US3321092A - Vacuum metallisation arrangement for materials in sheet form - Google Patents

Vacuum metallisation arrangement for materials in sheet form Download PDF

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US3321092A
US3321092A US361454A US36145464A US3321092A US 3321092 A US3321092 A US 3321092A US 361454 A US361454 A US 361454A US 36145464 A US36145464 A US 36145464A US 3321092 A US3321092 A US 3321092A
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frame
tank
sheet
frames
magazine
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US361454A
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Brichard Edgard
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AGC Glass Europe SA
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Glaverbel Belgium SA
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces

Definitions

  • the present invention relates to an arrangement for the deposition of layers on materials in sheet form, more particularly sheets of glass, by a process involving volatilisation of materials in vacuo, which process is hereinafter called vacuum metallisation, although it also covers the formation of layers other than metal layers, such as layers of compounds of metallic or non-metallic elements with other elements.
  • the vacuum metallisation apparatus comprises a tank in which is arranged a sheet, of which the surface to be treated faces the metallisation members which are generally situated beneath the sheet.
  • the tank is closed, the vacuum is produced and the metallisation is then carried out; as soon as this is completed, the pressure of the tank is restored to atmospheric pressure and the apparatus is opened, either for turning over the sheet, if it is to be treated on both surfaces, or for replacing it by another, if only a single surface is to be metallised.
  • the tank is then closed, the vacuum is again produced and the same cycle of operations is repeated for each surface to be treated.
  • the present invention considerably improves thi utility because it permits of carrying out the metalllsation of a predetermined number of sheets, on one or both surfaces, without it being necessary to open the tank and to produce the vacuum as many times as there are surfaces to be treated. The result is therefore an important saving as regards labour, motive force and time.
  • the metallisation arrangement according to the inver tion makes it possible for the surfaces of a predetermined quantity of sheets to be successively subjected to the treatment and comprises, to this end, within a vacuum treatment apparatus, a chamber for the sheets to be treated, a second chamber receiving the treated sheets and a mechanism for transferring the sheets from one chamber to the other.
  • the chambers are designed for receiving holders, each one of which is capable of accommodating and holding one sheet, and advantageously comprise vertical guides between which the holders are disposed horizontally one above the other and can be displaced vertically.
  • the vertical guides are formed by angle members which are mounted on bearers, and retain a stack of superimposed holders. These latter then comprise bevels at the front and rear edges, one bevel being on the upper face and the other on the lower face of each holder, so as to facilitate the displacement of the holders from one chamber to the other,
  • the guides comprise lateral members on which are positioned the holders at a small distance from one another. These members are capable of being displaced vertically by stages corresponding to the distance separating one member from the other and in a downward direction in the chamber receiving the sheets to be treated and in an upward direction in the chamber receiving the treated sheets.
  • the vertical guides are provided with elevating members mounted on bearers and provided with members on which the holders rest. These elevating members are preferably formed by vertical endless chains controlled by electric motors and provided with spaced lugs serving to support the holders.
  • the bearers are advantageously fixed at the ends to a ring capable of turning about its axis on a horizontal circular roller track, so as to impart a rotational movement about a vertical axis to the sheets in known manner during the metallisation operation.
  • the mechanism for transferring the sheets from one chamber to the other comprises rails which are fixed to the bearers and on which the holders are positioned during the metallising operation and which can he slid from the chamber for the sheets to be treated to the chamber for receiving the treated sheets.
  • a member actuated by an electric motor for displacing the holders from one chamber to the other is provided inside the vacuum vessel.
  • This member may be a raclctype pusher member driven by the pinion of the electric motor, if the apparatus is intended for treating only one surface of the sheet.
  • the sheettransfer mechanism advantageously comprises a frame which is capable of rocking about a horizontal shaft disposed at the bottom ends of the magazines in the mean plane between these latter, of retaining a holder during the operation of metallising the sheet and of transferring it by a rocking movement from the first chamber to the second, where the other surface of the sheet can be metal lised during the following operation. Nevertheless, this rocking frame only permits of a single surface of each sheet being treated.
  • the sheet is caused to enter the receiving magazine, by rocking of the frame, after a single one of its surfaces has been metallised, or the holders are loaded with two sheets, one of which will be metallised after the other after the rocking of the rrame.
  • the rocking frame comprises an automatic locking means which is open from the upper side and closed from the lower side of the frame, when this latter is in a horizontal position for the entry or exit of a holder, and is closed from two sides during the rocking of the frame.
  • This locking means advantageously comprises slide members which are disposed on two sides of the frame parallel to the rocking axis and are provided with fingers facing towards the interior of the frame, and also a stop member which extends beyond the frame and is capable of coming into contact with a cam controlling the movements of the slide members.
  • the holders then comprise notches through which the fingers of the slide memhers are able to pass from the upper side of the rocking frame when the latter is in a horizontal position.
  • the rocking frame is also provided with an electromagnetical- 1y controlled latch which makes the frame fast with the bearers when it is in a horizontal position, and also a switch which automatically shuts off the supply to the motors actuating the elevating chains of the chambers during the rocking of the frame.
