FR2962120B1 - Procede de fabrication d'un dispositif a micro-aiguilles et dispositif obtenu ainsi que son application - Google Patents

Procede de fabrication d'un dispositif a micro-aiguilles et dispositif obtenu ainsi que son application

Info

Publication number
FR2962120B1
FR2962120B1 FR1155850A FR1155850A FR2962120B1 FR 2962120 B1 FR2962120 B1 FR 2962120B1 FR 1155850 A FR1155850 A FR 1155850A FR 1155850 A FR1155850 A FR 1155850A FR 2962120 B1 FR2962120 B1 FR 2962120B1
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FR
France
Prior art keywords
grid
micro
manufacturing
application
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1155850A
Other languages
English (en)
Other versions
FR2962120A1 (fr
Inventor
Michael Stumber
Frank Schatz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2962120A1 publication Critical patent/FR2962120A1/fr
Application granted granted Critical
Publication of FR2962120B1 publication Critical patent/FR2962120B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K11/00—Marking of animals
    • A01K11/005—Branding or tattooing devices for animals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111—Tips, pillars, i.e. raised structures
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0046—Solid microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0061—Methods for using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0076—Tattooing apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0361—Tips, pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Environmental Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Hematology (AREA)
  • Biomedical Technology (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Anesthesiology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Dermatology (AREA)
  • Analytical Chemistry (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Animal Husbandry (AREA)
  • Zoology (AREA)
  • Birds (AREA)
  • Micromachines (AREA)
  • Media Introduction/Drainage Providing Device (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

Procédé de fabrication d'un dispositif de micro-aiguilles (20' ; 20'' ; 20''' ; 21''' ; 22''') comprenant les étapes suivantes : - réaliser un masque de gravure (10'; 10'' ; 10'') en forme de grille avec des barres (100', 110'; 100'', 110''; 100'''', 110''') et des zones d'intersection de barre (10'a ; 10''a ; 10'''a) et des ouvertures de grille (10'b ; 10''b ; 10''b) intermédiaires sur un substrat (1), - réaliser un procédé de gravure pour former le dispositif de micro-aiguilles (20' ; 20'' ; 20''' ; 21''' ; 22''') sur le substrat (1) en utilisant le masque de gravure (10' ; 10'' ; 10''' ; 11''' ; 12''' ; 13''' ; 14'''), et enlever le masque de gravure (10' ; 10'' ; 10''' ; 11''' ; 12''' ; 13''' ; 14'''), procédé caractérisé en ce que le masque de gravure en forme de grille (10'; 10'' ; 10'') a des zones renforcées en surface (115'; 115''a, 115''b) sur au moins une partie des zones d'intersection de la grille (10'a ; 10''a ; 10'''a) qui s'étendent sur les barreaux de grille (100', 110'; 100'', 110''; 100'''', 110''').
FR1155850A 2010-07-02 2011-06-30 Procede de fabrication d'un dispositif a micro-aiguilles et dispositif obtenu ainsi que son application Active FR2962120B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010030864A DE102010030864A1 (de) 2010-07-02 2010-07-02 Herstellungsverfahren für eine Mikronadelanordnung und entsprechende Mikronadelanordnung und Verwendung

Publications (2)

Publication Number Publication Date
FR2962120A1 FR2962120A1 (fr) 2012-01-06
FR2962120B1 true FR2962120B1 (fr) 2015-12-18

Family

ID=45346866

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1155850A Active FR2962120B1 (fr) 2010-07-02 2011-06-30 Procede de fabrication d'un dispositif a micro-aiguilles et dispositif obtenu ainsi que son application

Country Status (5)

Country Link
US (1) US20120004614A1 (fr)
CN (1) CN102311091B (fr)
DE (1) DE102010030864A1 (fr)
FR (1) FR2962120B1 (fr)
GB (1) GB2481901B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2757953B1 (fr) * 2011-09-23 2015-07-29 Roche Diagnostics GmbH Procédé de gravure par masque d'un organe de piqûre
US20160279401A1 (en) 2015-03-27 2016-09-29 Allergan, Inc. Dissolvable microneedles for skin treatment
EP4169504A1 (fr) * 2014-03-28 2023-04-26 Allergan, Inc. Micro-aiguilles solubles pour le traitement de la peau
JP6586317B2 (ja) * 2015-08-19 2019-10-02 花王株式会社 微細突起具及びその製造方法
CN110257769B (zh) * 2019-07-29 2021-11-12 云谷（固安）科技有限公司 一种掩膜版及蒸镀装置
US20230233823A1 (en) * 2020-05-25 2023-07-27 Cosmed Pharmaceutical Co., Ltd. High-performance micro-needle array
JP7421773B2 (ja) 2021-02-01 2024-01-25 三島光産株式会社 マイクロニードルアレイ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6881203B2 (en) * 2001-09-05 2005-04-19 3M Innovative Properties Company Microneedle arrays and methods of manufacturing the same
CN2654137Y (zh) * 2003-11-04 2004-11-10 浙江大学 一种基于微加工技术的无痛微针阵列
JP2007037707A (ja) * 2005-08-02 2007-02-15 Nabtesco Corp 皮膚用針
DE102006028781A1 (de) 2006-06-23 2007-12-27 Robert Bosch Gmbh Verfahren zur Herstellung von porösen Mikronadeln und ihre Verwendung
DE102006028914A1 (de) 2006-06-23 2007-12-27 Robert Bosch Gmbh Verfahren zur Herstellung von Mikronadeln aus porösem Material
DE102006031506A1 (de) * 2006-07-07 2008-01-17 Robert Bosch Gmbh Verfahren zur Herstellung von Mikronadeln in einem Si-Halbleitersubstrat
DE102006040642A1 (de) 2006-08-30 2008-03-13 Robert Bosch Gmbh Mikronadeln zur Platzierung in der Haut zwecks transdermaler Applikation von Pharmazeutika
CN101829394B (zh) * 2010-04-27 2012-08-22 上海交通大学 台阶微针阵列的制备方法
KR101790815B1 (ko) * 2010-04-28 2017-10-26 킴벌리-클라크 월드와이드, 인크. 세포성 상호작용이 향상된 나노패턴화 의료 기구
CN102000020B (zh) * 2010-11-17 2012-10-10 河南羚锐制药股份有限公司北京药物研究院 新型可降解聚合物微针贴剂及其制备方法

Also Published As

Publication number Publication date
GB2481901B (en) 2014-10-29
CN102311091A (zh) 2012-01-11
GB201111327D0 (en) 2011-08-17
CN102311091B (zh) 2015-11-18
US20120004614A1 (en) 2012-01-05
GB2481901A (en) 2012-01-11
DE102010030864A1 (de) 2012-01-05
FR2962120A1 (fr) 2012-01-06

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