FR3027445B1 - SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD - Google Patents
SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD Download PDFInfo
- Publication number
- FR3027445B1 FR3027445B1 FR1559897A FR1559897A FR3027445B1 FR 3027445 B1 FR3027445 B1 FR 3027445B1 FR 1559897 A FR1559897 A FR 1559897A FR 1559897 A FR1559897 A FR 1559897A FR 3027445 B1 FR3027445 B1 FR 3027445B1
- Authority
- FR
- France
- Prior art keywords
- article manufacturing
- measuring apparatus
- support apparatus
- support
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
Landscapes
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Sustainable Development (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Telescopes (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014212884A JP6467187B2 (en) | 2014-10-17 | 2014-10-17 | Support device and method, measuring device, and article manufacturing method |
JP2014212884 | 2014-10-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3027445A1 FR3027445A1 (en) | 2016-04-22 |
FR3027445B1 true FR3027445B1 (en) | 2018-09-21 |
Family
ID=55642158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1559897A Expired - Fee Related FR3027445B1 (en) | 2014-10-17 | 2015-10-16 | SUPPORT APPARATUS AND METHOD, MEASURING APPARATUS, AND ARTICLE MANUFACTURING METHOD |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6467187B2 (en) |
FR (1) | FR3027445B1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10247907B2 (en) * | 2016-05-25 | 2019-04-02 | Northrop Grumman Systems Corporation | Mirror mounting assembly |
JP7093221B2 (en) * | 2018-04-26 | 2022-06-29 | キヤノン株式会社 | Optical device adjustment method, optical device manufacturing method, and article manufacturing method |
JP7227810B2 (en) * | 2019-03-25 | 2023-02-22 | キヤノン株式会社 | OPTICAL DEVICE, EXPOSURE DEVICE, AND PRODUCT MANUFACTURING METHOD |
CN114047593B (en) * | 2022-01-14 | 2022-04-08 | 中国人民解放军63921部队 | Light-weight SiC primary mirror supporting mechanism of optical measuring equipment |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4080673B2 (en) * | 2000-07-06 | 2008-04-23 | Hoya株式会社 | Eyeglass lens suction method and apparatus |
JP4414856B2 (en) * | 2004-09-30 | 2010-02-10 | 大日本スクリーン製造株式会社 | Substrate storage device |
US7221504B2 (en) * | 2005-04-25 | 2007-05-22 | Popil Nicholas B | In-ground telescope with a stationary primary objective mirror having movable collectors |
JP5501880B2 (en) * | 2010-07-13 | 2014-05-28 | 株式会社井口機工製作所 | Free ball bearings and bearing devices |
JP5752165B2 (en) * | 2013-03-19 | 2015-07-22 | キヤノン株式会社 | Support device and measuring device |
-
2014
- 2014-10-17 JP JP2014212884A patent/JP6467187B2/en not_active Expired - Fee Related
-
2015
- 2015-10-16 FR FR1559897A patent/FR3027445B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR3027445A1 (en) | 2016-04-22 |
JP2016080906A (en) | 2016-05-16 |
JP6467187B2 (en) | 2019-02-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20180309 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |
|
PLFP | Fee payment |
Year of fee payment: 6 |
|
ST | Notification of lapse |
Effective date: 20220605 |