  • the difierent movable members are preferably actuated by individual motors disposed inside the treatment apparatus and their connecting wires extend through the wall of this latter by way of fluid-tight points.
  • the metallising members when they are disposed at a short distance from the sheets to be treated, are advantageously fast with a mechanism capable of spacing them from the path of the rocking frame, such as vertical guides in which the support of these members, controlled for example by an endless screw, is able to slide.
  • FIGURE 1 shows a vertical section of a metallisation apparatus comprising a sheet-feeding means according to the invention.
  • FIGURE 2 is a plan view on the line II-II of FIG- URE 1, the chambers being shown empty.
  • FIGURE 3 shows a holder for a sheet which is to be metallised.
  • FIGURES 4 and 5 are front and side elevations of another embodiment of the chambers containing the holders.
  • FIGURES 6 and 7 are front and side elevations of an embodiment comprising a rocking frame.
  • FIGURE 8 is a detailed plan view of this frame.
  • FIGURE 9 is a side view showing one edge of the frame.
  • FIGURE 10 represents an arrangement permitting the electrodes to be lowered.
  • the vacuum treatment apparatus shown in FIGURES 1 and 2 comprises a tank 1 formed by the wall 2, the base 3 and the cover 4, and contains in its lower part a metallisation member 5, for example an evaporator.
  • the tank also comprises a horizontal circular roller track 6 disposed against the cylindrical wall, on which the device according to the invention is adapted to turn in known manner so that the sheet is able during its treatment to carry out one or more revolutions about the axis of the device, this being a condition which is essential for ensuring a uniform metallisation of this latter.
  • horizontal rails 7 are fixed on bearers 8, which are fast with a ring 9 turning on the roller track 6 by means of rollers 10.
  • Vertical guides 11, mounted on the bearers 8 are arranged in such a way as to form a chamber or magazine 12, in which are stacked the horizontal holders 13 containing the sheets 14 which are to be treated (FIG. 1). The positioning of the frames is effected from above the tank, the cover 4 being raised.
  • Guides 15 similar to the foregoing form a second magazine or chamber 16 and is adapted to receive the treated sheets.
  • the holders 13 stacked in the chamber 12 rest on the rails 7.
  • the vertical guides 11 and 15 can for example be formed by angle members, of which the wings are cut away at their lower part at 17 to a height sufi icient to permit the holders 13 to travel one by one on the rails 7.
  • An extension 18 of the tank 1 contains a pusher member which is formed by a rack 19 capable of being displaced in guides 20 by the pinion 21 of a reversible low-speed motor 22. This pusher member enables the holder which is on the rails 7 at the bottom of the magazine 12 to slide beneath the magazine 16.
  • a sheet ready to be treated on each surface is thus disposed beneath each chamber. After these two sheets have been treated on one surface, two holders 13 are successively pushed on to the rails 7, so as to have once again a sheet for treatment under each of the chambers. The operation is repeated in this way until the holders stacked in the chamber 12 are exhausted.
  • the chamber 16 is then emptied from the top of the tank, after having removed the cover 4.
  • the vertical guides of the magazines 12 and 16 are replaced by endless chains 31) (FIGS. 4 and 5), which carry projections or lugs 31 and are stretched over toothed wheels 32 fixed to shafts 33 supported by bearings 34 fast with the frame 35.
  • the holders are placed in separated relation on the lugs 31.
  • the lowering of the holders into the supply chamber 12 is effected by means of a motor 36, which drives a shaft 37 (FIG. 5) comprising two endless screws or worms 38.
  • a motor 36 which drives a shaft 37 (FIG. 5) comprising two endless screws or worms 38.
  • One of the latter has a right-hand thread and the other has a left-hand thread
  • FIGURES 6 to 9 An embodiment which enables two surfaces of each sheet to be treated is shown in FIGURES 6 to 9. It comprises beneath the bearers 8, which carry on the one hand, the bearing supports 34 of the shafts 33 with the chain wheels 32 and, on the other hand, the bearing supports 44 which carry a shaft 45 to which is keyed a rocking frame 46 which, in the horizontal position, frames the quadrilateral formed by the four chains of one or other chamber.
  • This frame 46 adapted to receive the holders 13, can be rocked from one chamber to the other under the action of a reversible motor 47 with a reduction gear, by means of the chain 48 and the toothed wheel 49 keyed on the shaft 45 (FIG. 7).
  • the frame 46 On one of the faces of its front and rear edges, the frame 46 comprises slide members 50 (FIG. 8) and on the opposite forces of its front and rear edges such frame is provided with slide members 50'.
  • slide members 50, 50' formed of flat iron plates slotted at 51, are guided and retained by screws $2 and comprise fingers 53 and 53', respectively, extending into the interior of the frame.
  • the end 54 of each of the slide members 50 extends beyond the frame on one side, while the opposite end 54' of each slide member 541 extends beyond it on the other side. Fixed on each of these ends 54 or 54 is a stop 55, formed for example by a roller.
