GB1012246A - Vacuum measuring cell for an ionisation gauge - Google Patents

Vacuum measuring cell for an ionisation gauge

Info

Publication number
GB1012246A
GB1012246A GB2717963A GB2717963A GB1012246A GB 1012246 A GB1012246 A GB 1012246A GB 2717963 A GB2717963 A GB 2717963A GB 2717963 A GB2717963 A GB 2717963A GB 1012246 A GB1012246 A GB 1012246A
Authority
GB
United Kingdom
Prior art keywords
compartment
capillary
measuring cell
wall
july
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2717963A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MANFRED MATTHIAS DUNKEL
Original Assignee
MANFRED MATTHIAS DUNKEL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MANFRED MATTHIAS DUNKEL filed Critical MANFRED MATTHIAS DUNKEL
Publication of GB1012246A publication Critical patent/GB1012246A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

1,012,246. Ionization manometers. M. M. DUNKEL [trading as E. LEYBOLD'S NACHFOLGER]. July 9, 1963 [July 9, 1962], No. 27179/63. Heading H1D. A vacuum measuring cell for an ionization gauge comprises a primary electron source 3 located in a first compartment " A " and an ion catcher 13 located in a second compartment " B " which is separated from the first compartment by a parting wall 5 traversed by a capillary 1 through which an electron beam emitted by the source 3 can pass. The thermionic filament 3 is provided with a focusing electrode 4. The wall 5 and capillary 1 are metallic and act as an accelerating electrode. Alternatively a metallic capillary may be let into a glass wall (Fig. 3, not shown). The compartment " A " is connected through a branch 12 to a vacuum pump, or a getter is provided in the compartment. An alternative arrangement (Fig. 2, not shown) utilizes a cold cathode, and gas desorbing surfaces are provided in compartment " A." In both arrangements the capillary, prevents contact of the electron source by the gas whose pressure is to.be measured.
GB2717963A 1962-07-09 1963-07-09 Vacuum measuring cell for an ionisation gauge Expired GB1012246A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0042419 1962-07-09

Publications (1)

Publication Number Publication Date
GB1012246A true GB1012246A (en) 1965-12-08

Family

ID=7269868

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2717963A Expired GB1012246A (en) 1962-07-09 1963-07-09 Vacuum measuring cell for an ionisation gauge

Country Status (2)

Country Link
DE (1) DE1251554B (en)
GB (1) GB1012246A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3465240A (en) * 1966-09-14 1969-09-02 Leybold Heraeuse Verwaltung Gm Measuring tube for an ionization vacuum gauge
EP0396843A2 (en) * 1989-05-08 1990-11-14 Leybold Inficon Inc. Gas partial pressure sensor for vacuum chamber

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2945925A1 (en) * 1979-11-14 1981-05-27 Leybold-Heraeus GmbH, 5000 Köln Ionisation manometer for vacuum measurement - has anode with window and grid wires for passage of electrons and screened cathode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3465240A (en) * 1966-09-14 1969-09-02 Leybold Heraeuse Verwaltung Gm Measuring tube for an ionization vacuum gauge
EP0396843A2 (en) * 1989-05-08 1990-11-14 Leybold Inficon Inc. Gas partial pressure sensor for vacuum chamber
EP0396843A3 (en) * 1989-05-08 1991-08-07 Leybold Inficon Inc. Gas partial pressure sensor for vacuum chamber

Also Published As

Publication number Publication date
DE1251554B (en)

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