US2435997A - Apparatus for vapor coating of large surfaces - Google Patents

Apparatus for vapor coating of large surfaces Download PDF

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US2435997A
US2435997A US509236A US50923643A US2435997A US 2435997 A US2435997 A US 2435997A US 509236 A US509236 A US 509236A US 50923643 A US50923643 A US 50923643A US 2435997 A US2435997 A US 2435997A
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coating
coated
carrier
coating material
chamber
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US509236A
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Alva H Bennett
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American Optical Corp
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American Optical Corp
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Definitions

  • This invention relates to new and improved means and process for coating surfaces and more particularly to the coating of such surfaces by deposition of a vaporized coating material in a vacuum.
  • An object of the present invention is to provide new and improved means and method for the coating of the surfaces of large rigid objects by deposition of a vaporized coating material in an evacuated chamber.
  • Another object of the invention is to provide a new and improved means and method for coating the surface of a large rigid object whereby substantially uniform distribution of the coating material over the entire surface of the object may be obtained.
  • Another object of the invention is to provide new and improved means and method whereby the surface of a large object may be coated with greater speed than previously possible and with greater uniformity of coating.
  • Fig. 1 is a sectional view of an apparatus for carrying out the invention
  • Fig. 2 is a sectional view taken on line 2-2 of Fig. 1 looking in the direction of the arrows;
  • Fig. 3 is a sectional viewtaken on line 3-3 of Fig. 2 looking in the direction of the arrows;
  • Fig. 4 is a view similar to Fig. 1 but showing a further form of apparatus for carrying out the invention.
  • Fig. 5 is a fragmentary top or plan view similar to Fig. 2 but showing the form of the invention shown in Fig. 4.
  • the coating of the surfaces of large objects such as large plates of glass for windows, etc.
  • reflection reducing coatings or with reflective coatings it is desirable that the coating be obtained in as short a time as possible for ease and economy in manufacture and also that the deposited coating be uniformly distributed over the entire surface.
  • this has required 2 either a plurality of sources or else a single source was placed a considerable distance from the surface to be coated which increased considerably the size of the chamber to be evacuated and made difficult the obtaining of uniform coatings. It is, therefore, the object of the present invention to provide a new and improved means and method of coating the surface of a large object whereby the coating will be uniformly distributed over the entire surface and whereby said coating will be deposited in a relatively short time.
  • the openings 3 may be of desired number depending upon the size of the vacuum chamber.
  • the upright supports 4 for supporting the object to be coated 5 whicnmay be a large sheet of glass, plastic or other similar material with the surface thereof to be coated placed in the direction of the source of coating material. If desired apparatus could' be provided for rotating the article to permit coating of both sides but this would require the vacuum chamber to be large.
  • This guide member 6 On the surface of the base i is placed the guide member 6 or this guide member 6 may be formed directly in the upper surface of the base i itself if desired.
  • This guide member 6 has the guideway I which contains the rails 8 and 9 which may be energized by the current from the leads "I and II.
  • the traveling carrier I! which comprises the crucible portion [3 containing' the coating material II which coating material is-adapted to be vaporized by heat from the heating coil II which is energized by the leads I! and I! from the terminals la -and liirespectively which in turn receive currentbymeans of the leads ll and 2
  • the traveling carrier 12 has the wheels 23- which are adapted to be driven by the electric motor 24 which receives current from the tracks 7 said crucible is a shield member which both acts as a support for said crucible and also acts 8.8%
  • the heating coil I I could be eliminated and the" coating material l4 vaporized by resistance heating in which case the current would be applied directly to the crucible which would then become heated and vaporize said coating material.
  • the vaporized coating material from the crucible i3 is deposited on the surface of the plate 5 on the side toward said source to form the desired coating on said surface.
  • the pattern or design of the guideway 1 and tracks 8 and O is so computed or determined as to provide the desired uniformity of coating on the surface of the article to be coated and the traveling carrier traverses the full extent of the way I and then is reversed by the members 9a engaging either of the switches 25 or 26 to reverse the motor 24 which may be of the universal type, to reverse its direction of travel and it therefore returns to the starting point where it again is reversed and this travel of the carrier continues until the coating of desired thickness is deposited which thickness can be observed directly by the operator observing the coated surface through the chamber member 2 where the said chamber member is transparent or through suitable windows in said chamber.
