FR2889841B1 - Structures d'emetteurs a effet de champ en nonobaguettes a portes et procedes de fabrication correspondants - Google Patents
Structures d'emetteurs a effet de champ en nonobaguettes a portes et procedes de fabrication correspondantsInfo
- Publication number
- FR2889841B1 FR2889841B1 FR0606563A FR0606563A FR2889841B1 FR 2889841 B1 FR2889841 B1 FR 2889841B1 FR 0606563 A FR0606563 A FR 0606563A FR 0606563 A FR0606563 A FR 0606563A FR 2889841 B1 FR2889841 B1 FR 2889841B1
- Authority
- FR
- France
- Prior art keywords
- nonobaguette
- doors
- methods
- field effect
- making same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
- H01J1/3044—Point emitters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/185,007 US7279085B2 (en) | 2005-07-19 | 2005-07-19 | Gated nanorod field emitter structures and associated methods of fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2889841A1 FR2889841A1 (fr) | 2007-02-23 |
FR2889841B1 true FR2889841B1 (fr) | 2011-03-18 |
Family
ID=36955559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0606563A Expired - Fee Related FR2889841B1 (fr) | 2005-07-19 | 2006-07-19 | Structures d'emetteurs a effet de champ en nonobaguettes a portes et procedes de fabrication correspondants |
Country Status (3)
Country | Link |
---|---|
US (2) | US7279085B2 (fr) |
FR (1) | FR2889841B1 (fr) |
GB (1) | GB2428873B (fr) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080213570A1 (en) * | 2007-02-16 | 2008-09-04 | Jennifer Hoyt Lalli | Self-assembled conductive deformable films |
US20080261044A1 (en) * | 2003-02-10 | 2008-10-23 | Jennifer Hoyt Lalli | Rapidly self-assembled thin films and functional decals |
US20090087348A1 (en) * | 2007-02-16 | 2009-04-02 | Richard Otto Claus | Sensor applications |
US20080182099A1 (en) * | 2006-11-17 | 2008-07-31 | Jennifer Hoyt Lalli | Robust electrodes for shape memory films |
US7871933B2 (en) * | 2005-12-01 | 2011-01-18 | International Business Machines Corporation | Combined stepper and deposition tool |
FR2900052B1 (fr) * | 2006-04-19 | 2011-02-18 | Galderma Sa | Composition comprenant au moins une phase aqueuse et au moins une phase grasse comprenant de l'ivermectine |
KR100791790B1 (ko) * | 2006-05-30 | 2008-01-03 | 고려대학교 산학협력단 | 육각형의 나노 판상 다이아몬드 형성방법 |
US7667260B2 (en) * | 2006-08-09 | 2010-02-23 | Micron Technology, Inc. | Nanoscale floating gate and methods of formation |
SG140485A1 (en) * | 2006-08-24 | 2008-03-28 | Sony Corp | An electron emitter and a display apparatus utilising the same |
US20080206550A1 (en) * | 2007-02-26 | 2008-08-28 | Michael Jeremiah Borlner | Hydrophobic surface |
US20090035513A1 (en) * | 2007-03-28 | 2009-02-05 | Michael Jeremiah Bortner | Tethered nanorods |
US20080245413A1 (en) * | 2007-04-04 | 2008-10-09 | Hang Ruan | Self assembled photovoltaic devices |
US20080296616A1 (en) * | 2007-06-04 | 2008-12-04 | Sharp Laboratories Of America, Inc. | Gallium nitride-on-silicon nanoscale patterned interface |
DE102007034222A1 (de) * | 2007-07-23 | 2009-01-29 | Siemens Ag | Röntgenröhre mit einer Feldemissionskathode |
US8027145B2 (en) * | 2007-07-30 | 2011-09-27 | Taiyo Yuden Co., Ltd | Capacitor element and method of manufacturing capacitor element |
US8445383B2 (en) * | 2007-09-05 | 2013-05-21 | The United States Of America, As Represented By The Secretary Of The Navy | Transparent nanocrystalline diamond contacts to wide bandgap semiconductor devices |
WO2009039298A2 (fr) * | 2007-09-18 | 2009-03-26 | University Of Florida Research Foundation, Inc. | Détecteurs utilisant des transistors à mobilité électronique élevée à base d'algan/gan |
JP4493686B2 (ja) * | 2007-09-27 | 2010-06-30 | 太陽誘電株式会社 | コンデンサ及びその製造方法 |
US20090104434A1 (en) * | 2007-10-17 | 2009-04-23 | Jennifer Hoyt Lalli | Conformal multifunctional coatings |
US20090104438A1 (en) * | 2007-10-17 | 2009-04-23 | Jennifer Hoyt Lalli | Abrasion resistant coatings |
KR101301080B1 (ko) * | 2008-03-17 | 2013-09-03 | 삼성전자주식회사 | 삼극 전계방출소자의 제조방법 |
TWI397722B (zh) * | 2008-12-31 | 2013-06-01 | Yeukuang Hwu | 光學元件的製造方法 |
WO2010114887A1 (fr) * | 2009-03-31 | 2010-10-07 | Georgia Tech Research Corporation | Gravure chimique de substrats assistée par métal |
US8536564B1 (en) * | 2011-09-28 | 2013-09-17 | Sandia Corporation | Integrated field emission array for ion desorption |
US9058954B2 (en) | 2012-02-20 | 2015-06-16 | Georgia Tech Research Corporation | Carbon nanotube field emission devices and methods of making same |
