FR3061705B1 - Composant micromecanique et son procede de fabrication - Google Patents

Composant micromecanique et son procede de fabrication Download PDF

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Publication number
FR3061705B1
FR3061705B1 FR1850160A FR1850160A FR3061705B1 FR 3061705 B1 FR3061705 B1 FR 3061705B1 FR 1850160 A FR1850160 A FR 1850160A FR 1850160 A FR1850160 A FR 1850160A FR 3061705 B1 FR3061705 B1 FR 3061705B1
Authority
FR
France
Prior art keywords
support
axis
oscillating movement
relative
micromechanical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1850160A
Other languages
English (en)
Other versions
FR3061705A1 (fr
Inventor
Philip Kaupmann
Stefan Pinter
Helmut Grutzeck
Jochen Franz
Joerg Muchow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR3061705A1 publication Critical patent/FR3061705A1/fr
Application granted granted Critical
Publication of FR3061705B1 publication Critical patent/FR3061705B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0048—Constitution or structural means for controlling angular deflection not provided for in groups B81B3/0043 - B81B3/0045
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/056—Rotation in a plane parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Gyroscopes (AREA)

Abstract

Composant micromécanique comportant : un support (10), un élément mobile (12) relié au support (10) par un ressort (14a, 14b, 14c) et un actionneur (18) pour exciter l'élément mobile (12) suivant un premier mouvement oscillant (Φ1) par rapport au support (10) autour d'un premier axe de rotation (20) et en même temps un second mouvement oscillant (Φ2) autour d'un second axe de rotation (22) incliné par rapport au premier axe (20). L'élément mobile (12) est mobile sur le support (10) par l'intermédiaire d'un ressort (14a, 14b, 14c) de façon à être mis en mouvement par rapport au support (10) autour d'un axe géométrique de rotation (24) perpendiculaire aux axes (20, 22) par le couple (M2) résultant de l'excitation de l'élément mobile (12) par le premier mouvement oscillant (Φ1) par rapport au second mouvement oscillant (Φ2).
FR1850160A 2017-01-11 2018-01-09 Composant micromecanique et son procede de fabrication Active FR3061705B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102017200352.9A DE102017200352A1 (de) 2017-01-11 2017-01-11 Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Anregen einer Bewegung eines verstellbaren Teils um eine Rotationsachse
DE102017200352.9 2017-01-11

Publications (2)

Publication Number Publication Date
FR3061705A1 FR3061705A1 (fr) 2018-07-13
FR3061705B1 true FR3061705B1 (fr) 2020-03-27

Family

ID=60382218

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1850160A Active FR3061705B1 (fr) 2017-01-11 2018-01-09 Composant micromecanique et son procede de fabrication

Country Status (7)

Country Link
US (1) US11066295B2 (fr)
JP (1) JP6812575B2 (fr)
CN (1) CN110167871B (fr)
DE (1) DE102017200352A1 (fr)
FR (1) FR3061705B1 (fr)
TW (1) TW201831395A (fr)
WO (1) WO2018130326A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020204961A1 (de) * 2020-04-20 2021-10-21 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung einer Mikroelektronikvorrichtung
DE102021116165B3 (de) * 2021-06-22 2022-10-20 OQmented GmbH Lissajous-mikroscanner mit zentraler spiegelaufhängung und verfahren zu seiner herstellung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7542188B2 (en) * 2004-01-20 2009-06-02 National University Of Singapore Optical scanning using vibratory diffraction gratings
JP4980990B2 (ja) * 2008-06-25 2012-07-18 パナソニック株式会社 可動構造体及びそれを用いたマイクロミラー素子
DE102009026507A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102011006598B4 (de) * 2011-03-31 2022-07-21 Robert Bosch Gmbh Bauteil mit einem verstellbaren Teil und Verfahren zum Betreiben eines Bauteils mit einem verstellbaren Teil
DE102011104556B4 (de) * 2011-06-15 2021-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Ablenkvorrichtung für einen Scanner mit Lissajous-Abtastung
JP5920706B2 (ja) * 2012-02-29 2016-05-18 国立大学法人 香川大学 Ｍｅｍｓ光学部品
DE102012219591A1 (de) 2012-10-25 2014-04-30 Robert Bosch Gmbh Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils
DE102012219660B4 (de) * 2012-10-26 2023-10-12 Robert Bosch Gmbh Mechanisches Bauteil
JP2015227899A (ja) * 2013-01-11 2015-12-17 浜松ホトニクス株式会社 ミラー駆動装置
WO2014173437A1 (fr) * 2013-04-24 2014-10-30 Robert Bosch Gmbh Composant micromécanique et procédé de fabrication d'un composant micromécanique
JP6496304B2 (ja) * 2014-03-31 2019-04-03 学校法人早稲田大学 マイクロ駆動装置及びそれを用いたマイクロデバイス
DE102014211027A1 (de) 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
JP6560897B2 (ja) 2015-05-20 2019-08-14 スタンレー電気株式会社 圧電膜の積層体とその製造方法及び光スキャナ

Also Published As

Publication number Publication date
JP2020504028A (ja) 2020-02-06
WO2018130326A1 (fr) 2018-07-19
US11066295B2 (en) 2021-07-20
TW201831395A (zh) 2018-09-01
CN110167871B (zh) 2023-02-28
CN110167871A (zh) 2019-08-23
DE102017200352A1 (de) 2018-07-12
US20190359478A1 (en) 2019-11-28
JP6812575B2 (ja) 2021-01-13
FR3061705A1 (fr) 2018-07-13

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