  • the crucible I! could be heated by induction heating coils surrounding said crucible.
  • FIG. 4 and 5 The form of the invention shown in Figures 4 and 5 is similar to that shown in Figures 1 to 3, inclusive, except that in this case instead of the traveling carrier I! being directly associated with the motor, the carrier is driven by a magnet 29 which is driven by the motor 30 and which magnet rides on the tracks 32 and 33 which are beneath the base I and the magnet 29 causes movement of the magnet 28 and carrier l2 to the same extent as the movement of the magnet 29.
  • the wheels 30 and ii are driven by the motor 34,
  • Th carrier i2 in this case rides in the grooves 40 and 4
  • the base 39 is supported by the legs 31 on a sup- P rt 38.
  • the contour of the guideway 1 could be formed to correspond to the contour of the surface to be coated so that the distance between the source of coating material and surface to be coated could be kept constant during the coating operation.
  • the surface Before the surface is coated it should, of course, be cleaned in the usual way and may if desired be heated by placing a heating coil within the vacuum chamber between the upper surface of the article to be coated and the top of the chamber. This will facilitate the coating and also increase the hardness of the resultant coating.
  • means for supporting the large rigid object the surface of which is to be coated a movable carrier, said carrier having means for supporting a coating material, means for vaporizing said coating material and a guideway in spaced relation with an object supported by said object support and extending substantially over the area thereof for guiding said carrierduring the distribution of the coating material on the surface to be coated, current conduction means in said guideway and means on said carrier adapted to be energized by current from said current conducting means in said guidewa to cause movement of said carrier in said guideway.
  • a vacuum chamber means in said vacuum chamber for supporting an object the surface of which is to be coated, a movable carrier, said carrier hav. ing means for supporting a coating material and means for vaporizing said coating material, a guideway for guiding said carrier along paths substantially uniformly distributed relative to the surface of the object to be coated and means operable during evacuation of said chamber for moving said carrier along the paths of said guideway,
  • a vacuum chamber means in said vacuum chamber for supporting the object to be coated, a guideway in said vacuum chamber, said guideway being arranged according to the distribution desired of the coating material, a carrier adapted to be movable in said guideway, said carrier having means for supporting a coating material and means for vaporizing said coating material, a guide member without the evacuated chamber and being of substantially the same configuration as the guideway within the chamber and means movable on said guideway without the evacuated chamber, said movable means having means for causing simultaneous movement of the carrier within the chamber whereby said carrier may be moved relative to the surface to be coated while causing emission of said coating material.
  • Apparatus for coating relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said vacuum chamber, means associated with said container for vaporizing the coating material and transport means operable during evacuation of I 5 said chamber for moving said carrier along paths substantially uniformly distributed relative to the surface of the object to be coated.
  • Apparatus for coating relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said chamber, a container for the coating material, a. carrier for said container movable in said vacuum chamber, electric heating means associated with said container for vaporizing the coating material, and means for producing movement of said carrier within said vacuum chamber along paths substantially uniformly distributed relative to the surface of the object to be coated- 7.
  • Apparatus for coating, relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said chamber, a crucible for containing the coating material, a carrier for said crucible movable in said vacuum chamber, heating means associated with said crucible for vaporizing the coating material, andtransport means operable by a servo-motor movable therewith for moving said carrier along a network of paths distributed 6 relative to the surface to ALVA H. BENNETT.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

Feb. 17, 1948. A. H. BENNETT 3 APPARATUS FOR VAPOR comma 0! LARGE SURFACES Filed Nov. 6, 1945 2 Sheets-Sheet 1 414 o 23 mm\\\\\\\\\ Y 2;; 3 22 f 2 9a I l ,0 ,j fl
INVENTOR.
ALVA MBENNETT Feb. 17, 1948. H k -r 2,435,997
APPARATUS FOR VAPOR COATING OF LARGE SURFACES Filed 'Nov. 6, 1943 2 Shepts-Sheet 2 AL v: M JEN/Y5 TT Patented Feb. 17, 1948 APPARATUS FOR varon comma or LARGE SURFACES Alva H. Bennett, Kenmore, N. Y., assignor, by
mesne assignments. American Optical Company, Sonthbrldge, Mass a voluntary association Application November s, 1943, Serial No. 509,236
I- Claims.
