FR2963476B1 - Procede de realisation d'un condensateur comprenant un reseau de nano-capacites - Google Patents

Procede de realisation d'un condensateur comprenant un reseau de nano-capacites

Info

Publication number
FR2963476B1
FR2963476B1 FR1003212A FR1003212A FR2963476B1 FR 2963476 B1 FR2963476 B1 FR 2963476B1 FR 1003212 A FR1003212 A FR 1003212A FR 1003212 A FR1003212 A FR 1003212A FR 2963476 B1 FR2963476 B1 FR 2963476B1
Authority
FR
France
Prior art keywords
nano
capacitor
producing
capacity network
capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1003212A
Other languages
English (en)
Other versions
FR2963476A1 (fr
Inventor
Margrit Hanbucken
Eric Moyen
Lionel Santinacci
D Avitaya Francois Arnaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1003212A priority Critical patent/FR2963476B1/fr
Priority to PCT/IB2011/053374 priority patent/WO2012014177A1/fr
Priority to US13/813,166 priority patent/US9165722B2/en
Priority to EP11749250.4A priority patent/EP2599105A1/fr
Publication of FR2963476A1 publication Critical patent/FR2963476A1/fr
Application granted granted Critical
Publication of FR2963476B1 publication Critical patent/FR2963476B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H01G4/01—Form of self-supporting electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/38—Multiple capacitors, i.e. structural combinations of fixed capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00—Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/10—Multiple hybrid or EDL capacitors, e.g. arrays or modules

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Semiconductor Memories (AREA)
FR1003212A 2010-07-30 2010-07-30 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites Expired - Fee Related FR2963476B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR1003212A FR2963476B1 (fr) 2010-07-30 2010-07-30 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites
PCT/IB2011/053374 WO2012014177A1 (fr) 2010-07-30 2011-07-28 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites
US13/813,166 US9165722B2 (en) 2010-07-30 2011-07-28 Method for producing a capacitor including an array of nanocapacitors
EP11749250.4A EP2599105A1 (fr) 2010-07-30 2011-07-28 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1003212A FR2963476B1 (fr) 2010-07-30 2010-07-30 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites

Publications (2)

Publication Number Publication Date
FR2963476A1 FR2963476A1 (fr) 2012-02-03
FR2963476B1 true FR2963476B1 (fr) 2012-08-24

Family

ID=43545646

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1003212A Expired - Fee Related FR2963476B1 (fr) 2010-07-30 2010-07-30 Procede de realisation d'un condensateur comprenant un reseau de nano-capacites

Country Status (4)

Country Link
US (1) US9165722B2 (fr)
EP (1) EP2599105A1 (fr)
FR (1) FR2963476B1 (fr)
WO (1) WO2012014177A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013100916A1 (fr) * 2011-12-27 2013-07-04 Intel Corporation Fabrication de varacteurs électrochimiques poreux
US9076594B2 (en) * 2013-03-12 2015-07-07 Invensas Corporation Capacitors using porous alumina structures
US9640332B2 (en) * 2013-12-20 2017-05-02 Intel Corporation Hybrid electrochemical capacitor
WO2016126253A1 (fr) * 2015-02-05 2016-08-11 The Penn State Research Foundation Réseaux de nanopores pour le tri, le filtrage, la surveillance ou la distribution biomédicaux, environnementaux et industriels
CN108461629A (zh) * 2018-03-02 2018-08-28 福建省福芯电子科技有限公司 硅基射频电容及其制备方法
US11220424B2 (en) 2018-08-09 2022-01-11 Honeywell International Inc. Methods for increasing aspect ratios in comb structures
KR20230059551A (ko) * 2021-10-26 2023-05-03 삼성전기주식회사 커패시터 부품 및 커패시터 부품 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4434575B2 (ja) * 2002-12-13 2010-03-17 キヤノン株式会社 熱電変換素子及びその製造方法
US7049205B2 (en) * 2004-10-25 2006-05-23 Promos Technologies Inc. Stacked capacitor and method for preparing the same
KR100712525B1 (ko) * 2005-08-16 2007-04-30 삼성전자주식회사 반도체 소자의 커패시터 및 그 제조방법
US7907037B2 (en) * 2006-02-04 2011-03-15 Evigia Systems, Inc. Micro-electro-mechanical module
DE102006013245A1 (de) * 2006-03-22 2007-10-04 Infineon Technologies Ag Verfahren zur Ausbildung von Öffnungen in einer Matrizenschicht und zur Herstellung von Kondensatoren
KR100839360B1 (ko) * 2006-12-18 2008-06-19 삼성전자주식회사 패턴 형성 방법 및 이를 이용한 커패시터 제조 방법
KR100840782B1 (ko) * 2007-01-16 2008-06-23 삼성전자주식회사 실록산 폴리머 조성물 및 이를 이용한 커패시터 제조 방법
KR100891647B1 (ko) * 2007-02-01 2009-04-02 삼성전자주식회사 반도체 장치 및 그 형성 방법
KR100881730B1 (ko) * 2007-03-16 2009-02-06 주식회사 하이닉스반도체 캐패시터 및 그 제조 방법
US8159811B2 (en) * 2007-10-19 2012-04-17 Oh Young Joo Metal capacitor and manufacturing method thereof
JP2010156005A (ja) * 2008-12-26 2010-07-15 Kanagawa Acad Of Sci & Technol 金属ナノ構造体アレーの製造方法および複合材料の製造方法
US20120088159A1 (en) * 2009-06-26 2012-04-12 Jayan Thomas Nano-architectured carbon structures and methods for fabricating same
KR20110008398A (ko) * 2009-07-20 2011-01-27 삼성전자주식회사 막 구조물, 이를 포함하는 커패시터 및 그 제조 방법
US8317882B2 (en) * 2009-07-24 2012-11-27 Robert Bosch Gmbh Method of manufacturing a planar electrode with large surface area

Also Published As

Publication number Publication date
EP2599105A1 (fr) 2013-06-05
WO2012014177A1 (fr) 2012-02-02
US20130224394A1 (en) 2013-08-29
US9165722B2 (en) 2015-10-20
FR2963476A1 (fr) 2012-02-03

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