  • the holders 13 comprise notches 56, replacing the bevels 23 and 24 shown in FIGURE 3.
  • the frame and the slide members occupy the position shown in FIGURE 8, one holder can be deposited by the chains on the fingers 53, the fingers 53 passing through the notches 56.
  • Guide means 57 FIGGS.
  • an electromagnetic locking device shown diagrammatically at 60 makes the rocking frame fast with the bearers 8, while this frame is underbeneath the chamber 12, and thus during the introduction of a holder into the frame and during the metallising operation.
  • the apparatus as described with a rocking frame although provided for metallising both surfaces of a sheet, also permits of only a single surface being metallised.
  • each holder is loaded with two sheets, which will be successively metallised on one of their surfaces.
  • FIGURE shows a metallising apparatus comprising discharge electrodes 61 disposed underneath the sheets to be treated.
  • the said electrodes are fixed to supports 62 sliding between guides 63 fast with the wall 2 of the tank and driven by endless screws or worms 64 coupled to reversible motors 65 by means of a reduction gear 66.
  • rocking frame can also serve for the treatment of a single surface of each sheet; it is sufiicient in this case for two sheets to be successively displaced by the frame between each treatment operation.
  • a vacuum metallisation tank a horizontal circular raceway mounted within said tank, metallisation means located in said tank below said raceway, a horizontal support located in said tank above said raceway, means mounting said horizontal support for turning movement on said circular raceway, a plurality of frames each capable of holding at least one sheet to be treated, two magazines wholly contained in said tank and arranged alongside each other on said horizontal support for turning movement with the latter about the vertical axis of said circular raceway, and each adapted to hold a plurality of said frames in vertically superposed relation, each of said magazines including means for enabling vertical movement of said frames therein in horizontally disposed position, means operable to enable the placement of frames loaded with the sheets to be treated in the upper end of one of the magazines contained in said tank, means for intermittently transferring frames moving downwardly in a step-by-step fashion in said one magazine from the bottom of the latter to the bottom of the other magazine, and means for causing the frames in said other magazine to rise
  • a device as defined in claim'2 including a pair of spaced, horizontal guides turnable with said magazines about the vertical axis of said circular raceway and disposed, in at least one position of rest of said horizontal support, substantially parallel to the direction of movement of said transfer means in said tank appendage, and
  • said transfer means being fixed relative to said transfer means in such position of rest, said horizontal guides extending through the bottom ends of both said magazines so as to enable the lower frames in both said magazines to rest thereon during the metallising operation, said transfer means being operable to slide the frames on said horizontal guides from said one magazine to said other magazine during said period of rest thereof.
  • a vaccum metallisation tank a first magazine contained in said tank for holding the sheets to be treated, a second magazine contained in said tank for holding the treatedsheets, a plurality of frames each capable of holding at least one sheet to be treated receivable in said magazines, and means for transferring said frames from said first magazine to said second magazine
  • said magazines each comprising vertical guides between which said frames are disposed horizontally one above the other and enabling said frames to be displaced vertically, said guides comprising lateral members on which said frames are positioned at a small distance from each other, said members being capable of being displaced vertically by steps corresponding to the distance separating one member from the other.
  • said vertical guides comprise vertically movable members on which are provided said lateral members for supporting said frames, and means for moving said vertically movable members.
  • a device as defined in claim 6, including a horizontal circular roller track mounted within said tank, a ring turnably mounted on said track, and in which said two magazines are fixedly mounted on said ring on opposite sides of the vertical axis thereof, and means for rotating said ring to impart to the sheets in a magazine a rotational movement about said vertical axis during the metallising operation.
  • a vacuum metallisation tank a first magazine contained in said tank for holding the sheets to be treated, a second magazine contained in said tank for holding the treated sheets, a plurality of frames each capable of holding at least one sheet to be treated receivable in said magazines, and means for transferring said sheet holding frames from said first magazine to said second magazine
  • said transfer means comprising a horizontal shaft located adjacent to the lower ends of said magazines and in the mean plane between the latter, a transfer frame for holding said sheet holding frames during the metallising operations connected to said shaft antd adapted to be rocked by said shaft to move a sheet holding frame held thereby from the lower end of one magazine to the lower end of the other magazine, and means for rocking said shaft to rock said transfer frame between said magazines.
  • said transfer frame comprises automatic latching means constructed and arranged to be open on the upper side of the transfer frame and closed on the lower side thereof when said transfer frame is in a horizontal position to permit the loading thereon or the discharge therefrom of a sheet holding frame in such position, and to be closed on both sides of said transfer frame during the rocking thereof.
  • said latching means comprises slide members mounted on the two sides of the transfer frame that are parallel to said shaft and having one end projecting beyond said transfer frame, said slide members being provided with inwardly projecting fingers cooperable with a sheet holding frame and cam elements located on the projecting ends thereof, and cam means cooperable with said cam. elements to control the movements of said slide members.
  • a device as defined in claim 8 including metallisation means located in said tank below said transfer frame, and means in said tank for movably supporting said metallisation means and operable to maintain the latter spaced from the path of movement of said transfer frame.
