FR2917893B1 - Procede de fabrication d'une connexion electrique a base de nanotubes de carbone - Google Patents

Procede de fabrication d'une connexion electrique a base de nanotubes de carbone

Info

Publication number
FR2917893B1
FR2917893B1 FR0704464A FR0704464A FR2917893B1 FR 2917893 B1 FR2917893 B1 FR 2917893B1 FR 0704464 A FR0704464 A FR 0704464A FR 0704464 A FR0704464 A FR 0704464A FR 2917893 B1 FR2917893 B1 FR 2917893B1
Authority
FR
France
Prior art keywords
manufacturing
electrical connection
carbon nanotubes
connection based
nanotubes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0704464A
Other languages
English (en)
French (fr)
Other versions
FR2917893A1 (fr
Inventor
Jean-Christophe Coiffic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0704464A priority Critical patent/FR2917893B1/fr
Priority to EP08354040A priority patent/EP2006901A3/fr
Priority to US12/213,275 priority patent/US20080317947A1/en
Priority to JP2008163376A priority patent/JP2009027157A/ja
Publication of FR2917893A1 publication Critical patent/FR2917893A1/fr
Application granted granted Critical
Publication of FR2917893B1 publication Critical patent/FR2917893B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches
    • H10W20/057—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches by selectively depositing, e.g. by using selective CVD or plating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/032—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers
    • H10W20/033—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics
    • H10W20/034—Manufacture or treatment of conductive parts of the interconnections of conductive barrier, adhesion or liner layers in openings in dielectrics bottomless barrier, adhesion or liner layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/071—Manufacture or treatment of dielectric parts thereof
    • H10W20/074—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
    • H10W20/076—Manufacture or treatment of dielectric parts thereof of dielectric parts comprising thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/44—Conductive materials thereof
    • H10W20/4462—Carbon or carbon-containing materials, e.g. graphene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/0554—Manufacture or treatment of conductive parts of the interconnections of nanotubes or nanowires
FR0704464A 2007-06-22 2007-06-22 Procede de fabrication d'une connexion electrique a base de nanotubes de carbone Expired - Fee Related FR2917893B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0704464A FR2917893B1 (fr) 2007-06-22 2007-06-22 Procede de fabrication d'une connexion electrique a base de nanotubes de carbone
EP08354040A EP2006901A3 (fr) 2007-06-22 2008-06-17 Procédé de fabrication d'une connexion électrique à base de nanotubes de carbone
US12/213,275 US20080317947A1 (en) 2007-06-22 2008-06-17 Method for making a carbon nanotube-based electrical connection
JP2008163376A JP2009027157A (ja) 2007-06-22 2008-06-23 カーボンナノチューブベースの電気的接続の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0704464A FR2917893B1 (fr) 2007-06-22 2007-06-22 Procede de fabrication d'une connexion electrique a base de nanotubes de carbone

Publications (2)

Publication Number Publication Date
FR2917893A1 FR2917893A1 (fr) 2008-12-26
FR2917893B1 true FR2917893B1 (fr) 2009-08-28

Family

ID=38754704

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0704464A Expired - Fee Related FR2917893B1 (fr) 2007-06-22 2007-06-22 Procede de fabrication d'une connexion electrique a base de nanotubes de carbone

Country Status (4)

Country Link
US (1) US20080317947A1 (https=)
EP (1) EP2006901A3 (https=)
JP (1) JP2009027157A (https=)
FR (1) FR2917893B1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7989349B2 (en) 2005-04-15 2011-08-02 Micron Technology, Inc. Methods of manufacturing nanotubes having controlled characteristics
US9099537B2 (en) * 2009-08-28 2015-08-04 International Business Machines Corporation Selective nanotube growth inside vias using an ion beam
JP2011061026A (ja) * 2009-09-10 2011-03-24 Toshiba Corp カーボンナノチューブ配線及びその製造方法
JP5395708B2 (ja) * 2010-03-09 2014-01-22 東京エレクトロン株式会社 基板の配線方法及び半導体製造装置
JP5238775B2 (ja) * 2010-08-25 2013-07-17 株式会社東芝 カーボンナノチューブ配線の製造方法
JP5920808B2 (ja) * 2010-08-29 2016-05-18 学校法人 芝浦工業大学 配線パターンの形成方法
US9607955B2 (en) * 2010-11-10 2017-03-28 Cree, Inc. Contact pad
CN102543835B (zh) * 2010-12-15 2015-05-13 中国科学院微电子研究所 开口的填充方法
JP5813682B2 (ja) * 2013-03-08 2015-11-17 株式会社東芝 半導体装置及びその製造方法
US20160225694A1 (en) * 2013-06-27 2016-08-04 Hans-Joachim Barth High conductivity high frequency via for electronic systems
US11527476B2 (en) * 2020-09-11 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Interconnect structure of semiconductor device
US12322649B2 (en) 2020-09-11 2025-06-03 Taiwan Semiconductor Manufacturing Co., Ltd. Interconnect structure of semiconductor device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2262654B (en) * 1991-12-13 1995-07-12 Marconi Gec Ltd Fabrication process
JP3189970B2 (ja) * 1998-09-07 2001-07-16 日本電気株式会社 半導体装置の製造方法
JP4023955B2 (ja) * 1999-07-08 2007-12-19 株式会社荏原製作所 半導体装置の製造方法
DE10006964C2 (de) * 2000-02-16 2002-01-31 Infineon Technologies Ag Elektronisches Bauelement mit einer leitenden Verbindung zwischen zwei leitenden Schichten und Verfahren zum Herstellen eines elektronischen Bauelements
US6787460B2 (en) * 2002-01-14 2004-09-07 Samsung Electronics Co., Ltd. Methods of forming metal layers in integrated circuit devices using selective deposition on edges of recesses and conductive contacts so formed
US6933222B2 (en) * 2003-01-02 2005-08-23 Intel Corporation Microcircuit fabrication and interconnection
JP4774665B2 (ja) * 2003-02-05 2011-09-14 ソニー株式会社 半導体装置の製造方法
US7374793B2 (en) * 2003-12-11 2008-05-20 International Business Machines Corporation Methods and structures for promoting stable synthesis of carbon nanotubes
US7135773B2 (en) * 2004-02-26 2006-11-14 International Business Machines Corporation Integrated circuit chip utilizing carbon nanotube composite interconnection vias
JP4448356B2 (ja) * 2004-03-26 2010-04-07 富士通株式会社 半導体装置およびその製造方法
US7129097B2 (en) * 2004-07-29 2006-10-31 International Business Machines Corporation Integrated circuit chip utilizing oriented carbon nanotube conductive layers
JP2006148063A (ja) * 2004-10-22 2006-06-08 Renesas Technology Corp 配線構造、半導体装置、ｍｒａｍおよび半導体装置の製造方法
CN100539041C (zh) * 2004-10-22 2009-09-09 富士通微电子株式会社 半导体器件及其制造方法
KR100718112B1 (ko) * 2005-11-02 2007-05-14 삼성에스디아이 주식회사 탄소나노튜브를 이용한 수직 배선구조 및 그 제조방법
FR2910706B1 (fr) * 2006-12-21 2009-03-20 Commissariat Energie Atomique Element d'interconnexion a base de nanotubes de carbone

Also Published As

Publication number Publication date
EP2006901A2 (fr) 2008-12-24
EP2006901A3 (fr) 2011-01-19
FR2917893A1 (fr) 2008-12-26
JP2009027157A (ja) 2009-02-05
US20080317947A1 (en) 2008-12-25

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Legal Events

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ST Notification of lapse

Effective date: 20140228