GB1049059A - Arrangement for accurately setting the position of an object by displacement in a given direction - Google Patents

Arrangement for accurately setting the position of an object by displacement in a given direction

Info

Publication number
GB1049059A
GB1049059A GB51107/64A GB5110764A GB1049059A GB 1049059 A GB1049059 A GB 1049059A GB 51107/64 A GB51107/64 A GB 51107/64A GB 5110764 A GB5110764 A GB 5110764A GB 1049059 A GB1049059 A GB 1049059A
Authority
GB
United Kingdom
Prior art keywords
strips
given direction
rigidly connected
rigid body
dec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51107/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
C A M E C A CIE D APPLIC MECAN
Original Assignee
C A M E C A CIE D APPLIC MECAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by C A M E C A CIE D APPLIC MECAN filed Critical C A M E C A CIE D APPLIC MECAN
Publication of GB1049059A publication Critical patent/GB1049059A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05G—CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
    • G05G23/00—Means for ensuring the correct positioning of parts of control mechanisms, e.g. for taking-up play
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05G—CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
    • G05G2700/00—Control mechanisms or elements therefor applying a mechanical movement
    • G05G2700/02—Means for regulating or adjusting control mechanisms, e.g. devices for automatic adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Springs (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

1,049,059. Microscopes. COMPAGNIE D'APPLICATIONS MECANIQUES A L'ELECTRONIQUEAU CINEMA ET A LATOMISTIQUE. Dec. 15, 1964 [Dec. 17, 1963], No.51107/64. Heading G2J. [Also in Division H1] A mechanism for providing limited displacements of a stage member 304 in a given direction, e.g. for the examination of a small object by means of an electron beam, comprises first and second coplanar and parallel pairs of elastic strips 16,17 extending in respective planes normal to the given direction, the respective intermediate portions of the first pair of strips being rigidly connected to a rigid body 303 which is rigidly connected by further parallel elastic strips 306 directed along the given direction to a rigid support 301 and to the member 304, the ends of the first and second elastic strips being connected to the rigid support 301 and the member 304, the rigid body 303 being pivotable about the line of intersection of the planes containing the further strips and containing the first pair of strips by actuation of screw knob 7 against an arm 302 rigidly connected to the rigid body 303. The stage member may also be displaceable in a second and a third direction by screw adjustment, all directions being mutually perpendicular.
GB51107/64A 1963-12-17 1964-12-15 Arrangement for accurately setting the position of an object by displacement in a given direction Expired GB1049059A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR957394A FR1387950A (en) 1963-12-17 1963-12-17 Device for precise adjustment of the position of an object by movement in a determined direction

Publications (1)

Publication Number Publication Date
GB1049059A true GB1049059A (en) 1966-11-23

Family

ID=8818991

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51107/64A Expired GB1049059A (en) 1963-12-17 1964-12-15 Arrangement for accurately setting the position of an object by displacement in a given direction

Country Status (4)

Country Link
US (1) US3318593A (en)
DE (1) DE1447344B2 (en)
FR (1) FR1387950A (en)
GB (1) GB1049059A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8310011D0 (en) * 1983-04-13 1983-05-18 Vg Instr Ltd Scientific instruments
EP0144603A3 (en) * 1983-11-10 1986-06-25 Northern Telecom Limited Apparatus for aligning an article relative to a datum
US4893914A (en) * 1988-10-12 1990-01-16 The Micromanipulator Company, Inc. Test station
US4958794A (en) * 1989-02-01 1990-09-25 The Boeing Company Dual purpose alignment bracket for use with laser or optical scope
US5152488A (en) * 1989-05-16 1992-10-06 David Richardson Microtranslator
US5374556A (en) * 1992-07-23 1994-12-20 Cell Robotics, Inc. Flexure structure for stage positioning
US6453108B1 (en) 2000-09-30 2002-09-17 Cidra Corporation Athermal bragg grating package with course and fine mechanical tuning
US6594081B2 (en) 2000-12-29 2003-07-15 Cidra Corporation Actuator mechanism for tuning an optical device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046006A (en) * 1960-04-12 1962-07-24 Kulicke & Soffa Mfg Co Micropositioner

Also Published As

Publication number Publication date
DE1447344A1 (en) 1969-03-27
DE1447344B2 (en) 1971-01-28
US3318593A (en) 1967-05-09
FR1387950A (en) 1965-02-05

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