  • porting means comprises vertical guide means, means slidably connecting said metallisation means to said vertical guide means, and means for vertically moving said connecting means on said guide means.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Treatment Of Fiber Materials (AREA)

Description

E. BRICHARD 3,321,092 VACUUM METALLISATION ARRANGEMENT FOR MATERIALS I IN SHEET FORM Filed April 21, 1964 4 Sheets-Sheet 1 FIG. 1.
. IN VEN TOR.
EDGARO. ERIC/MRO FIG. 3
' May 23, 1967 Filed April 21, 1964 E. BRICHARD VACUUM METALLISATION ARRANGEMENT FOR MATERIA IN SHEET FORM 4 Sheets-Sheet 2 EDGARD BRICHARD i ATTORNEY May 23, 1967 E. BRICHARD 3,321,092
VACUUM METALLISATION ARRANGEMENT FOR MATERIALS IN SHEET FORM 4 Sheets-Sheet 4 Filed April 21, 1964 FIG. 9
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IIIIIIIIIII FIG. IO
INVENTOR. EDGARD BRIG/MRO F TTOR/VEY United States Patent Office 3,321,092 Patented May 23, 1967 16 Claims. or 214-6) The present invention relates to an arrangement for the deposition of layers on materials in sheet form, more particularly sheets of glass, by a process involving volatilisation of materials in vacuo, which process is hereinafter called vacuum metallisation, although it also covers the formation of layers other than metal layers, such as layers of compounds of metallic or non-metallic elements with other elements.
The vacuum metallisation apparatus comprises a tank in which is arranged a sheet, of which the surface to be treated faces the metallisation members which are generally situated beneath the sheet. When the sheet is in position, the tank is closed, the vacuum is produced and the metallisation is then carried out; as soon as this is completed, the pressure of the tank is restored to atmospheric pressure and the apparatus is opened, either for turning over the sheet, if it is to be treated on both surfaces, or for replacing it by another, if only a single surface is to be metallised. The tank is then closed, the vacuum is again produced and the same cycle of operations is repeated for each surface to be treated.
This process is long and costly; it greatly reduces the utility of the apparatus.
The present invention considerably improves thi utility because it permits of carrying out the metalllsation of a predetermined number of sheets, on one or both surfaces, without it being necessary to open the tank and to produce the vacuum as many times as there are surfaces to be treated. The result is therefore an important saving as regards labour, motive force and time.
The metallisation arrangement according to the inver tion makes it possible for the surfaces of a predetermined quantity of sheets to be successively subjected to the treatment and comprises, to this end, within a vacuum treatment apparatus, a chamber for the sheets to be treated, a second chamber receiving the treated sheets and a mechanism for transferring the sheets from one chamber to the other. The chambers are designed for receiving holders, each one of which is capable of accommodating and holding one sheet, and advantageously comprise vertical guides between which the holders are disposed horizontally one above the other and can be displaced vertically.
in one embodiment of the invention, the vertical guides are formed by angle members which are mounted on bearers, and retain a stack of superimposed holders. These latter then comprise bevels at the front and rear edges, one bevel being on the upper face and the other on the lower face of each holder, so as to facilitate the displacement of the holders from one chamber to the other,
In other constructional forms, the guides comprise lateral members on which are positioned the holders at a small distance from one another. These members are capable of being displaced vertically by stages corresponding to the distance separating one member from the other and in a downward direction in the chamber receiving the sheets to be treated and in an upward direction in the chamber receiving the treated sheets. More particularly, the vertical guides are provided with elevating members mounted on bearers and provided with members on which the holders rest. These elevating members are preferably formed by vertical endless chains controlled by electric motors and provided with spaced lugs serving to support the holders. The bearers are advantageously fixed at the ends to a ring capable of turning about its axis on a horizontal circular roller track, so as to impart a rotational movement about a vertical axis to the sheets in known manner during the metallisation operation.
The mechanism for transferring the sheets from one chamber to the other comprises rails which are fixed to the bearers and on which the holders are positioned during the metallising operation and which can he slid from the chamber for the sheets to be treated to the chamber for receiving the treated sheets. Provided inside the vacuum vessel is a member actuated by an electric motor for displacing the holders from one chamber to the other. This member may be a raclctype pusher member driven by the pinion of the electric motor, if the apparatus is intended for treating only one surface of the sheet. On the other hand, if the apparatus is designed for successively treating the two surfaces of one sheet, the sheettransfer mechanism advantageously comprises a frame which is capable of rocking about a horizontal shaft disposed at the bottom ends of the magazines in the mean plane between these latter, of retaining a holder during the operation of metallising the sheet and of transferring it by a rocking movement from the first chamber to the second, where the other surface of the sheet can be metal lised during the following operation. Nevertheless, this rocking frame only permits of a single surface of each sheet being treated. To this end, the sheet is caused to enter the receiving magazine, by rocking of the frame, after a single one of its surfaces has been metallised, or the holders are loaded with two sheets, one of which will be metallised after the other after the rocking of the rrame.
