FR3027445A1 - - Google Patents
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- Publication number
- FR3027445A1 FR3027445A1 FR1559897A FR1559897A FR3027445A1 FR 3027445 A1 FR3027445 A1 FR 3027445A1 FR 1559897 A FR1559897 A FR 1559897A FR 1559897 A FR1559897 A FR 1559897A FR 3027445 A1 FR3027445 A1 FR 3027445A1
- Authority
- FR
- France
- Prior art keywords
- support
- actuator
- portions
- support portions
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 239000000969 carrier Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 24
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
Landscapes
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Sustainable Development (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Telescopes (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014212884 | 2014-10-17 | ||
| JP2014212884A JP6467187B2 (ja) | 2014-10-17 | 2014-10-17 | 支持装置および方法、計測装置、並びに物品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR3027445A1 true FR3027445A1 (enrdf_load_stackoverflow) | 2016-04-22 |
| FR3027445B1 FR3027445B1 (fr) | 2018-09-21 |
Family
ID=55642158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1559897A Expired - Fee Related FR3027445B1 (fr) | 2014-10-17 | 2015-10-16 | Appareil et procede de support, appareil de mesure, et procede de fabrication d'article |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6467187B2 (enrdf_load_stackoverflow) |
| FR (1) | FR3027445B1 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10247907B2 (en) | 2016-05-25 | 2019-04-02 | Northrop Grumman Systems Corporation | Mirror mounting assembly |
| JP7093221B2 (ja) * | 2018-04-26 | 2022-06-29 | キヤノン株式会社 | 光学装置の調整方法、光学装置の製造方法、および、物品製造方法 |
| JP7227810B2 (ja) * | 2019-03-25 | 2023-02-22 | キヤノン株式会社 | 光学装置、露光装置および物品製造方法 |
| CN114047593B (zh) * | 2022-01-14 | 2022-04-08 | 中国人民解放军63921部队 | 光学测量设备的轻量化SiC主镜支撑机构 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4080673B2 (ja) * | 2000-07-06 | 2008-04-23 | Ｈｏｙａ株式会社 | 眼鏡レンズの吸着方法およびその装置 |
| JP4414856B2 (ja) * | 2004-09-30 | 2010-02-10 | 大日本スクリーン製造株式会社 | 基板保管装置 |
| US7221504B2 (en) * | 2005-04-25 | 2007-05-22 | Popil Nicholas B | In-ground telescope with a stationary primary objective mirror having movable collectors |
| JP5501880B2 (ja) * | 2010-07-13 | 2014-05-28 | 株式会社井口機工製作所 | フリーボールベアリングおよびベアリング装置 |
| JP5752165B2 (ja) * | 2013-03-19 | 2015-07-22 | キヤノン株式会社 | 支持装置および計測装置 |
-
2014
- 2014-10-17 JP JP2014212884A patent/JP6467187B2/ja not_active Expired - Fee Related
-
2015
- 2015-10-16 FR FR1559897A patent/FR3027445B1/fr not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016080906A (ja) | 2016-05-16 |
| FR3027445B1 (fr) | 2018-09-21 |
| JP6467187B2 (ja) | 2019-02-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLFP | Fee payment |
Year of fee payment: 2 |
|
| PLFP | Fee payment |
Year of fee payment: 3 |
|
| PLSC | Publication of the preliminary search report |
Effective date: 20180309 |
|
| PLFP | Fee payment |
Year of fee payment: 4 |
|
| PLFP | Fee payment |
Year of fee payment: 5 |
|
| PLFP | Fee payment |
Year of fee payment: 6 |
|
| ST | Notification of lapse |
Effective date: 20220605 |