This invention relates to new and improved means and process for coating surfaces and more particularly to the coating of such surfaces by deposition of a vaporized coating material in a vacuum.
' An object of the present invention is to provide new and improved means and method for the coating of the surfaces of large rigid objects by deposition of a vaporized coating material in an evacuated chamber.
Another object of the invention is to provide a new and improved means and method for coating the surface of a large rigid object whereby substantially uniform distribution of the coating material over the entire surface of the object may be obtained.
Another object of the invention is to provide new and improved means and method whereby the surface of a large object may be coated with greater speed than previously possible and with greater uniformity of coating.
Other objects and advantages of the invention will be apparent from the following description taken in connection with the accompanying drawings. It will be understood that many changes may be made in the details of construction, ar-
rangement of parts and steps of the processwithout departing from the spirit of the invention as expressed in the accompanying claims. I; therefore, do not wish to be limited to the exact details of construction, arrangement of parts and steps of the process shown and described as the preferred form and process have been given by way of illustration only.
Referring to the drawings:
Fig. 1 is a sectional view of an apparatus for carrying out the invention; I
Fig. 2 is a sectional view taken on line 2-2 of Fig. 1 looking in the direction of the arrows;
Fig. 3 is a sectional viewtaken on line 3-3 of Fig. 2 looking in the direction of the arrows;
Fig. 4 is a view similar to Fig. 1 but showing a further form of apparatus for carrying out the invention; and
Fig. 5 is a fragmentary top or plan view similar to Fig. 2 but showing the form of the invention shown in Fig. 4.
In the coating of the surfaces of large objects such as large plates of glass for windows, etc., with reflection reducing coatings or with reflective coatings it is desirable that the coating be obtained in as short a time as possible for ease and economy in manufacture and also that the deposited coating be uniformly distributed over the entire surface. In the past this has required 2 either a plurality of sources or else a single source was placed a considerable distance from the surface to be coated which increased considerably the size of the chamber to be evacuated and made difficult the obtaining of uniform coatings. It is, therefore, the object of the present invention to provide a new and improved means and method of coating the surface of a large object whereby the coating will be uniformly distributed over the entire surface and whereby said coating will be deposited in a relatively short time.
Referring more particularly to the drawings wherein similar reference characters designate corresponding parts throughout the several views the form of apparatus shown in Figures 1 to 3 inclusive for carrying out the invention comprises a base I on which is positioned the vacuum chamber or bell jar member 2 which may be evacuated through the opening 3 in the usual manner. The openings 3 may be of desired number depending upon the size of the vacuum chamber.
Within theevacuated chamber are the upright supports 4 for supporting the object to be coated 5 whicnmay be a large sheet of glass, plastic or other similar material with the surface thereof to be coated placed in the direction of the source of coating material. If desired apparatus could' be provided for rotating the article to permit coating of both sides but this would require the vacuum chamber to be large.
On the surface of the base i is placed the guide member 6 or this guide member 6 may be formed directly in the upper surface of the base i itself if desired. This guide member 6 has the guideway I which contains the rails 8 and 9 which may be energized by the current from the leads "I and II.
Within the guideway I is the traveling carrier I! which comprises the crucible portion [3 containing' the coating material II which coating material is-adapted to be vaporized by heat from the heating coil II which is energized by the leads I! and I! from the terminals la -and liirespectively which in turn receive currentbymeans of the leads ll and 2| from the posts 222 The traveling carrier 12 has the wheels 23- which are adapted to be driven by the electric motor 24 which receives current from the tracks 7 said crucible is a shield member which both acts as a support for said crucible and also acts 8.8%
radiation shield to retain the heat within said crucible.
It is pointed out that if desired the heating coil I I could be eliminated and the" coating material l4 vaporized by resistance heating in which case the current would be applied directly to the crucible which would then become heated and vaporize said coating material.
The vaporized coating material from the crucible i3 is deposited on the surface of the plate 5 on the side toward said source to form the desired coating on said surface.
