FR3027445B1 - Appareil et procede de support, appareil de mesure, et procede de fabrication d'article - Google Patents

Appareil et procede de support, appareil de mesure, et procede de fabrication d'article Download PDF

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Publication number
FR3027445B1
FR3027445B1 FR1559897A FR1559897A FR3027445B1 FR 3027445 B1 FR3027445 B1 FR 3027445B1 FR 1559897 A FR1559897 A FR 1559897A FR 1559897 A FR1559897 A FR 1559897A FR 3027445 B1 FR3027445 B1 FR 3027445B1
Authority
FR
France
Prior art keywords
article manufacturing
measuring apparatus
support apparatus
support
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1559897A
Other languages
English (en)
French (fr)
Other versions
FR3027445A1 (enrdf_load_stackoverflow
Inventor
Tetsuji Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of FR3027445A1 publication Critical patent/FR3027445A1/fr
Application granted granted Critical
Publication of FR3027445B1 publication Critical patent/FR3027445B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Telescopes (AREA)
FR1559897A 2014-10-17 2015-10-16 Appareil et procede de support, appareil de mesure, et procede de fabrication d'article Expired - Fee Related FR3027445B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014212884 2014-10-17
JP2014212884A JP6467187B2 (ja) 2014-10-17 2014-10-17 支持装置および方法、計測装置、並びに物品の製造方法

Publications (2)

Publication Number Publication Date
FR3027445A1 FR3027445A1 (enrdf_load_stackoverflow) 2016-04-22
FR3027445B1 true FR3027445B1 (fr) 2018-09-21

Family

ID=55642158

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1559897A Expired - Fee Related FR3027445B1 (fr) 2014-10-17 2015-10-16 Appareil et procede de support, appareil de mesure, et procede de fabrication d'article

Country Status (2)

Country Link
JP (1) JP6467187B2 (enrdf_load_stackoverflow)
FR (1) FR3027445B1 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10247907B2 (en) * 2016-05-25 2019-04-02 Northrop Grumman Systems Corporation Mirror mounting assembly
JP7093221B2 (ja) * 2018-04-26 2022-06-29 キヤノン株式会社 光学装置の調整方法、光学装置の製造方法、および、物品製造方法
JP7227810B2 (ja) * 2019-03-25 2023-02-22 キヤノン株式会社 光学装置、露光装置および物品製造方法
CN114047593B (zh) * 2022-01-14 2022-04-08 中国人民解放军63921部队 光学测量设备的轻量化SiC主镜支撑机构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4080673B2 (ja) * 2000-07-06 2008-04-23 Ｈｏｙａ株式会社 眼鏡レンズの吸着方法およびその装置
JP4414856B2 (ja) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 基板保管装置
US7221504B2 (en) * 2005-04-25 2007-05-22 Popil Nicholas B In-ground telescope with a stationary primary objective mirror having movable collectors
JP5501880B2 (ja) * 2010-07-13 2014-05-28 株式会社井口機工製作所 フリーボールベアリングおよびベアリング装置
JP5752165B2 (ja) * 2013-03-19 2015-07-22 キヤノン株式会社 支持装置および計測装置

Also Published As

Publication number Publication date
FR3027445A1 (enrdf_load_stackoverflow) 2016-04-22
JP2016080906A (ja) 2016-05-16
JP6467187B2 (ja) 2019-02-06

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