FR3137726B1 - Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor - Google Patents

Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor Download PDF

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Publication number
FR3137726B1
FR3137726B1 FR2206931A FR2206931A FR3137726B1 FR 3137726 B1 FR3137726 B1 FR 3137726B1 FR 2206931 A FR2206931 A FR 2206931A FR 2206931 A FR2206931 A FR 2206931A FR 3137726 B1 FR3137726 B1 FR 3137726B1
Authority
FR
France
Prior art keywords
rotor
vacuum pump
manufacturing
methods
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2206931A
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English (en)
Other versions
FR3137726A1 (fr
Inventor
Nicolas Varennes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2206931A priority Critical patent/FR3137726B1/fr
Priority to PCT/EP2023/060724 priority patent/WO2024008348A1/fr
Priority to TW112116561A priority patent/TW202417744A/zh
Publication of FR3137726A1 publication Critical patent/FR3137726A1/fr
Application granted granted Critical
Publication of FR3137726B1 publication Critical patent/FR3137726B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/25—Direct deposition of metal particles, e.g. direct metal deposition [DMD] or laser engineered net shaping [LENS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20—Direct sintering or melting
    • B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/009—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of turbine components other than turbine blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/06—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of threaded articles, e.g. nuts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B22F7/062—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools involving the connection or repairing of preformed parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0433—Nickel- or cobalt-based alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/30—Manufacture with deposition of material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Composite Materials (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Pompe à vide (1) turbomoléculaire comportant un stator (2) et un rotor (3) configuré pour tourner dans le stator (2), le rotor (3) comportant un moyeu (9) et au moins un étage de pales (10a-10h) comprenant des pales (11a, 11b) réparties régulièrement en périphérie du moyeu (9), caractérisée en ce que les pales (11a) d’au moins un étage de pales (10a) du rotor (3) sont creuses. Figure 1
FR2206931A 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor Active FR3137726B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2206931A FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor
PCT/EP2023/060724 WO2024008348A1 (fr) 2022-07-07 2023-04-25 Pompe à vide turbomoléculaire et procédés de fabrication d'un rotor
TW112116561A TW202417744A (zh) 2022-07-07 2023-05-04 渦輪分子真空泵及用於製造轉子的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2206931A FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor
FR2206931 2022-07-07

Publications (2)

Publication Number Publication Date
FR3137726A1 FR3137726A1 (fr) 2024-01-12
FR3137726B1 true FR3137726B1 (fr) 2024-06-21

Family

ID=83188950

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2206931A Active FR3137726B1 (fr) 2022-07-07 2022-07-07 Pompe à vide turbomoléculaire et procédés de fabrication d’un rotor

Country Status (3)

Country Link
FR (1) FR3137726B1 (fr)
TW (1) TW202417744A (fr)
WO (1) WO2024008348A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3085964B1 (fr) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production d'un composant de pompe à vide par fabrication additive métallique
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer

Also Published As

Publication number Publication date
TW202417744A (zh) 2024-05-01
FR3137726A1 (fr) 2024-01-12
WO2024008348A1 (fr) 2024-01-11

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