The pattern or design of the guideway 1 and tracks 8 and O is so computed or determined as to provide the desired uniformity of coating on the surface of the article to be coated and the traveling carrier traverses the full extent of the way I and then is reversed by the members 9a engaging either of the switches 25 or 26 to reverse the motor 24 which may be of the universal type, to reverse its direction of travel and it therefore returns to the starting point where it again is reversed and this travel of the carrier continues until the coating of desired thickness is deposited which thickness can be observed directly by the operator observing the coated surface through the chamber member 2 where the said chamber member is transparent or through suitable windows in said chamber.
If desired, instead of the heating coil I5 and the resistance form of heating as previously described the crucible I! could be heated by induction heating coils surrounding said crucible.
The form of the invention shown in Figures 4 and 5 is similar to that shown in Figures 1 to 3, inclusive, except that in this case instead of the traveling carrier I! being directly associated with the motor, the carrier is driven by a magnet 29 which is driven by the motor 30 and which magnet rides on the tracks 32 and 33 which are beneath the base I and the magnet 29 causes movement of the magnet 28 and carrier l2 to the same extent as the movement of the magnet 29. The wheels 30 and ii are driven by the motor 34,
The movement of the magnet 29 automatically causes movement therewith of the traveling carrier i 2 within the evacuated chamber and the motor 34 is reversed by the member 35 engaging the member 36 in the manner described above for the prior form and the coating continued until the desired coating is applied. Th carrier i2 in this case rides in the grooves 40 and 4| which grooves are arranged in a pattern similar to the tracks 32 and 33 for the wheels 30. In this case the base 39 is supported by the legs 31 on a sup- P rt 38.
It is pointed out that should the surface to be coated be irregular, that is, not all the same plane, then the contour of the guideway 1 could be formed to correspond to the contour of the surface to be coated so that the distance between the source of coating material and surface to be coated could be kept constant during the coating operation.
Before the surface is coated it should, of course, be cleaned in the usual way and may if desired be heated by placing a heating coil within the vacuum chamber between the upper surface of the article to be coated and the top of the chamber. This will facilitate the coating and also increase the hardness of the resultant coating.
It is also pointed out that if desired instead of moving the crucible or sourc of coating material relative to the surface to be coated that the article to be coated could be movably mounted relative to a stationar source of coating material but this would require a much larger vacuum chamber than otherwise necessary.
From the foregoing it will be seen that I have provided simple, efficient and economical means for obtaining all of the objects and advantages of the invention.
Having described my invention, I claim:
1. In a device of the character described, means for supporting the large rigid object the surface of which is to be coated, a movable carrier, said carrier having means for supporting a coating material, means for vaporizing said coating material and a guideway in spaced relation with an object supported by said object support and extending substantially over the area thereof for guiding said carrierduring the distribution of the coating material on the surface to be coated, current conduction means in said guideway and means on said carrier adapted to be energized by current from said current conducting means in said guidewa to cause movement of said carrier in said guideway.
2. In a device of the character described, a vacuum chamber, means in said vacuum chamber for supporting an object the surface of which is to be coated, a movable carrier, said carrier hav. ing means for supporting a coating material and means for vaporizing said coating material, a guideway for guiding said carrier along paths substantially uniformly distributed relative to the surface of the object to be coated and means operable during evacuation of said chamber for moving said carrier along the paths of said guideway,
3. In a device of the character described, a vacuum chamber, means in said vacuum chamber for supporting the object to be coated, a guideway in said vacuum chamber, said guideway being arranged according to the distribution desired of the coating material, a carrier adapted to be movable in said guideway, said carrier having means for supporting a coating material and means for vaporizing said coating material, a guide member without the evacuated chamber and being of substantially the same configuration as the guideway within the chamber and means movable on said guideway without the evacuated chamber, said movable means having means for causing simultaneous movement of the carrier within the chamber whereby said carrier may be moved relative to the surface to be coated while causing emission of said coating material.
4. Apparatus for coating relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said vacuum chamber, means associated with said container for vaporizing the coating material and transport means operable during evacuation of I 5 said chamber for moving said carrier along paths substantially uniformly distributed relative to the surface of the object to be coated.