The rocking frame comprises an automatic locking means which is open from the upper side and closed from the lower side of the frame, when this latter is in a horizontal position for the entry or exit of a holder, and is closed from two sides during the rocking of the frame. This locking means advantageously comprises slide members which are disposed on two sides of the frame parallel to the rocking axis and are provided with fingers facing towards the interior of the frame, and also a stop member which extends beyond the frame and is capable of coming into contact with a cam controlling the movements of the slide members. Instead of bevels, the holders then comprise notches through which the fingers of the slide memhers are able to pass from the upper side of the rocking frame when the latter is in a horizontal position. The rocking frame is also provided with an electromagnetical- 1y controlled latch which makes the frame fast with the bearers when it is in a horizontal position, and also a switch which automatically shuts off the supply to the motors actuating the elevating chains of the chambers during the rocking of the frame.
The difierent movable members are preferably actuated by individual motors disposed inside the treatment apparatus and their connecting wires extend through the wall of this latter by way of fluid-tight points.
The metallising members, when they are disposed at a short distance from the sheets to be treated, are advantageously fast with a mechanism capable of spacing them from the path of the rocking frame, such as vertical guides in which the support of these members, controlled for example by an endless screw, is able to slide.
The accompanying drawing illustrates by way of example several embodiments of the invention.
FIGURE 1 shows a vertical section of a metallisation apparatus comprising a sheet-feeding means according to the invention.
FIGURE 2 is a plan view on the line II-II of FIG- URE 1, the chambers being shown empty.
FIGURE 3 shows a holder for a sheet which is to be metallised.
FIGURES 4 and 5 are front and side elevations of another embodiment of the chambers containing the holders.
FIGURES 6 and 7 are front and side elevations of an embodiment comprising a rocking frame.
FIGURE 8 is a detailed plan view of this frame.
FIGURE 9 is a side view showing one edge of the frame.
FIGURE 10 represents an arrangement permitting the electrodes to be lowered.
The vacuum treatment apparatus shown in FIGURES 1 and 2 comprises a tank 1 formed by the wall 2, the base 3 and the cover 4, and contains in its lower part a metallisation member 5, for example an evaporator. The tank also comprises a horizontal circular roller track 6 disposed against the cylindrical wall, on which the device according to the invention is adapted to turn in known manner so that the sheet is able during its treatment to carry out one or more revolutions about the axis of the device, this being a condition which is essential for ensuring a uniform metallisation of this latter.
In a first embodiment, horizontal rails 7 are fixed on bearers 8, which are fast with a ring 9 turning on the roller track 6 by means of rollers 10. Vertical guides 11, mounted on the bearers 8 are arranged in such a way as to form a chamber or magazine 12, in which are stacked the horizontal holders 13 containing the sheets 14 which are to be treated (FIG. 1). The positioning of the frames is effected from above the tank, the cover 4 being raised. Guides 15 similar to the foregoing form a second magazine or chamber 16 and is adapted to receive the treated sheets. The holders 13 stacked in the chamber 12 rest on the rails 7. The vertical guides 11 and 15 can for example be formed by angle members, of which the wings are cut away at their lower part at 17 to a height sufi icient to permit the holders 13 to travel one by one on the rails 7. An extension 18 of the tank 1 contains a pusher member which is formed by a rack 19 capable of being displaced in guides 20 by the pinion 21 of a reversible low-speed motor 22. This pusher member enables the holder which is on the rails 7 at the bottom of the magazine 12 to slide beneath the magazine 16. A sheet ready to be treated on each surface is thus disposed beneath each chamber. After these two sheets have been treated on one surface, two holders 13 are successively pushed on to the rails 7, so as to have once again a sheet for treatment under each of the chambers. The operation is repeated in this way until the holders stacked in the chamber 12 are exhausted. The chamber 16 is then emptied from the top of the tank, after having removed the cover 4.
In order to facilitate the introduction of the holders 13 beneath those which are already stacked in the magazine 16, it isadvantageous to provide their front and rear edges with bevels 23 and 24. The rotation of the arrangement is assured by a motor 25 (FIG. 2), which drives the ring gear 9 by means of a speed reduction gear 26. The ring gear 9 comprises a notch 27 which is engaged by a magnetic latch 28 in order to ensure the locking of the arrangement during the transfer of a holder from one chamber to the other. The leading of the supply cables of the different electric motors into the tank is obviously effected through fluid-tight joints 29.
In another embodiment, the vertical guides of the magazines 12 and 16 are replaced by endless chains 31) (FIGS. 4 and 5), which carry projections or lugs 31 and are stretched over toothed wheels 32 fixed to shafts 33 supported by bearings 34 fast with the frame 35. Instead of being stacked one upon the other, the holders are placed in separated relation on the lugs 31. The lowering of the holders into the supply chamber 12 is effected by means of a motor 36, which drives a shaft 37 (FIG. 5) comprising two endless screws or worms 38. One of the latter has a right-hand thread and the other has a left-hand thread,
4 and they mesh with the toothed wheels 39 fast with the shafts 33. The raising of the holders in the receiver magazine 16 is effected by means of a similar device comprising a motor 40 (FIG. 4) driving the wheels 43 by means of the shaft 41 and the worms 42.
