GB1049327A - Improvements in or relating to electron microscopes - Google Patents
Improvements in or relating to electron microscopesInfo
- Publication number
- GB1049327A GB1049327A GB26756/63A GB2675663A GB1049327A GB 1049327 A GB1049327 A GB 1049327A GB 26756/63 A GB26756/63 A GB 26756/63A GB 2675663 A GB2675663 A GB 2675663A GB 1049327 A GB1049327 A GB 1049327A
- Authority
- GB
- United Kingdom
- Prior art keywords
- members
- july
- cone
- column
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 abstract 3
- 239000000428 dust Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000005294 ferromagnetic effect Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US207680A US3150256A (en) | 1962-07-05 | 1962-07-05 | Column for electron microscopes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1049327A true GB1049327A (en) | 1966-11-23 |
Family
ID=22771559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB26756/63A Expired GB1049327A (en) | 1962-07-05 | 1963-07-05 | Improvements in or relating to electron microscopes |
Country Status (7)
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3299308A (en) * | 1963-07-19 | 1967-01-17 | Temescal Metallurgical Corp | Electron beam traverse of narrow aperture in barrier separating regions of differentpressure |
| US3345529A (en) * | 1966-08-29 | 1967-10-03 | Ibm | Electron beam column with demountable flux-generating assembly and beam-forming elements |
| DE3328172A1 (de) * | 1983-08-04 | 1985-02-14 | Leybold-Heraeus GmbH, 5000 Köln | Elektronenstrahlkanone |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE904096C (de) * | 1940-10-09 | 1954-02-15 | Siemens Ag | Korpuskularstrahlmikroskop |
| DE926266C (de) * | 1948-10-02 | 1955-04-14 | Manfred Von Ardenne | Elektronenmikroskop mit quer zur Strahlrichtung auswechselbarem Polschuheinsatzkoerper |
| DE903017C (de) * | 1951-01-31 | 1954-02-01 | Sueddeutsche Lab G M B H | Herstellung kleiner Kugeln aus hochschmelzbaren Materialien |
| CH332306A (de) * | 1955-05-10 | 1958-08-31 | Ardenne Manfred Von | Polarisationsladungsfreie Blende für Elektronen- und Ionengeräte |
-
0
- NL NL294725D patent/NL294725A/xx unknown
- BE BE634472D patent/BE634472A/xx unknown
-
1962
- 1962-07-05 US US207680A patent/US3150256A/en not_active Expired - Lifetime
-
1963
- 1963-07-02 DE DE19631464352 patent/DE1464352B2/de active Pending
- 1963-07-02 SE SE7350/63A patent/SE320444B/xx unknown
- 1963-07-03 CH CH822963A patent/CH413146A/de unknown
- 1963-07-05 GB GB26756/63A patent/GB1049327A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1464352A1 (de) | 1969-03-13 |
| NL294725A (US20110009641A1-20110113-C00256.png) | |
| US3150256A (en) | 1964-09-22 |
| CH413146A (de) | 1966-05-15 |
| DE1464352B2 (de) | 1972-04-06 |
| SE320444B (US20110009641A1-20110113-C00256.png) | 1970-02-09 |
| BE634472A (US20110009641A1-20110113-C00256.png) | 1964-01-03 |
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