FR3027445B1 - SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD - Google Patents

SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD Download PDF

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Publication number
FR3027445B1
FR3027445B1 FR1559897A FR1559897A FR3027445B1 FR 3027445 B1 FR3027445 B1 FR 3027445B1 FR 1559897 A FR1559897 A FR 1559897A FR 1559897 A FR1559897 A FR 1559897A FR 3027445 B1 FR3027445 B1 FR 3027445B1
Authority
FR
France
Prior art keywords
article manufacturing
measuring apparatus
support apparatus
support
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1559897A
Other languages
French (fr)
Other versions
FR3027445A1 (en
Inventor
Tetsuji Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of FR3027445A1 publication Critical patent/FR3027445A1/fr
Application granted granted Critical
Publication of FR3027445B1 publication Critical patent/FR3027445B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators

Landscapes

  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Telescopes (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
FR1559897A 2014-10-17 2015-10-16 SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD Expired - Fee Related FR3027445B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014212884A JP6467187B2 (en) 2014-10-17 2014-10-17 Support device and method, measuring device, and article manufacturing method
JP2014212884 2014-10-17

Publications (2)

Publication Number Publication Date
FR3027445A1 FR3027445A1 (en) 2016-04-22
FR3027445B1 true FR3027445B1 (en) 2018-09-21

Family

ID=55642158

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1559897A Expired - Fee Related FR3027445B1 (en) 2014-10-17 2015-10-16 SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD

Country Status (2)

Country Link
JP (1) JP6467187B2 (en)
FR (1) FR3027445B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10247907B2 (en) * 2016-05-25 2019-04-02 Northrop Grumman Systems Corporation Mirror mounting assembly
JP7093221B2 (en) * 2018-04-26 2022-06-29 キヤノン株式会社 Optical device adjustment method, optical device manufacturing method, and article manufacturing method
JP7227810B2 (en) * 2019-03-25 2023-02-22 キヤノン株式会社 OPTICAL DEVICE, EXPOSURE DEVICE, AND PRODUCT MANUFACTURING METHOD
CN114047593B (en) * 2022-01-14 2022-04-08 中国人民解放军63921部队 Light-weight SiC primary mirror supporting mechanism of optical measuring equipment

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4080673B2 (en) * 2000-07-06 2008-04-23 Ｈｏｙａ株式会社 Eyeglass lens suction method and apparatus
JP4414856B2 (en) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 Substrate storage device
US7221504B2 (en) * 2005-04-25 2007-05-22 Popil Nicholas B In-ground telescope with a stationary primary objective mirror having movable collectors
JP5501880B2 (en) * 2010-07-13 2014-05-28 株式会社井口機工製作所 Free ball bearings and bearing devices
JP5752165B2 (en) * 2013-03-19 2015-07-22 キヤノン株式会社 Support device and measuring device

Also Published As

Publication number Publication date
FR3027445A1 (en) 2016-04-22
JP2016080906A (en) 2016-05-16
JP6467187B2 (en) 2019-02-06

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