An embodiment which enables two surfaces of each sheet to be treated is shown in FIGURES 6 to 9. It comprises beneath the bearers 8, which carry on the one hand, the bearing supports 34 of the shafts 33 with the chain wheels 32 and, on the other hand, the bearing supports 44 which carry a shaft 45 to which is keyed a rocking frame 46 which, in the horizontal position, frames the quadrilateral formed by the four chains of one or other chamber. This frame 46, adapted to receive the holders 13, can be rocked from one chamber to the other under the action of a reversible motor 47 with a reduction gear, by means of the chain 48 and the toothed wheel 49 keyed on the shaft 45 (FIG. 7).
On one of the faces of its front and rear edges, the frame 46 comprises slide members 50 (FIG. 8) and on the opposite forces of its front and rear edges such frame is provided with slide members 50'. These slide members 50, 50', formed of flat iron plates slotted at 51, are guided and retained by screws $2 and comprise fingers 53 and 53', respectively, extending into the interior of the frame. The end 54 of each of the slide members 50 extends beyond the frame on one side, while the opposite end 54' of each slide member 541 extends beyond it on the other side. Fixed on each of these ends 54 or 54 is a stop 55, formed for example by a roller.
In this embodiment, the holders 13 comprise notches 56, replacing the bevels 23 and 24 shown in FIGURE 3. When the frame and the slide members occupy the position shown in FIGURE 8, one holder can be deposited by the chains on the fingers 53, the fingers 53 passing through the notches 56. Guide means 57 (FIGS. 7 and 9) fast with the bearers 8 are disposed beneath the chambers 12 and 16 and are positioned in such a Way that the rollers 55 are able to be engaged therein with the approach of a frame from a horizontal position and to drive the slide members of the upper face of the frame so as to bring the fingers 53 alongside or facing the position of the notches 56, according to Whether the frame is moving away from or closer to the carriage 12, and to bring the fingers 53' opposite or alongside the notches 56, according to whether the frame is moving closer to or away from the chamber 16. It is thus understood that when the frame 46 is in the horizontal position, that is to say, both beneath the chamber 12 and the chamber 16, the upper fingers are facing the notches 56, thus permitting the positioning or lifting of the holder 13 carrymg the sheet, while during the rotation of the frame 46, all the fingers are to one side of the notches 56 and prevent the descent of the holder.
In order to prevent the holder 13 from being displaced laterally in the frame 46, it is expedient to secure stops 58 on the internal edges of said frame.
In order to avoid the motor being prematurely set in operation for lowering the sheets in the chamber 12 when the rocking frame is not beneath the said chamber, it is advantageous to secure a switch 59 (FIG. 7) beneath the bearer 8, which switch breaks the circuit of this motor, independently of the normal external control means, as soon as the frame moves away from the chamber 12, this switch only being engaged when the frame 46 is in a horizontal position beneath the said chamber.
In addition, an electromagnetic locking device shown diagrammatically at 60 (FIG. 7) makes the rocking frame fast with the bearers 8, while this frame is underbeneath the chamber 12, and thus during the introduction of a holder into the frame and during the metallising operation.
The apparatus as described with a rocking frame, although provided for metallising both surfaces of a sheet, also permits of only a single surface being metallised.
d To this end, each holder is loaded with two sheets, which will be successively metallised on one of their surfaces.
FIGURE shows a metallising apparatus comprising discharge electrodes 61 disposed underneath the sheets to be treated. In order to prevent the electrodes from interfering with the movement of the rocking frame, the said electrodes are fixed to supports 62 sliding between guides 63 fast with the wall 2 of the tank and driven by endless screws or worms 64 coupled to reversible motors 65 by means of a reduction gear 66.
It is obvious that the rocking frame can also serve for the treatment of a single surface of each sheet; it is sufiicient in this case for two sheets to be successively displaced by the frame between each treatment operation.
Obviously, the invention is not limited to the embodiments which have been described and illustrated by way of example, and it would not constitute any departure from the scope by incorporating modifications.
I claim:
1. In a device for metallising under vacuum the surfaces of materials in sheet form, a vacuum metallisation tank, a horizontal circular raceway mounted within said tank, metallisation means located in said tank below said raceway, a horizontal support located in said tank above said raceway, means mounting said horizontal support for turning movement on said circular raceway, a plurality of frames each capable of holding at least one sheet to be treated, two magazines wholly contained in said tank and arranged alongside each other on said horizontal support for turning movement with the latter about the vertical axis of said circular raceway, and each adapted to hold a plurality of said frames in vertically superposed relation, each of said magazines including means for enabling vertical movement of said frames therein in horizontally disposed position, means operable to enable the placement of frames loaded with the sheets to be treated in the upper end of one of the magazines contained in said tank, means for intermittently transferring frames moving downwardly in a step-by-step fashion in said one magazine from the bottom of the latter to the bottom of the other magazine, and means for causing the frames in said other magazine to rise intermittently toward the top thereof during the transfer of the framesfrom said onemagazine to the other.
