moved across the sheets either vertically or horizontally in planes parallel to the sheets. A cylindrical vacuum chamber (1), Fig.2 (not shown), with a removable cover (4) contains horizontal frame members (9), (10) adapted to support removable frames comprising a plurality of movable slotted vertical supports each carrying on either side several glass sheets (25) of various sizes. Horizontal tubular liquid cooled electrodes (30), (32) supported at each end on carrier strips (31), (33) extend between the glass plates and are movable up and down by screw bars (36) driven by a reversible electric motor through a speed reducer (48) and an endless chain (50). The direction of rotation of the motor is reversed when the electrodes reach their upper and lower positions by a set of limit switches in a battery operated circuit. Two pairs of electrodes for applying different coatings may be mounted on the carriers. In another embodiment the rods are moved up and down by a non reversing motor driving a vertical endless chain carrying a pin which engages a follower attached to the carriers (31), (33). In further embodiments only single electrodes are moved, these may be cathodes and either the chamber may be used as the anode or a common anode may be placed at the bottom of chamber (1), alternatively adjacent electrodes may form anode and cathode pairs.
GB7319/65A 1964-03-12 1965-02-19 Cathodic volatilisation coating process and apparatus Expired GB1058024A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU45647A LU45647A1 (en) 1964-03-12 1964-03-12

Publications (1)

Publication Number Publication Date
GB1058024A true GB1058024A (en) 1967-02-08

Family

ID=19723710

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7319/65A Expired GB1058024A (en) 1964-03-12 1965-02-19 Cathodic volatilisation coating process and apparatus

Country Status (13)

Country Link
US (1) US3414503A (en)
AT (1) AT255225B (en)
BE (1) BE658485A (en)
CH (1) CH429363A (en)
DE (1) DE1640604C3 (en)
DK (1) DK130797B (en)
ES (1) ES307466A1 (en)
FI (1) FI45111C (en)
FR (1) FR1425640A (en)
GB (1) GB1058024A (en)
LU (1) LU45647A1 (en)
NL (1) NL132566C (en)
SE (1) SE314268B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2098563A5 (en) * 1970-07-10 1972-03-10 Progil
US4094763A (en) * 1970-07-31 1978-06-13 Ppg Industries, Inc. Sputter coating of glass with an oxide of a metal having an atomic number between 48 and 51 and mixtures thereof
US3907660A (en) * 1970-07-31 1975-09-23 Ppg Industries Inc Apparatus for coating glass
GB1365492A (en) * 1971-02-05 1974-09-04 Triplex Safety Glass Co Metal oxide films
US4132624A (en) * 1971-02-05 1979-01-02 Triplex Safety Glass Company Limited Apparatus for producing metal oxide films
GB1381835A (en) * 1972-10-07 1975-01-29 Delog Detag Flachglas Ag Coating of large plates of glass ceramics plstics and the like by cathodic sputtering
US3904506A (en) * 1972-11-13 1975-09-09 Shatterproof Glass Corp Apparatus for continuous production of sputter-coated glass products
DE2844491C2 (en) * 1978-10-12 1983-04-14 Leybold-Heraeus GmbH, 5000 Köln Vacuum coating system with a device for continuous substrate transport
US4194962A (en) * 1978-12-20 1980-03-25 Advanced Coating Technology, Inc. Cathode for sputtering
US4285800A (en) * 1979-04-18 1981-08-25 Branson International Plasma Corp. Gas plasma reactor for circuit boards and the like
US4289598A (en) * 1980-05-03 1981-09-15 Technics, Inc. Plasma reactor and method therefor
US4399014A (en) * 1980-05-03 1983-08-16 Engle Frank W Plasma reactor and method therefor
DE3041551A1 (en) * 1980-11-04 1982-06-09 Siemens AG, 1000 Berlin und 8000 München ELECTRODES FOR PLASMA EQUIPMENT
US4797317A (en) * 1984-09-27 1989-01-10 Gila River Products, Inc. Solar control window film
US4634637A (en) * 1985-11-22 1987-01-06 Gila River Products, Inc. Solar control film
US6309516B1 (en) 1999-05-07 2001-10-30 Seagate Technology Llc Method and apparatus for metal allot sputtering

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2043966A (en) * 1934-04-21 1936-06-09 Kathon Ltd Apparatus for depositing metal by electrode dispersion
US2435997A (en) * 1943-11-06 1948-02-17 American Optical Corp Apparatus for vapor coating of large surfaces
GB706003A (en) * 1949-05-18 1954-03-24 British American Res Ltd Improvements in the coating of articles by evaporation and/or sputtering in evacuated chambers
US2754227A (en) * 1951-11-30 1956-07-10 Ransburg Electro Coating Corp Method and apparatus for spray coating of articles
US2736671A (en) * 1952-03-19 1956-02-28 Ransburg Electro Coating Corp Method and apparatus for repositioning coating atomizer means
US2703549A (en) * 1952-03-27 1955-03-08 Ransburg Electro Coating Corp Apparatus for the electrostatic spray coating of articles
US2801607A (en) * 1952-08-06 1957-08-06 Centre Nat Rech Scient Apparatus for applying material by thermal vaporization in the manufacture of electrical resistors
US2716622A (en) * 1952-10-06 1955-08-30 Bell Telephone Labor Inc Method and apparatus for spray coating articles
LU34343A1 (en) * 1955-05-10
GB830391A (en) * 1955-10-28 1960-03-16 Edwards High Vacuum Ltd Improvements in or relating to cathodic sputtering of metal and dielectric films
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3293168A (en) * 1964-05-22 1966-12-20 Werner P Schulz Apparatus for coating substrates by cathode sputtering

Also Published As

Publication number Publication date
DE1640604B2 (en) 1973-07-05
LU45647A1 (en) 1965-09-13
NL6503137A (en) 1965-09-13
BE658485A (en) 1965-05-17
SE314268B (en) 1969-09-01
US3414503A (en) 1968-12-03
NL132566C (en) 1971-05-17
DK130797B (en) 1975-04-14
FR1425640A (en) 1966-01-24
FI45111B (en) 1971-11-30
ES307466A1 (en) 1965-07-01
CH429363A (en) 1967-01-31
DE1640604C3 (en) 1974-01-31
DK130797C (en) 1975-09-15
AT255225B (en) 1967-06-26
FI45111C (en) 1972-03-10
DE1640604A1 (en) 1971-02-04

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