CN103854935B (zh) * | 2012-12-06 | 2016-09-07 | 清华大学 | 场发射阴极装置及场发射器件 |
US8866068B2 (en) | 2012-12-27 | 2014-10-21 | Schlumberger Technology Corporation | Ion source with cathode having an array of nano-sized projections |
US9695515B2 (en) * | 2013-08-30 | 2017-07-04 | Hewlett-Packard Development Company, L.P. | Substrate etch |
EP3500845A1 (fr) * | 2016-08-16 | 2019-06-26 | Massachusetts Institute of Technology | Tomosynthèse à rayons x à l'échelle nanométrique pour une analyse rapide de puces de circuit intégré (ci) |
US11145431B2 (en) * | 2016-08-16 | 2021-10-12 | Massachusetts Institute Of Technology | System and method for nanoscale X-ray imaging of biological specimen |
US10739299B2 (en) * | 2017-03-14 | 2020-08-11 | Roche Sequencing Solutions, Inc. | Nanopore well structures and methods |
EP3435400A1 (fr) * | 2017-07-28 | 2019-01-30 | Evince Technology Ltd | Dispositif pour commander le écoulement d'électrons et procédé de fabrication dudit dispositif |
US11437218B2 (en) | 2019-11-14 | 2022-09-06 | Massachusetts Institute Of Technology | Apparatus and method for nanoscale X-ray imaging |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3755704A (en) | 1970-02-06 | 1973-08-28 | Stanford Research Inst | Field emission cathode structures and devices utilizing such structures |
US3665241A (en) | 1970-07-13 | 1972-05-23 | Stanford Research Inst | Field ionizer and field emission cathode structures and methods of production |
US3812559A (en) | 1970-07-13 | 1974-05-28 | Stanford Research Inst | Methods of producing field ionizer and field emission cathode structures |
US5266530A (en) | 1991-11-08 | 1993-11-30 | Bell Communications Research, Inc. | Self-aligned gated electron field emitter |
US5229331A (en) | 1992-02-14 | 1993-07-20 | Micron Technology, Inc. | Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology |
JP3740295B2 (ja) * | 1997-10-30 | 2006-02-01 | キヤノン株式会社 | カーボンナノチューブデバイス、その製造方法及び電子放出素子 |
US6710539B2 (en) | 1998-09-02 | 2004-03-23 | Micron Technology, Inc. | Field emission devices having structure for reduced emitter tip to gate spacing |
US6391670B1 (en) | 1999-04-29 | 2002-05-21 | Micron Technology, Inc. | Method of forming a self-aligned field extraction grid |
JP3600126B2 (ja) | 1999-07-29 | 2004-12-08 | シャープ株式会社 | 電子源アレイ及び電子源アレイの駆動方法 |
JP2001101977A (ja) * | 1999-09-30 | 2001-04-13 | Toshiba Corp | 真空マイクロ素子 |
US6290564B1 (en) | 1999-09-30 | 2001-09-18 | Motorola, Inc. | Method for fabricating an electron-emissive film |
KR100480773B1 (ko) | 2000-01-07 | 2005-04-06 | 삼성에스디아이 주식회사 | 카본 나노 튜브를 이용한 3극 전계방출소자의 제작방법 |
US7375366B2 (en) | 2000-02-25 | 2008-05-20 | Sharp Kabushiki Kaisha | Carbon nanotube and method for producing the same, electron source and method for producing the same, and display |
CN100541700C (zh) | 2002-07-30 | 2009-09-16 | 学校法人浦项工科大学校 | 使用阳极氧化工艺制造的具有三极管结构的电场发射器件及其制造方法 |
KR100576733B1 (ko) | 2003-01-15 | 2006-05-03 | 학교법인 포항공과대학교 | 일체형 3극구조 전계방출디스플레이 및 그 제조 방법 |
US7239076B2 (en) | 2003-09-25 | 2007-07-03 | General Electric Company | Self-aligned gated rod field emission device and associated method of fabrication |
US20050112048A1 (en) | 2003-11-25 | 2005-05-26 | Loucas Tsakalakos | Elongated nano-structures and related devices |
US7459839B2 (en) | 2003-12-05 | 2008-12-02 | Zhidan Li Tolt | Low voltage electron source with self aligned gate apertures, and luminous display using the electron source |
US7326328B2 (en) * | 2005-07-19 | 2008-02-05 | General Electric Company | Gated nanorod field emitter structures and associated methods of fabrication |
-
2005
- 2005-07-19 US US11/185,007 patent/US7279085B2/en active Active
-
2006
- 2006-07-13 GB GB0613898A patent/GB2428873B/en not_active Expired - Fee Related
- 2006-07-19 FR FR0606563A patent/FR2889841B1/fr not_active Expired - Fee Related
-
2007
- 2007-08-08 US US11/835,691 patent/US7411341B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
GB2428873B (en) | 2011-04-27 |
US7279085B2 (en) | 2007-10-09 |
GB2428873A (en) | 2007-02-07 |
US20070085459A1 (en) | 2007-04-19 |
GB0613898D0 (en) | 2006-08-23 |
US7411341B2 (en) | 2008-08-12 |
US20070273263A1 (en) | 2007-11-29 |
FR2889841A1 (fr) | 2007-02-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 11 |
|
PLFP | Fee payment |
Year of fee payment: 12 |
|
PLFP | Fee payment |
Year of fee payment: 13 |
|
PLFP | Fee payment |
Year of fee payment: 14 |
|
ST | Notification of lapse |
Effective date: 20210305 |