2. Avdevice as defined in claim 1, in which said tank has an offset appendage located outside the zone of action of said metallisation means and adjacent to the bottom end of said one magazine, said transfer means being located in said tank appendage.
3. A device as defined in claim'2, including a pair of spaced, horizontal guides turnable with said magazines about the vertical axis of said circular raceway and disposed, in at least one position of rest of said horizontal support, substantially parallel to the direction of movement of said transfer means in said tank appendage, and
being fixed relative to said transfer means in such position of rest, said horizontal guides extending through the bottom ends of both said magazines so as to enable the lower frames in both said magazines to rest thereon during the metallising operation, said transfer means being operable to slide the frames on said horizontal guides from said one magazine to said other magazine during said period of rest thereof.
4. In a device for successively metallising under vacuum the surfaces of materials in sheet form, a vaccum metallisation tank, a first magazine contained in said tank for holding the sheets to be treated, a second magazine contained in said tank for holding the treatedsheets, a plurality of frames each capable of holding at least one sheet to be treated receivable in said magazines, and means for transferring said frames from said first magazine to said second magazine, said magazines each comprising vertical guides between which said frames are disposed horizontally one above the other and enabling said frames to be displaced vertically, said guides comprising lateral members on which said frames are positioned at a small distance from each other, said members being capable of being displaced vertically by steps corresponding to the distance separating one member from the other.
5. A device as defined in claim 4, in which said vertical guides comprise vertically movable members on which are provided said lateral members for supporting said frames, and means for moving said vertically movable members.
6. A device as defined in claim 5, in which said vertically movable members are vertically disposed endless chains, in which said lateral members are spaced lugs connected to said chains, and in which said moving means comprises an electric motor and means drivingly connecting said endless chains to said motor.
7. A device as defined in claim 6, including a horizontal circular roller track mounted within said tank, a ring turnably mounted on said track, and in which said two magazines are fixedly mounted on said ring on opposite sides of the vertical axis thereof, and means for rotating said ring to impart to the sheets in a magazine a rotational movement about said vertical axis during the metallising operation.
8. In a device for successively metallising under vacuum the surfaces of material in sheet form, a vacuum metallisation tank, a first magazine contained in said tank for holding the sheets to be treated, a second magazine contained in said tank for holding the treated sheets, a plurality of frames each capable of holding at least one sheet to be treated receivable in said magazines, and means for transferring said sheet holding frames from said first magazine to said second magazine, said transfer means comprising a horizontal shaft located adjacent to the lower ends of said magazines and in the mean plane between the latter, a transfer frame for holding said sheet holding frames during the metallising operations connected to said shaft antd adapted to be rocked by said shaft to move a sheet holding frame held thereby from the lower end of one magazine to the lower end of the other magazine, and means for rocking said shaft to rock said transfer frame between said magazines.
9. A device as defined in claim 8, in which said transfer frame comprises automatic latching means constructed and arranged to be open on the upper side of the transfer frame and closed on the lower side thereof when said transfer frame is in a horizontal position to permit the loading thereon or the discharge therefrom of a sheet holding frame in such position, and to be closed on both sides of said transfer frame during the rocking thereof.
10. A device as defined in claim 9, in which said latching means comprises slide members mounted on the two sides of the transfer frame that are parallel to said shaft and having one end projecting beyond said transfer frame, said slide members being provided with inwardly projecting fingers cooperable with a sheet holding frame and cam elements located on the projecting ends thereof, and cam means cooperable with said cam. elements to control the movements of said slide members.
11. A device as defined in claim 10, in which said sheet holding frames are each provided with notches through which the fingers of slide members on the upper side of the transfer frame can pass when the latter is in a horizontal position.
12. A device as defined in claim 8, in which said transfer frame has associated therewith an electro-magnetic control latch means constructed and arranged to secure said transfer frame against movement while it is in a horizontal position during the sheet holding frame loading and metallising operations.
13. A device as defined in claim 8, in which said magazines comprise means for moving said sheet holding frames, in horizontally disposed position, vertically in said magazines, and including means for rendering said moving means inoperative to vertically move said tank, means drivingly connecting each motor to said frame moving means of an associated magazine, and electrical connecting cables for said motors extending through a fluid-tight joint in the wall of said tank.
' 15. A device as defined in claim 8, including metallisation means located in said tank below said transfer frame, and means in said tank for movably supporting said metallisation means and operable to maintain the latter spaced from the path of movement of said transfer frame.
porting means comprises vertical guide means, means slidably connecting said metallisation means to said vertical guide means, and means for vertically moving said connecting means on said guide means.
