FR2864233B1 - Bolometre infrarouge - Google Patents

Bolometre infrarouge

Info

Publication number
FR2864233B1
FR2864233B1 FR0412942A FR0412942A FR2864233B1 FR 2864233 B1 FR2864233 B1 FR 2864233B1 FR 0412942 A FR0412942 A FR 0412942A FR 0412942 A FR0412942 A FR 0412942A FR 2864233 B1 FR2864233 B1 FR 2864233B1
Authority
FR
France
Prior art keywords
infrared bolometer
bolometer
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0412942A
Other languages
English (en)
Other versions
FR2864233A1 (fr
Inventor
Tae Sik Kim
Hee Chul Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Advanced Institute of Science and Technology KAIST
Original Assignee
Korea Advanced Institute of Science and Technology KAIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Advanced Institute of Science and Technology KAIST filed Critical Korea Advanced Institute of Science and Technology KAIST
Publication of FR2864233A1 publication Critical patent/FR2864233A1/fr
Application granted granted Critical
Publication of FR2864233B1 publication Critical patent/FR2864233B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/09—Devices sensitive to infrared, visible or ultraviolet radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/0245—Shape of the cavity itself or of elements contained in or suspended over the cavity for performing thermal shunt
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
FR0412942A 2003-12-17 2004-12-06 Bolometre infrarouge Expired - Fee Related FR2864233B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0092653A KR100517428B1 (ko) 2003-12-17 2003-12-17 적외선 볼로메타

Publications (2)

Publication Number Publication Date
FR2864233A1 FR2864233A1 (fr) 2005-06-24
FR2864233B1 true FR2864233B1 (fr) 2008-02-01

Family

ID=34632162

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0412942A Expired - Fee Related FR2864233B1 (fr) 2003-12-17 2004-12-06 Bolometre infrarouge

Country Status (4)

Country Link
US (1) US7145141B2 (fr)
JP (1) JP3887391B2 (fr)
KR (1) KR100517428B1 (fr)
FR (1) FR2864233B1 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006132155A1 (fr) * 2005-06-06 2006-12-14 Matsushita Electric Industrial Co., Ltd. Dispositif électronique et procédé de fabrication correspondant
DE602006020588D1 (de) * 2005-08-17 2011-04-21 Panasonic Elec Works Co Ltd Infrarotsensor und herstellungsverfahren dafür
KR100785738B1 (ko) 2006-06-19 2007-12-18 한국과학기술원 볼로미터
EP2072976A4 (fr) 2006-10-11 2013-08-14 Panasonic Corp Dispositif électronique
US7825381B2 (en) * 2007-06-29 2010-11-02 Agiltron, Inc. Micromechanical device for infrared sensing
KR100869548B1 (ko) * 2008-05-20 2008-11-19 아이쓰리시스템 주식회사 신호대잡음비가 향상된 볼로미터형 적외선 센서 및 그의제작 방법
KR101078208B1 (ko) * 2008-12-29 2011-11-01 한국과학기술원 볼로미터용 니켈 산화막 및 그의 제조방법, 니켈 산화막을 이용한 적외선 감지소자
CN101871818B (zh) * 2010-06-25 2012-05-23 清华大学 红外探测器
WO2013011753A1 (fr) * 2011-07-21 2013-01-24 コニカミノルタホールディングス株式会社 Capteur de chaleur
KR101442811B1 (ko) * 2013-08-09 2014-09-23 아이쓰리시스템 주식회사 온도변화에 따른 출력 변화를 완화시킨 볼로미터형 적외선 센서
KR101661677B1 (ko) * 2015-06-24 2016-09-30 한국기계연구원 메타표면 흡수체를 포함한 볼로미터형 적외선 센서
US10222265B2 (en) * 2016-08-19 2019-03-05 Obsidian Sensors, Inc. Thermomechanical device for measuring electromagnetic radiation
US10175113B2 (en) * 2017-04-12 2019-01-08 Raytheon Company Thermal protection mechanisms for uncooled microbolometers
JPWO2021241088A1 (fr) * 2020-05-25 2021-12-02

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695715A (en) * 1985-12-12 1987-09-22 Northrop Corporation Infrared imaging array employing metal tabs as connecting means
US5300915A (en) * 1986-07-16 1994-04-05 Honeywell Inc. Thermal sensor
US5486698A (en) * 1994-04-19 1996-01-23 Texas Instruments Incorporated Thermal imaging system with integrated thermal chopper
US6392232B1 (en) * 1995-07-21 2002-05-21 Pharmarcopeia, Inc. High fill factor bolometer array
US6144285A (en) * 1999-09-13 2000-11-07 Honeywell International Inc. Thermal sensor and method of making same
GB2365209A (en) * 2000-07-22 2002-02-13 Bae Sys Electronics Ltd Thermal sensing apparatus with reset means involving intermittently providing thermal path between a detector and a thermal sink

Also Published As

Publication number Publication date
KR20050060919A (ko) 2005-06-22
FR2864233A1 (fr) 2005-06-24
KR100517428B1 (ko) 2005-09-28
US7145141B2 (en) 2006-12-05
US20050133721A1 (en) 2005-06-23
JP2005181308A (ja) 2005-07-07
JP3887391B2 (ja) 2007-02-28

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120831