6. Apparatus for coating relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said chamber, a container for the coating material, a. carrier for said container movable in said vacuum chamber, electric heating means associated with said container for vaporizing the coating material, and means for producing movement of said carrier within said vacuum chamber along paths substantially uniformly distributed relative to the surface of the object to be coated- 7. Apparatus for coating, relatively extensive surfaces comprising a vacuum chamber, means for supporting an object to be coated within said chamber, a crucible for containing the coating material, a carrier for said crucible movable in said vacuum chamber, heating means associated with said crucible for vaporizing the coating material, andtransport means operable by a servo-motor movable therewith for moving said carrier along a network of paths distributed 6 relative to the surface to ALVA H. BENNETT.
* REFERENCES CITED substantially uniformly be coated.
The following references are of record in the iile of this patent:
UNITED STATES PATENTS Number Name Date 1,817,311 Hedde Aug. 4, 1931 2,074,281 Sommer. Mar. 16, 1937 2,153,363 Bruche Apr. 4, 1939 2,267,296 Bennewitz at 9.1.. Dec. 23, 1941.- 1,256,599 Schoop Feb, 19, 1918 2,239,642 Burkhard ,et al. Apr, 22, 1941 2,317,173 Bleakley Apr. 20,1943 1,439,743 Mathes Dec. 26, 1922 998,579 Herz July 18, 1,911
FOREIGN PATENTS Number Country I Date 806,066 France Nov. 10, 1936
US509236A 1943-11-06 1943-11-06 Apparatus for vapor coating of large surfaces Expired - Lifetime US2435997A (en)

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Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2527747A (en) * 1946-01-03 1950-10-31 Margaret N Lewis Apparatus for coating articles by thermal evaporation
US3382843A (en) * 1965-10-23 1968-05-14 Optical Coating Laboratory Inc Vacuum coating apparatus utilizing rotating sources
US3414503A (en) * 1964-03-12 1968-12-03 Glaverbel Apparatus for coating the surface of plates uniformly by cathode sputtering
US3984585A (en) * 1974-05-30 1976-10-05 Fuji Xerox Co., Ltd. Vacuum evaporation plating method
US4002880A (en) * 1975-08-13 1977-01-11 Gte Sylvania Incorporated Evaporation source
US4187801A (en) * 1977-12-12 1980-02-12 Commonwealth Scientific Corporation Method and apparatus for transporting workpieces
US4748935A (en) * 1985-02-05 1988-06-07 Balzers Aktiengesellschaft Vapor source for vacuum coating installation
EP0997552A1 (en) * 1997-07-14 2000-05-03 Matsushita Electric Industrial Co., Ltd. Method and apparatus for forming thin functional film
US20020009538A1 (en) * 2000-05-12 2002-01-24 Yasuyuki Arai Method of manufacturing a light-emitting device
US20030162314A1 (en) * 2002-02-25 2003-08-28 Shunpei Yamazaki Fabrication system and a fabrication method of light emitting device
US20030194484A1 (en) * 2002-04-15 2003-10-16 Semiconductor Engergy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US20030221620A1 (en) * 2002-06-03 2003-12-04 Semiconductor Energy Laboratory Co., Ltd. Vapor deposition device
US20040031442A1 (en) * 2002-05-17 2004-02-19 Semiconductor Energy Laboratory Co., Ltd. Evaporation method, evaporation device and method of fabricating light emitting device
US20040035360A1 (en) * 2002-05-17 2004-02-26 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus
US20040040504A1 (en) * 2002-08-01 2004-03-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus
US20040139914A1 (en) * 2002-08-30 2004-07-22 Semiconductor Energy Laboratory Co., Ltd. Fabrication system, light-emitting device and fabricating method of organic compound-containing layer
US20040216673A1 (en) * 2003-02-14 2004-11-04 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus
US20050005848A1 (en) * 2003-04-25 2005-01-13 Shunpei Yamazaki Apparatus for forming a film and an electroluminescence device
US20050034671A1 (en) * 2003-08-15 2005-02-17 Semiconductor Energy Laboratory Co., Ltd. Deposition apparatus and manufacturing apparatus