References Cited by the Examiner UNITED STATES PATENTS 2,602,3 86 7/1952 Brigham et al. 9526 2,745,767 5/ 1956 Auwarter l1849 X 2,749,120 6/1956 Mallory 2146 X 2,940,327 6/1960 Gartner 2146 X 3,104,180 9/1963 Voulton-Baudin 118-49 16. A device as defined in claim 15, in which said sup- 15 MARVIN CHAMPION Prlmary Examme" Wellnitz 1 18-236 X

Claims (1)

  1. 4. IN A DEVICE FOR SUCCESSIVELY METALLISING UNDER VACUUM THE SURFACES OF MATERIALS IN SHEET FORM, A VACUUM METALLISATION TANK, A FIRST MAGAZINE CONTAINED IN SAID TANK FOR HOLDING THE SHEETS TO BE TREATED, A SECOND MAGAZINE CONTAINED IN SAID TANK FOR HOLDING THE TREATED SHEETS, A PLURALITY OF FRAMES EACH CAPABLE OF HOLDING AT LEAST ONE SHEET TO BE TREATED RECEIVABLE IN SAID MAGAZINES, AND MEANS FOR TRANSFERRING SAID FRAMES FROM SAID FIRST MAGAZINE TO SAID SECOND MAGAZINE, SAID MAGAZINES EACH COMPRISING VERTICAL GUIDES BETWEEN WHICH SAID FRAMES ARE DISPOSED HORIZONTALLY ONE ABOVE THE OTHER AND ENABLING SAID FRAMES TO BE DISPLACED VERTICALLY, SAID GUIDES COMPRISING LATERAL MEMBERS ON WHICH SAID FRAMES ARE POSITIONED AT A SMALL DISTANCE FROM EACH OTHER, SAID MEMBERS BEING CAPABLE OF BEING DISPLACED VERTICALLY BY STEPS CORRESPONDING TO THE DISTANCE SEPARATING ONE MEMBER FROM THE OTHER.
US361454A 1963-05-09 1964-04-21 Vacuum metallisation arrangement for materials in sheet form Expired - Lifetime US3321092A (en)

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US3516386A (en) * 1965-07-16 1970-06-23 Boeing Co Thin film deposition fixture
US3721210A (en) * 1971-04-19 1973-03-20 Texas Instruments Inc Low volume deposition reactor
US4113082A (en) * 1976-05-17 1978-09-12 Airco, Inc. Apparatus and method for storing and transporting substrates in a batch-type vacuum process

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CA953905A (en) * 1970-02-05 1974-09-03 Richard H. Edwards Multi-layer coating apparatus, system and method
CN109957778A (en) * 2017-12-14 2019-07-02 湘潭宏大真空技术股份有限公司 Transmission rotating device for double-sided glass plated film
CN116497321B (en) * 2023-03-24 2023-10-13 苏州星蓝纳米技术有限公司 Feeding conveying trolley convenient for cutter coating

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US2333285A (en) * 1941-07-16 1943-11-02 Harry A Wellnitz Block-mold pallet cleaning machine
US2602386A (en) * 1949-07-28 1952-07-08 Roger L Brigham Cut film adapter for serial photography for photographic cameras
US2745767A (en) * 1951-07-23 1956-05-15 Alois Vogt Dr Process and apparatus for treating by vapour deposition a plurality of articles introduced at several levels, while maintaining the same vacuum
US2749120A (en) * 1955-02-01 1956-06-05 Parker Stamp Works Inc Apparatus for stacking plates
US2940327A (en) * 1954-04-15 1960-06-14 Sylvania Electric Prod Traying device
US3104180A (en) * 1959-07-02 1963-09-17 Bernard Marie Maurice Gilbert Apparatus for sequentially vapor metallizing a number of articles in a bell unit

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Publication number Priority date Publication date Assignee Title
US2333285A (en) * 1941-07-16 1943-11-02 Harry A Wellnitz Block-mold pallet cleaning machine
US2602386A (en) * 1949-07-28 1952-07-08 Roger L Brigham Cut film adapter for serial photography for photographic cameras
US2745767A (en) * 1951-07-23 1956-05-15 Alois Vogt Dr Process and apparatus for treating by vapour deposition a plurality of articles introduced at several levels, while maintaining the same vacuum
US2940327A (en) * 1954-04-15 1960-06-14 Sylvania Electric Prod Traying device
US2749120A (en) * 1955-02-01 1956-06-05 Parker Stamp Works Inc Apparatus for stacking plates
US3104180A (en) * 1959-07-02 1963-09-17 Bernard Marie Maurice Gilbert Apparatus for sequentially vapor metallizing a number of articles in a bell unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3516386A (en) * 1965-07-16 1970-06-23 Boeing Co Thin film deposition fixture
US3721210A (en) * 1971-04-19 1973-03-20 Texas Instruments Inc Low volume deposition reactor
US4113082A (en) * 1976-05-17 1978-09-12 Airco, Inc. Apparatus and method for storing and transporting substrates in a batch-type vacuum process

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LU43713A1 (en) 1964-11-09
DE1521258A1 (en) 1969-07-24
GB1061484A (en) 1967-03-15
DE1521258B2 (en) 1972-03-16

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