FR2961320B1 - Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication. - Google Patents

Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication.

Info

Publication number
FR2961320B1
FR2961320B1 FR1054744A FR1054744A FR2961320B1 FR 2961320 B1 FR2961320 B1 FR 2961320B1 FR 1054744 A FR1054744 A FR 1054744A FR 1054744 A FR1054744 A FR 1054744A FR 2961320 B1 FR2961320 B1 FR 2961320B1
Authority
FR
France
Prior art keywords
component
optical
nanotubes
electro
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1054744A
Other languages
English (en)
Other versions
FR2961320A1 (fr
Inventor
Laurent Vivien
Etienne Gaufres
Nicolas Izard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite Paris Saclay
Original Assignee
Universite Paris Sud Paris 11
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite Paris Sud Paris 11 filed Critical Universite Paris Sud Paris 11
Priority to FR1054744A priority Critical patent/FR2961320B1/fr
Priority to JP2013514768A priority patent/JP6033770B2/ja
Priority to EP11735496.9A priority patent/EP2583133A1/fr
Priority to PCT/FR2011/051355 priority patent/WO2011157948A1/fr
Priority to US13/704,452 priority patent/US9568671B2/en
Publication of FR2961320A1 publication Critical patent/FR2961320A1/fr
Application granted granted Critical
Publication of FR2961320B1 publication Critical patent/FR2961320B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/061Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material
    • G02F1/065Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material in an optical waveguide structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/60Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation in which radiation controls flow of current through the devices, e.g. photoresistors
    • H10K30/65Light-sensitive field-effect devices, e.g. phototransistors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H10K85/221Carbon nanotubes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
FR1054744A 2010-06-15 2010-06-15 Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication. Expired - Fee Related FR2961320B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1054744A FR2961320B1 (fr) 2010-06-15 2010-06-15 Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication.
JP2013514768A JP6033770B2 (ja) 2010-06-15 2011-06-15 ナノチューブ電気−光学部品、該部品を組み込んだ光電子または光リンクベースのハイブリッド集積回路、および作成方法
EP11735496.9A EP2583133A1 (fr) 2010-06-15 2011-06-15 Composant électro-optique à nanotubes, circuit intégré hybride optronique ou à lien optique intégrant ce composant, et procédé de fabrication
PCT/FR2011/051355 WO2011157948A1 (fr) 2010-06-15 2011-06-15 Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication.
US13/704,452 US9568671B2 (en) 2010-06-15 2011-06-15 Nanotube electro-optical component, optronic or optical link-based hybrid integrated circuit integrating this component, and method of fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1054744A FR2961320B1 (fr) 2010-06-15 2010-06-15 Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication.

Publications (2)

Publication Number Publication Date
FR2961320A1 FR2961320A1 (fr) 2011-12-16
FR2961320B1 true FR2961320B1 (fr) 2013-04-26

Family

ID=43302374

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1054744A Expired - Fee Related FR2961320B1 (fr) 2010-06-15 2010-06-15 Composant electro-optique a nanotubes, circuit integre hybride optronique ou a lien optique integrant ce composant, et procede de fabrication.

Country Status (5)

Country Link
US (1) US9568671B2 (fr)
EP (1) EP2583133A1 (fr)
JP (1) JP6033770B2 (fr)
FR (1) FR2961320B1 (fr)
WO (1) WO2011157948A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6600513B2 (ja) * 2015-09-04 2019-10-30 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10229267A1 (de) * 2002-06-28 2004-01-29 Philips Intellectual Property & Standards Gmbh Vorrichtung zur optischen Signalverarbeitung und nichtlineares optisches Bauelement
JP2004279865A (ja) * 2003-03-18 2004-10-07 Ricoh Co Ltd 有機導波路型光変調器および該有機導波路型光変調器を構成要素とする光通信システム
ITTO20030425A1 (it) * 2003-06-06 2004-12-07 St Microelectronics Srl Dispositivo interruttore elettrico a comando ottico basato su nanotubi di carbonio e sistema interruttore elettrico utilizzante tale dispositivo interruttore.
US20050249249A1 (en) * 2003-12-31 2005-11-10 Pettit John W Wavelength division multiplexing using carbon nanotubes
JP2005332991A (ja) * 2004-05-20 2005-12-02 Univ Nagoya カーボンナノチューブ発光素子
TWI399864B (zh) * 2004-09-16 2013-06-21 Nantero Inc 使用奈米管之發光體及其製造方法
JP5019731B2 (ja) * 2005-09-06 2012-09-05 国立大学法人 東京大学 光デバイス
FR2916902B1 (fr) * 2007-05-31 2009-07-17 Commissariat Energie Atomique Transistor a effet de champ a nanotubes de carbone
WO2009072278A1 (fr) * 2007-12-05 2009-06-11 Panasonic Corporation Dispositif émettant de la lumière
US8440994B2 (en) * 2008-01-24 2013-05-14 Nano-Electronic And Photonic Devices And Circuits, Llc Nanotube array electronic and opto-electronic devices
US20090268765A1 (en) * 2008-04-28 2009-10-29 Daniel Mahgerefteh Intra-Cavity Phase Modulated Laser Based on Intra-Cavity Depletion-Edge-Translation Lightwave Modulators
KR20130071423A (ko) * 2010-04-28 2013-06-28 각고호우징 게이오기주크 탄소나노튜브 발광소자, 광원 및 포토커플러

Also Published As

Publication number Publication date
US20130216178A1 (en) 2013-08-22
JP2013535028A (ja) 2013-09-09
WO2011157948A1 (fr) 2011-12-22
FR2961320A1 (fr) 2011-12-16
EP2583133A1 (fr) 2013-04-24
JP6033770B2 (ja) 2016-11-30
US9568671B2 (en) 2017-02-14

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