US20050053720A1 (en) * 2003-07-25 2005-03-10 Shunpei Yamazaki Manufacturing method of a light emitting device
JP2005097730A (en) * 2003-08-15 2005-04-14 Semiconductor Energy Lab Co Ltd Film-forming apparatus and manufacturing apparatus
US20060011136A1 (en) * 2004-07-15 2006-01-19 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus
US20090170227A1 (en) * 2003-04-10 2009-07-02 Semiconductor Energy Laboratory Co., Ltd. Mask and container and manufacturing
US20100021624A1 (en) * 1999-12-27 2010-01-28 Semiconductor Energy Laboratory Co., Ltd Film Formation Apparatus and Method for Forming a Film
US20100159124A1 (en) * 2000-05-02 2010-06-24 Semiconductor Energy Laboratory Co., Ltd. Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US7943443B2 (en) 2002-09-20 2011-05-17 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of light-emitting device
US20120090544A1 (en) * 2010-10-18 2012-04-19 Kim Mu-Gyeom Thin film deposition apparatus for continuous deposition, and mask unit and crucible unit included in thin film deposition apparatus
EP2775009A3 (en) * 2010-10-18 2014-11-12 Samsung Display Co., Ltd. Crucible unit for a thin film deposition apparatus
US10081860B2 (en) * 2015-06-30 2018-09-25 Boe Technology Group Co., Ltd. Vacuum deposition apparatus and vapor deposition method

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US2074281A (en) * 1933-07-13 1937-03-16 Sommer Ludwig August Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo
US2153363A (en) * 1935-12-18 1939-04-04 Gen Electric Laminated metal body
US2239642A (en) * 1936-05-27 1941-04-22 Bernhard Berghaus Coating of articles by means of cathode disintegration
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US998579A (en) * 1911-03-22 1911-07-18 Nat Varnish Company Spraying-machine.
US1439743A (en) * 1916-04-29 1922-12-26 Du Pont Process for finishing footwear
US1256599A (en) * 1916-07-03 1918-02-19 Max Ulrich Schoop Process and mechanism for the production of electric heaters.
US1817311A (en) * 1929-06-19 1931-08-04 Firm La Soc Societe Nouvelle D Method and means for the obtainment of decorative effects upon textile fabrics by brilliant metallic deposits
US2074281A (en) * 1933-07-13 1937-03-16 Sommer Ludwig August Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo
FR805066A (en) * 1935-08-02 1936-11-10 Device for the production of deposits by sublimation in vacuum
US2153363A (en) * 1935-12-18 1939-04-04 Gen Electric Laminated metal body
US2239642A (en) * 1936-05-27 1941-04-22 Bernhard Berghaus Coating of articles by means of cathode disintegration
US2267296A (en) * 1939-03-30 1941-12-23 Oilgear Co Bonding machine
US2317173A (en) * 1940-02-01 1943-04-20 Bleakley Corp Apparatus for melting powdered materials

Cited By (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2527747A (en) * 1946-01-03 1950-10-31 Margaret N Lewis Apparatus for coating articles by thermal evaporation
US3414503A (en) * 1964-03-12 1968-12-03 Glaverbel Apparatus for coating the surface of plates uniformly by cathode sputtering
US3382843A (en) * 1965-10-23 1968-05-14 Optical Coating Laboratory Inc Vacuum coating apparatus utilizing rotating sources
US3984585A (en) * 1974-05-30 1976-10-05 Fuji Xerox Co., Ltd. Vacuum evaporation plating method
US4002880A (en) * 1975-08-13 1977-01-11 Gte Sylvania Incorporated Evaporation source
US4187801A (en) * 1977-12-12 1980-02-12 Commonwealth Scientific Corporation Method and apparatus for transporting workpieces
US4748935A (en) * 1985-02-05 1988-06-07 Balzers Aktiengesellschaft Vapor source for vacuum coating installation
EP0997552A1 (en) * 1997-07-14 2000-05-03 Matsushita Electric Industrial Co., Ltd. Method and apparatus for forming thin functional film
EP0997552A4 (en) * 1997-07-14 2001-05-02 Matsushita Electric Ind Co Ltd Method and apparatus for forming thin functional film
US6337105B1 (en) 1997-07-14 2002-01-08 Matsushita Electric Industrial Co., Ltd. Method and apparatus for forming thin functional film
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